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Wafer Bonding pp 417-450 | Cite as

Single-Crystal Lithium Niobate Films by Crystal Ion Slicing

  • M. Levy
  • A. M. Radojevic
Part of the Springer Series in MATERIALS SCIENCE book series (SSMATERIALS, volume 75)

Abstract

Lithium Niobate (LiNbO3) is extensively used in a variety of applications because of its strong electro-optic (EO), photorefractive and nonlinear optical characteristics. Its unique properties and environmental stability have resulted in its incorporation into photo-refractive gratings, holographic recording, and optical frequency conversion devices. In addition, it exhibits strong pyroelectric, piezoelectric and acousto-optic figures-of-merit, and has found wide applicability in acoustic wave transducers, delay lines and filters. In optics, LiNbO3 is widely used in optical modulators, lasers, parametric oscillators and amplifiers, polarization controllers, couplers, detectors, filters and switches, making it a key material in telecommunication systems. The development of optical telecommunications has in fact called forth the need for integrated photonic circuits with different devices and materials. Thus, a hybrid integration of single-crystal LiNbO3 in the form of thin, micrometer-thick films onto other, often non-compatible, platforms, such as silicon, is a very attractive prospect. In this chapter we explore the fabrication of such films by a layer-transfer technique called crystal ion slicing and examine the properties of the films obtained by this technology.

Keywords

Rapid Thermal Annealing Lithium Niobate Sacrificial Layer Noise Equivalent Power Pyroelectric Detector 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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© Springer-Verlag Berlin Heidelberg 2004

Authors and Affiliations

  • M. Levy
  • A. M. Radojevic

There are no affiliations available

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