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Transport Processes in Low-Energy Ion-Irradiated Polymers

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Transport Processes in Ion-Irradiated Polymers

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 65))

Abstract

In contrast to ion implantation into metals, semiconductors or ceramic materials, where the implanted ions distribute nicely according to the theoretically predicted ballistic distributions, for polymeric targets one has frequently observed strong deviations from the expected range profiles. It is accepted that these profiles result from the diffusional redistribution of the as-implanted particles, their mobility being influenced by the defects in the polymer that act as traps for the mobile species. In fact, not only the mobility of implanted ions, but also that of other penetrants (e.g., gases, liquids, etc.) is affected by these defects.

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References

  1. Fink D, Klett R, Hu X, Müller M, Schiwietz G, Xiao G, Chadderton LT, Wang L, Mathis C, Hnatowicz V, Vacík J, Characterization of aged latent ion tracks in polyimide. Nucl Instrum Methods B116, 66–71 (1996)

    Article  CAS  Google Scholar 

  2. Guimaräes RB, Behar M, Livi RP, de Souza JP, Amaral L, Zawislak FC, Fink D, Biersack JP, Dose and energy dependence of implanted ion profiles (9 S Zl 83) in the AZ111 photoresist. Nucl Instrum Methods B19/20, 882–886 (1987)

    Google Scholar 

  3. Hirata K, Kobayashi Y, Hishita S, Ujihara Y, Damage depth-profiling of Au+ and O+-irradiated amorphous PEEK by monoenergetic positron beams. Appl Phys A64, 491–495 (1997)

    Article  CAS  Google Scholar 

  4. Kobayashi Y, Kojima I, Hishita S, Suzuki T, Asari E, Kitajima M, Damage-depth profiling of an ion-irradiated polymer by monoenergetic positron beams. Phys Rev B52, 823–828 (1995)

    Article  CAS  Google Scholar 

  5. Fink D, Biersack JP, Chen JT, Städele M, Tjan K, Behar M, Olivieri CA, Zawislak FC, Distributions of light ions and foil destruction after irradiation of organic polymers. J Appl Phys 58, 668–676 (1985)

    Article  CAS  Google Scholar 

  6. Fink D, Müller M, Petrov A, Klett R, Palmetshofer L, Hnatowicz V, Vacík•J, Cervenâ J, Chadderton LT, Aqueous marker penetration into ion irradiated polyimide. Nucl Instrum Methods B191, 662–668 (2002)

    Article  CAS  Google Scholar 

  7. Balasubramanian V, Kelkar DS, Kurup MB, Electrical conduction in ion implanted Nylon-6 films. Nucl Instrum Methods B113, 257–260 (1996)

    Article  CAS  Google Scholar 

  8. Davenas J, Xu XL, Diffusion of iodine into polyimide films modified by ion bombardment. Nucl Instrum Methods B71, 33–38 (1992)

    Article  Google Scholar 

  9. Fink D, Müller M, Szimkowiak P, Klett R, Vacík J, Hnatowicz V, Chadderton LT, Rutherford backscattering of laterally heterogeneous structures: The determination of radial density distributions in ion tracks in collodium. Nucl Instrum Methods B134, 87–97 (1998)

    Article  CAS  Google Scholar 

  10. Geis MW, Randall JN, Deutsh TF, Efremov NN, Donelly JP, Woodhouse JD, Nitrocellulose as a self-developing resist with sub-micrometer resolution and processing stability. J Vac Sci Technol Bl, 1178–1181 (1983)

    Google Scholar 

  11. Kobayashi Y, Haraya K, Hattori S, Sasuga T, Effect of electron-irradiation on the free volume of PEEK studied by positron annihilation. Nucl Instrum Methods B91, 447–449 (1994);

    Article  CAS  Google Scholar 

  12. and: Fink D, Vacík J, Cervenâ J, Hnatowicz V, Kobayashi Y, Hishita S, Ghosh S, Klett R, On the uptake of aqueous tracer solutions by pristine and ion-irradiated PEEK. Nucl Instrum Methods B134, 61–72 (1998)

