Skip to main content
SpringerLink
Log in

Silicon Nitride in Encapsulation and Recrystallization

  • Chapter
Si Silicon

Part of the book series: Si. Silicium. Silicon (System-Nr. 15) ((2074,volume S-i / B / 1-5 / 5 / c))

Abstract

Semiconductor substrates or devices are encapsulated with high temperature-resistant silicon nitride films to protect them against damage caused by high-temperature processes. These include diffusion, electrical activation of implanted dopants, and annealing of radiation damage caused by ion implantation. Silicon nitride encapsulation prevents the decomposition of a semiconductor substrate and the diffusion or evaporation of species at elevated process temperatures. The major application of silicon nitride films as an encapsulant involves compound semiconductors and, to a minor extent, element semiconductors.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 1,459.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Celler, G. K.; Trimble, L. E.; Sheng, T. T. (Proc. Electrochem. Soc. 89–9 [1989] 351/9; C.A. 111 [1989] No. 241124).

    Google Scholar 

  2. Geipel, H. J.; Schaefer, C. A.; White, F. R.; Wursthorn, J. M. (U.S. 4527325 [1985]; C.A. 103 [1985] No. 114573).

    Google Scholar 

  3. Oberstar, J. D.; Streetman, B. G. (Thin Solid Films 103 [1983] 17/26).

    Article  Google Scholar 

  4. Nemoto, Y. (Japan. Kokai Tokkyo Koho 61–7668 [1986] from C.A. 104 [1986] No. 217694).

    Google Scholar 

  5. Kular, S. S.; Sealy, B. J.; Ono, Y.; Stephens, K. G. (Solid State Electron. 27 [1984] 83/8; C.A. 100 [1984] No. 77913).

    Article  Google Scholar 

  6. Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–6137 [1981/83] from C.A. 98 [1983] No. 208533).

    Google Scholar 

  7. Vaidyanathan, K. V.; Helix, M. J.; Wolford, D. J.; Streetman, B. G.; Blattner, R. J.; Evans, C. (J. Electrochem. Soc. 124 [1977] 1781/4).

    Article  Google Scholar 

  8. Molnar, B. (U.S. 4357180 [1981/82]; C.A. 98 [1983] No. 10497).

    Google Scholar 

  9. Gill, S. S.; Sealy, B. J.; Tophan, P. J.; Barrett, N. J.; Stephens, K. G. (Electron. Letters 17 [1981] 623/4; CA. 95 [1981] No. 124930).

    Article  Google Scholar 

  10. Anderson, C. L; Dunlap, H. L; Vaidyanathan, K. V. (AD-A0623677 [1978] 1/21; C.A. 91 [1979] No. 31627).

    Google Scholar 

  11. Takagi, J.; Nagakawa, Y. (Japan. Kokai Tokkyo Koho 61–54619 [1986] from C.A. 105 [1986] No. 71178).

    Google Scholar 

  12. Ruterana, P.; Chevalier, J. P.; Friedel, P.; Bonnet, N. (Conf. Ser. Inst. Phys. No. 87 [1987] 27/32 from CA. 109 [1988] No. 220509).

    Google Scholar 

  13. Logan, R. A. (U.S. 4226667 [1978/80] from C.A. 93 [1980] No. 229763).

    Google Scholar 

  14. Valco, G. J.; Kapoor, V. J. (J. Vac. Sei. Technol. [2] A3 [1985] 1020/3).

    Google Scholar 

  15. Helix, M. J. (AD-A085506 [1979] 1/96; C.A. 93 [1980] No. 229595).

    Google Scholar 

  16. Takebe, T.; Shimazu, M. (Japan. Kokai Tokkyo Koho 61–106500 [1986] from C.A. 105 [1986] No. 144082).

    Google Scholar 

  17. Vaidyanathan, K. V.; Dunlap, H. L. (AD-A125181 [1982] 1/59; CA. 99 [1983] No. 56439).

    Google Scholar 

  18. Valco, G. J.; Kapoor, V. J.; Biedenbender, M. D.; Williams, W. D. (J. Electrochem. Soc. 136 [1989] 175/82).

    Article  Google Scholar 

  19. Oigawa, K.; Uekusa, S.; Sugiyama, Y.; Tacano, M. (Japan. J. Appl. Phys. 26 Pt. 1 [1987] 1719/21).

    Google Scholar 

  20. Dietrich, H. B.; Reid, P. R. (Proc. Electrochem. Soc. 78–2 [1978] 340/6; C.A. 89 [1978] No. 69555).

    Google Scholar 

  21. Sieger, K. J.; Dietrich, H. B. (AD-A087004 [1980] 1/26; C.A. 94 [1981] No. 56855).

    Google Scholar 

  22. Bradley, L. E.; Sites, J. R. (AD-A061652 [1978] 1/21; C.A. 91 [1979] No. 30670).

    Google Scholar 

  23. Birey, H.; Pak, S. J.; Sites, J. R. (Appl. Phys. Letters 35 [1979] 623/5).

    Article  Google Scholar 

  24. Henry, L; Lamy, P.; Guivarch, A.; Pelous, G. (Vide 31 No. 183 [1976] 101/6; C.A. 87 [1977] No. 61319).

    Google Scholar 

  25. Eisen, F. H.; Harris, J. S.; Welch, B. M.; Pashley, R. D.; Sigurd, D.; Mayer, J. W. (Ion Implantation Semicond. Other Mater. Proc. 3rd Intern. Conf., Yorktown Heights, N.Y., 1972 [1973], pp. 631/40 from C.A. 81 [1974] No. 178843).

