Vth International Congress on X-Ray Optics and Microanalysis / V. Internationaler Kongreß für Röntgenoptik und Mikroanalyse / Ve Congrès International sur l’Optique des Rayons X et la Microanalyse pp 337-340 | Cite as
Computer Controlled Scanning Electron Microscope
A study has been undertaken which will investigate the feasibility of developing a completely automatic, high speed particle counting and sizing device, utilizing a scanning electron microscope coupled with a digital computer. The computer will process the signal normally recorded on the cathode ray tube. From this information the computer will control the motion of the electron beam and the position of the specimen stage. The potential applications of this instrument appear to be almost limitless. Beside the routine counting tasks in air polution studies, this instrument is well suited for biological studies, for example, the counting of blood cells and chromosomes.
KeywordsDigital Computer German Patent Entire Boundary Dimensional Phase Space Specimen Stage
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- 1.Dr. Hugo Stintzing, German patent No. 485155, Tube Investments Department of Technical In- formation, Translation No. 1666.Google Scholar
- 2.Moore, G. A., and L. L. Wyman: Quantitative metallography with a digital computer: Application to a Nb-Sn superconducting wire. J. Research A 67, 127 (1962).Google Scholar