    Google Scholar 

  13. D. Fink and V. Hnatowicz

    Google Scholar 

  14. Vacík J, Cervenâ J, Hnatowicz V, Fink D, Strauss P, Study of LiOH etching of polyethylene terephthalate irradiated with 11.4 MeV/amu Pb ions by neutron depth profiling and a particle transmission. Nucl Instrum Methods B146, 509512 (1998)

    Google Scholar 

  15. Umezawa K, Nakanishi S, Gibson WM, Frisch HL, Kitamura A, Study of diffusion and trapping of a fluorinated hydrocarbon in ion beam irradiated poly(styrene) by nuclear reaction resonance analysis. Phys Lett 65, 1501–1503 (1994)

    CAS  Google Scholar 

  16. Fink D, Behar M, Kaschny JR, Klett R, Chadderton LT, Hnatowicz V, Vacík J, Wang L, On the redistribution of 6Li+ ions implanted into polypropylene films Appl Phys A62, 359–367 (1996)

    Google Scholar 

  17. Fink D, Müller M, Stettner U, Behar M, Fichtner P, Zawislak FC, Koul S, Non-regular depth profiles of light ions implanted into organic polymer films Nucl Instrum Methods B2, 150–154 (1988)

    Google Scholar 

  18. Guimarâes RB, Amaral L, Behar M, Zawislak FC, Fink D, Range measurements and thermal stability study of AZ111 photoresist, J Appl Phys 63, 2502–2506 (1988)

    Article  Google Scholar 

  19. Bello I, Carter G, Knott KF, Waworth L, Stephens GA, Farrell G, Gas trapping induced by argon implantation and irradiation of polymer films Rad Eff 89, 189–204 (1985)

    CAS  Google Scholar 

  20. Guimarães RB, Amaral L, Behar M, Fichtner PFP, Zawislak FC, Fink D, Implanted boron depth profiles in the AZ111 photoresist. J Appl Phys 63, 2083–2085 (1988)

    Article  Google Scholar 

  21. Guimarâes RB, Amaral L, Behar M, Fink D, Zawislak FC, Depth profiles of Li ions implanted in the photoresist AZ111. J Mater Res 3, 1422–1426 (1988)

    Article  Google Scholar 

  22. Behar M, Amaral L, Kaschny J, Zawislak F, Guimarâes RB, Fink D, Radiation induced diffusion of Xe implanted into the AZ1350 polymer. Nucl Instrum Methods B46, 313–316 (1990)

    Article  Google Scholar 

  23. Fink D, Müller M, Stettner U, Behar M, Fichtner P, Zawislak FC, Koul S, Non-regular depth profiles of light ions implanted into organic polymer films Nucl Instrum Methods B2 150–154 (1988)•

    Google Scholar 

  24. Vacik J, Cervenâ J, Fink D, Klett R, Hnatowicz V, Popok V, Odzhaev V, High fluence boron implantation into polymers. Rad Eff Defects Solids 143, 139–156 (1997);

    Article  CAS  Google Scholar 

  25. Vacík J, Hnatowicz V, •ervenâ J, Pefina V, Popok V, Odzhaev V, Fink D, High fluence boron implantation in polyimide. Nucl Instrum Methods B148, 1126–1130 (1999)

    Google Scholar 

  26. Fink D, Müller M, Ghosh S., Hnatowicz V Vacík J, Tomographic study of the three-dimensional distribution of a high-fluence implant in a polymer. Appl Phys A68, 429–434 (1999)

    Article  CAS  Google Scholar 

  27. Soares MRF, Fink D, Müller M, Petrov A, Behar M, 10B+ Ion implantation into the photoresist S1813. Submitted to Appl Phys A (2003)

    Google Scholar 

  28. Fink D, Müller M, Stettner U, Behar M, Fichtner P, Zawislak FC, Koul S, Non-regular depth profiles of light ions implanted into organic polymer films Nucl Instrum Methods B2, 150–154 (1988)

    Google Scholar 

  29. Al-Najjar SAR, Bull R, Durrani SA, Track profile and range studies of heavy and light ions in CR-39: Effect of thermal pre-treatment on etching characteristics. Proc of the 11th Intl. Conf. on solid state nuclear track detectors, Bristol. pp. 167–170 (1981)

