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Clean Room Air Monitoring

  • Susan Crum

Abstract

There is no typical clean room. Because each clean room is set up differently, with its own individual, often proprietary, manufacturing process, there are no easy, standardized solutions to testing air cleanliness.

Keywords

Particle Counter Clean Room Sample Flow Rate Automatic Compensation High Efficiency Filter 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1988

Authors and Affiliations

  • Susan Crum

There are no affiliations available

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