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Scanning Electron Microscopy pp 128–175Cite as

Emission of Electrons and X-Ray Quanta

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Part of the book series: Springer Series in Optical Sciences ((SSOS,volume 45))

Abstract

Backscattered electrons (BSE) and secondary electrons (SE) are the most important signals for image recording. A knowledge of the dependence of the backscattering coefficient η and the secondary electron yield δ on surface tilt, material and electron energy and their angular and energy distributions is essential for the interpretation of image contrast (Chap. 6). The spatial exit distributions and information depths of these electrons are responsible for the resolution if the latter is not limited by the electron-probe size. The shot noise of the incident electron current will be increased during SE and BSE emission.

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  1. Physikalisches Institut, Westfätlische Wilhelms-Univeraität Münster, Domagkstraße 75, D-4400, Münster, Fed. Rep. of Germany

    Professor Dr. Ludwig Reimer

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Reimer, L. (1985). Emission of Electrons and X-Ray Quanta. In: Scanning Electron Microscopy. Springer Series in Optical Sciences, vol 45. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-13562-4_4

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