    Google Scholar 

  30. Kaschny JR, Amaral L, Fink D, Behar M, Radiation induced diffusion of Xe to a polymer film. Rad Eff Defects Solids 125, 289–298 (1993)

    Article  CAS  Google Scholar 

  31. Ho PS, Haight R, White RC, Silverman BD, Faupel F, Chemistry, microstructure and adhesion of metal-polymer interfaces. In: Lee L-H (ed.), Fundamentals of Adhesion, Plenum Press, New York and London, 1991, pp. 383–406

    Google Scholar 

  32. Marin N, Serruys Y, Metallic Impurities diffusion in a polymer film (kapton) under and out of irradiation. Nucl Instrum Methods B131, 109–120 (1997)

    Article  CAS  Google Scholar 

  33. Marin N, Serruys Y, Diffusion of metals deposited on a polyimide film (Kapton) under and out of irradiation. Nucl Instrum Methods B105, 175–180 (1995)

    Article  CAS  Google Scholar 

  34. Soarez MRF, Amaral L, Behar M, Fink D, Diffusion of Ag implanted into the AZ1350 photoresist. Nucl Instrum Methods B191, 690–694 (2002)

    Article  Google Scholar 

  35. Soarez MRF, Kaschny JRA, dos Santos JHR, Amaral L, Behar M, Fink D, Diffusion and solubility of Au implanted into the AZ1350 photoresist. Nucl Instrum Methods B166–167 615–620 (2000), and references [1–7], and [13] cited therein

    Google Scholar 

  36. Kobayashi T, Iwaki M, Doi Y, Iwaki M, Metallic nanoparticles formed in polyimide by ion implantation. Nucl Instrum Methods B175, 548–553 (2001)

    Article  Google Scholar 

  37. Stepanov AL, Abdullin SN, Petukhov VYu, Osin N, Khaibullin RI, Khaibullin IB, Formation of metal-polymer composites by ion implantation. Philos Mag B80, 23–28 (1999)

    Google Scholar 

  38. Khaibullin RI, Osin YN, Stepanov AL, Khaibullin IB, Synthesis of metal/polymer composite films by implantation of Fe and Ag ions in viscous and solid state silicone substrates. Nucl Instrum Methods B148, 1023–1028 (2000)

    Google Scholar 

  39. Shanker K, MacDonald JR, Thermal stability of metal films on polyimide. J Vac Sci Technol A5, 2894–2897 (1987)

    Article  CAS  Google Scholar 

  40. Grande PL, Zawislak FC, Fink D, Behar M, Range parameters study of medium-heavy ions implanted into light substrates. Nucl Instrum Methods 61, 282–290 (1991)

    Article  Google Scholar 

  41. Biersack JP, Haggmark LG, The transport and ranges in matter. Nucl Instrum Methods 174, 257–269 (1980)

    Article  CAS  Google Scholar 

  42. Nakao A, Kobayashi T, Iwaki M (2001), Surface modifications of polystyrene by K implantation. Nucl Instrum Methods B191, 685–689 (2002)

    Article  CAS  Google Scholar 

  43. Popok VN, Khaibullin RI, Bazarov VV, Valeev VF, Hnatowicz V, Machkova A, Odzhaev VB, Anomalous depth distribution of Fe+ and Co+ ions in polyimide under high fluence implantation. Nucl Instrum Methods B191, 695–699 (2001)

    Google Scholar 

  44. Fink D, Müller M, Klett R, Vacík J, Hnatowicz V, Cervenâ J, Three-dimensional implantation distribution of lithium implanted into pyrographite, as revealed by solid state tomography in combination with neutron depth profiling. Nucl Instrum Methods B103, 423–428 (1995)

    Article  CAS  Google Scholar 

  45. Shrinet V, Chaturvedi UK, Agrawal SK, Nigam AG, A simple set-up for in-situ observation of the critical dose of blistering during ion implantation in polymers. Nucl Instrum Methods B1, 617–620 (1984)

