Abstract
The principle of the scanning electron microscope (SEM) is shown in Fig. 1.1. Electrons from a thermionic or field-emission cathode are accelerated by a voltage of 1–50 kV between cathode and anode. The smallest beam cross-section at the gun — the crossover — with a diameter of the order of 10–50 gm for thermionic and 10–100 nm for field-emission guns, is demagnified by a two-or three-stage electron lens system, so that an electron probe of diameter 1–10 nm carrying an electron probe current of 10−10−10−12A is formed at the specimen surface. For modes of operation that need a higher electron-probe current of 10−9−10−8A, the electron-probe diameter increases to 0.1–1 gm.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
L. Reimer: Transmission Electron Microscopy, Physics of Image Formation and Microanalysis, Springer Ser. Opt. Sci., Vol. 36 ( Springer, Berlin, Heidelberg 1984 )
C.W. Oatley, W.C. Nixon, R.F.W. Pease: Scanning Electron Microscopy, Adv. Electr. Electron Phys. 21, 181 (1965)
P.R. Thornton: Scanning Electron Microscopy, Application to Materials and Device Science ( Chapman and Hall, London 1972 )
C.W. Oatley: Scanning Electron Microscopy I. The Instrument, ( University Press, Cambridge 1972 )
D.B. Holt, M.D. Muir, P.R. Grant, I.M. Boswarva (eds.): Quantitative Scanning Electron Microscopy ( Academic, London 1974 )
C. Wells: Scanning Electron Microscopy (McGraw-Hill, New York 1974
J.I. Goldstein, H. Yakowitz: Practical Scanning Electron Microscopy ( Plenum, New York 1975 )
L. Reimer, G. Pfefferkorn: Raster-Elektronenmikroskopie, 2nd ed. ( Springer, Berlin, Heidelberg 1977 )
F. Maurice, L. Meny, R. Tixier (eds): Microanalyse et Microscopie Electronique à Balayage (Les Editions de Physique, Orsay 1978) Engl. Trans1.: Microanalysis and Scanning Electron Microscopy, 1979
J.I. Goldstein, D.E. Newbury, P. Echlin, D.C. Joy, C. Fiori, E. Lifshin: Scanning EZectrpn Microscopy and X-Ray Microanalysis (Plenum,New York 1981
B.L. Gabriel: Biological Scanning Electron Microscopy ( Van Nostrand, New York 1982 )
S.J.B. Reed: Electron Microprobe Analysis ( University Press, Cambridge 1975 )
D.A. Erasmus: Electron Microprobe Analysis in Biology ( Chapman and Hall, London 1978 )
P. Lechene, R.R. Warner (eds.): Microbeam Analysis in Biology ( Academic, New York 1979 )
T.E. Hutchinson, A.B. Somlyo: Microprobe Analysis of Biological Systems ( Academic, New York 1981 )
K.F.J. Heinrich: Electron Beam X-Ray Microanalysis (Van Nostrand, New York 1981) The following abbreviations are used: BEDO: Beiträge zur elektronenmikroskopischen Direktabbildung von Oberflächen (ed. G. Pfefferkorn), Remy, Münster 1968 and following years SEM: Scanning Electron Microscopy (ed. Om Johari), IITRI, Chicago 1968–1977, SEM Inc., AMF O’Hare 1978 and following years
M.A. Hayat (ed.): X-Ray Microanalysis in Biology ( McMillan, London 1981 )
C. Quintana, S. Halpern: Microanalyse X en Biologie. (Soc. Française de Micr. Electronique, Paris 1983 )
H. Bethoe, J. Heydenreich (eds.): Elektronenmikroskopie in der Fest-körperrhysik. (VEB Deutscher Verlan der Wissenschaften, Berlin 1980) 1.20 P. Echlin: Analysis of Organic and Biological Surfaces. ( Wiley and Sons, New York 1984 )
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 1985 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Reimer, L. (1985). Introduction. In: Scanning Electron Microscopy. Springer Series in Optical Sciences, vol 45. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-13562-4_1
Download citation
DOI: https://doi.org/10.1007/978-3-662-13562-4_1
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-13564-8
Online ISBN: 978-3-662-13562-4
eBook Packages: Springer Book Archive