Wafer Bonding pp 473-494 | Cite as

Debonding of Wafer-Bonded Interfaces for Handling and Transfer Applications

  • J. Bagdahn
  • M. Petzold
Part of the Springer Series in MATERIALS SCIENCE book series (SSMATERIALS, volume 75)


The debonding of joined wafers in combination with wafer bonding techniques, sometimes called reversible wafer bonding, has different promising applications for the fabrication of microelectronic devices based on thin, flexible and brittle wafers, for optoelectronic devices like LEDs, solid state lasers or solar cells, as well as for MEMS (Microelectromechanical Systems). This chapter will be focused on debonding techniques of directly bonded wafers. However, attention will also be given briefly to wax and adhesive bonding/debonding technologies that are of interest for the temporary mechanical stiffening of wafers.


Stress Intensity Factor Subcritical Crack Growth Wafer Bonding GaAs Wafer Transfer Application 
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© Springer-Verlag Berlin Heidelberg 2004

Authors and Affiliations

  • J. Bagdahn
  • M. Petzold

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