    Article  Google Scholar 

  46. Fink D, Klett R, Chung WH, Grünwald R, Döbeli M, Ames F, Chadderton LT, Vacík J, Hnatowicz V, Doping of C+l (n = 1,3, 5, 8) cluster ion tracks in polyimide. Rad Eff Defects Solids 140, 3–20 (1996)

    CAS  Google Scholar 

  47. Klett R, Charakterisierung von hochenergetischen Schwerionenspuren in Polyimid, PhD. Thesis, Humboldt-University, Berlin, 1996 (in German)

    Google Scholar 

  48. Fink D, Klett R, Hnatowicz V, Vacík J, Mathis C, Omichi H, Hosoi F, Chadderton LT, Wang L, Bonding of dopants to irradiated polymers. Nucl Instrum Methods B116, 434–439 (1996), and references therein, and: Cervenâ J, Vacík J, Hnatowicz V, Mackova A, Peiina V, Fink D, Decoration of radiation damages in polyimide implanted with rare gas ions. Surf Coat Technol 159–159, 391–394 (2002)

    Google Scholar 

  49. Hnatowicz V, Vacík J, Cervenâ J, Svorcfk V, Rybka V, Popok V, Fink D, Klett R, Doping of ion implanted poylethylene with metallocarborane. Nucl Instrum Methods B105, 241–244 (1995)

    Article  CAS  Google Scholar 

  50. Fink D, Vacík J, Klett R, Chadderton LT, Hnatowicz V, Doping of 20 MeV fullerene ion tracks in polyimide. Nucl Instrum Methods B119, 591–595 (1996)

    Article  CAS  Google Scholar 

  51. Fink D, Vacík J, Cervenâ J, Hnatowicz V, Kobayashi Y, Hishita S, Ghosh S, Klett R, On the uptake of aqueous tracer solutions by pristine and ion irradiated PEEK. Nucl Instrum Methods B134, 61–72 (1998)

    Article  CAS  Google Scholar 

  52. Fink D, Chadderton LT, Cruz SA, Fahrner WR, Hnatowicz V, Te Kaat EH, Melnikov AA, Varichenko VS, Zaitsev AM, Ion track doping. Rad Eff Defects Sol 132, 81–90 (1994)

    Article  CAS  Google Scholar 

  53. Fink D, Müller M, Petrov A, Klett R, Palmetshofer L, Vacík J, Cervenâ J, Hnatowicz V, Aqueous Penetration into low and high energy ion irradiated polyimide. Nucl Instrum Methods B191, 662–668 (2002)

    Article  CAS  Google Scholar 

  54. Guimaräes RB, Livi RP, de Souza JP, Zawislak FC, Fink D, Biersack JP, Mass and energy dependence of implanted ion profiles in the AZ111 photoresist. J Appl Phys 60, 1322–1324 (1986)

    Article  Google Scholar 

  55. Hnatowicz V, Vacík J, Svorcfk V, Rybka V, Popok V, Jankovskij O, Fink D, Klett R, Iodine diffusion and trapping in PE implanted with 150 keV F+ and As ions to different fluences. Nucl Instrum Methods B114, 81–87 (1996)

    Article  CAS  Google Scholar 

  56. Hnatowicz V, Vacík J, Cervenâ J, Svorcfk V, Rybka V, Fink D, Klett R, Doping of polyethyleneterephthalate modified by keV Ar+ ion bombardment with anorganic agents. Rad Meas 28, 777–780 (1997)

    Article  CAS  Google Scholar 

  57. Davenas J, Boiteux G, Jardin C, Electron and mass transport in ion beam nanostructured polymers: role of irradiation. Nucl Instrum Methods B131, 91–96 (1997)

    Article  CAS  Google Scholar 

  58. Fink D, Klett R, Müller M, Omichi H, Hosoi F, Vacík J, Hnatowicz V, Chadderton LT, Influence of energetic ions on grafting to polyethylene. Appl Phys A63, 441–446 (1996)

    Article  CAS  Google Scholar 

  59. Torrisi L, Radiation damage in polyvinyltoluene (PVT) induced by 50–400 keV Helium beams. Rad Eff Defects Solids 143, 19–32 (1997)

    Article  CAS  Google Scholar 

  60. Fink D, Klett R, Behar M, Sanchez G, Kaschny JR, Hertlein WG, Changes in the photoresist inhibitor distribution after ion irradiation and thermal treatment. Nucl Instrum Methods B132, 660–670 (1997)

    Article  CAS  Google Scholar 

  61. Fink D, Omichi H, Hosoi F, Tamada M, Hnatowicz V, Vacík J, Chadderton LT, Klett R, Solid and liquid phase doping of energetic ion tracks in polymers. Trans Mater Res Soc Jpn 17, 581–583 (1994)

    CAS  Google Scholar 

  62. Okayama Y, Hashimoto T, Yoguchi T, High dose ion implantation into photoresist. J Electro Chem Soc 125, 1293–1298 (1978)

    Article  Google Scholar 

  63. Sias US, Sanchez G, Kaschny JR, Amaral L, Behar M, Fink D, Polymer thermal stability enhancement induced by high energy ion beam bombardment. Nucl Instrum Methods B141, 187–192 (1998)

    Article  CAS  Google Scholar 

  64. Sias US, Sanchez G, Kaschny JR, Amaral L, Behar M, Fink D, Polymer thermal protection induced by ion beam irradiation. Nucl Instrum Methods B134, 3545 (1998)

    Google Scholar 

  65. Behar M, Guimarâes RB, Grande PL, Amaral L, Biersack JP, Fink D, Kaschny JR, Zawislak FC, Range and thermal-behavior studies of Au and Bi implanted into photoresist films Phys Rev B41, 6145–6153 (1990)

    CAS  Google Scholar 

  66. Maltez RL, Amaral L, Behar M, Zawislak FC, Thermal behaviour study of Sb implanted into photoresist film. Nucl Instrum Methods B80/8, 1316–1319 (1993)

    Google Scholar 

  67. Zhang G, Thomas JK, Photoionization in polymer films In: RL Clough and SW Shalaby (eds.), Irradiation of polymers: Fundamentals and technological applications, Am Chem Soc Symp Ser 620, Washington, USA, 1996

    Google Scholar 

  68. Davenas J, Xu XL, Thomas JP, Comparative Study of the stability towards ionic irradiation of (CH)x and LiF. Presented at the 2nd Intl. Conf. on Radiation Effects in Insulators, Albuquerque, N.M., May 30—June 3, 1983 (unpublished)

    Google Scholar 

  69. Fink D, Biersack JP, Städele M, On the performance and lifetime of solar mirror foils in space. Space Solar Power Rev 5, 91–100 (1985)

    Google Scholar 

  70. Hnatowicz V, Kvítek J, Peiina V, Svorcík V, Rybka V, Popok V, Anomalous diffusion of Pb atoms into polyethylene implanted with F+ and As ions to different doses. Nucl Instrum Methods B93, 282–287 (1994)

    Article  CAS  Google Scholar 

  71. Svorcík V, Rybka V, Micek I, Popok V, Jankovski O, Hnatowicz V, Kvítek J, Structure and properties of polymers modified by ion implantation. Eur Polym J 30, 1411–1415 (1994)

    Article  Google Scholar 

  72. Hnatowicz V, Vacík J, Perina V, Svorcík V, Rybka V, Jankovskij O, Popok V, Fink D, Klett R, Doping of latent tracks in polyethylene by iodine diffusion. Proc. 17th Conf. on Nucl. Tracks in Solids, Dubna; JINR E13–94–290 (1994), pp. 113–114

    Google Scholar 

  73. Fink D, Chung WH, Klett R, Döbeli M, Synal HA, Chadderton LT, Wang L, On the dyeing of ion tracks in polymers. Nucl Instrum Methods B108, 377–384 (1996)

    Article  CAS  Google Scholar 

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Fink, D., Hnatowicz, V. (2004). Transport Processes in Low-Energy Ion-Irradiated Polymers. In: Transport Processes in Ion-Irradiated Polymers. Springer Series in Materials Science, vol 65. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-10608-2_2

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  • DOI: https://doi.org/10.1007/978-3-662-10608-2_2

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  • Print ISBN: 978-3-642-05894-3

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