    Google Scholar 

  26. Eisen, F. H.; Welch, B. M.; Mueller, J.; Gamo, K.; Inada, T.; Mayer, J. W. (Solid State Electron. 20 [1977] 219/23; C.A. 86 [1977] No. 198474).

    Article  Google Scholar 

  27. Gamo, K.; Inada, T.; Krekeler, S.; Mayer, J. W.; Eisen, F. H.; Welch, B. M. (Solid State Electron. 20 [1977] 213/7; CA. 86 [1977] No. 198473).

    Article  Google Scholar 

  28. Tunkasiri, T.; Lewis, D. (Radiât. Eff. 30 [1976] 185/6; C.A. 86 [1977] No. 49742).

    Google Scholar 

  29. Nishihata, M.; Hama, M.; Masuko, Y. (Japan. Kokai Tokkyo Koho 60–219772 [1985] from C.A. 104 [1986] No. 160523).

    Google Scholar 

  30. Hashimoto, A.; Kamijoh, T.; Takano, H.; Sakuta, M. (J. Electrochem. Soc. 134 [1987] 153/6).

    Article  Google Scholar 

  31. Tokunaga, K. (Japan. Kokai Tokkyo Koho 63–293816 [1987/88] from C.A. 100 [1989] No. 146248).

    Google Scholar 

  32. Crowder, B. L. (AD-A006465–9GA [1975] 1/70; C.A. 83 [1975] No. 89716).

    Google Scholar 

  33. Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–145160 [1982/83] from C.A. 99 [1983] No. 223550).

    Google Scholar 

  34. Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–145118 [1982/83] from C.A. 100 [1984] No. 28678).

    Google Scholar 

  35. Tanaka, S. (Japan. Kokai Tokkyo Koho 63–308912 [1988] from C.A. 111 [1989] No. 107148).

    Google Scholar 

  36. Tanaka, S. (Japan. Kokai Tokkyo Koho 63–308913 [1987/88] from C.A. 111 [1989] No. 107149).

    Google Scholar 

  37. Taneoka, T.; Nishizawa, H. (Japan. Kokai Tokkyo Koho 60–194576 [1985] from C.A. 104 [1986] No. 121140).

    Google Scholar 

  38. Hojo, S. (Japan. Kokai Tokkyo Koho 01–061019 [1987/89] from C.A. 111 [1989] No. 223580).

    Google Scholar 

  39. Demi, F. (Czech. 243347 [1987] from C.A. 109 [1988] No. 15711).

    Google Scholar 

  40. Donnelly, J. P.; Lindley, W. T.; Hurwitz, C. E. (Appl. Phys. Letters 27 [1975] 41/3).

    Article  Google Scholar 

  41. Chatterjee, P. K.; Vaidyanathan, K. V.; McLevige, W. V.; Streetman, B. G. (Appl. Phys. Letters 27 [1975] 567/9).

    Article  Google Scholar 

  42. Tamura, A. (Japan. Kokai Tokkyo Koho 61–216 437 [1986] fromC.A. 106 [1987] No. 77164).

    Google Scholar 

  43. Xin, S. H.; Schaff, W. J.; Wood, C. E. C; Eastman, L F. (Conf. Ser. Inst. Phys. [London] No. 65 [1983] 613/8; C.A. 100 [1984] No. 130640).

    Google Scholar 

  44. Nakamura, K.; Nozaki, T. (Nucl. Instrum. Methods Phys. Res. B 37 [1989] 308/11; C.A. 110 [1989] No. 240808).

    Google Scholar 

  45. Sakurai, T.; Nanbu, K.; Furuya, T. (Fujitsu Sei. Tech. J. 12 [1976] 121/30; C.A. 86 [1977] No. 49746).

    Google Scholar 

  46. Allan, D. A.; Smith, P. J.; Bowie, J. A. (Vacuum 35 [1985]543/6;C.A. 104 [1986] No. 60284).

    Article  Google Scholar 

  47. Ardyshev, V. M.; Mamontov, A. P.; Melev, V. G.; Filimonova, I. D. (Izv. Akad. Nauk SSSR Neorgan. Mater. 22 [1986] 147/9;

    Google Scholar 

  48. Ardyshev, V. M.; Mamontov, A. P.; Melev, V. G.; Filimonova, I. D. Inorg. Materials [USSR] 22 [1986] 124/6).

    Google Scholar 

  49. Hemment, P. L.; Sealy, B. J.; Stephens, K. G. (Ion Implant. Semicond. Sei. Technol. Proc. 4th Intern. Conf., Osaka 1974 [1975], pp. 27/34; C.A. 83 [1975] No. 171611).

    Google Scholar 

  50. Bell, E. C; Glaccum, A. E.; Hemment, P. L F.; Sealy, B. J. (Radiât. Eff. 22 [1974] 253/8; C.A. 81 [1974] No. 178810).

    Google Scholar 

  51. Sealy, B. J.; Ritchie, J. M. (Thin Solid Films 35 [1976] 127/30).

    Article  Google Scholar 

  52. Rhines, W. C; Stevenson, D. A.; Barrett, C. R.; Anderson, L. J. (Proc. Annu. Meet. Electron Microsc. Soc. Am. 31 [1973] 124/5 from C.A. 80 [1974] No. 88678).

    Google Scholar 

  53. Kellner, W.; Kniekamp, H.; Ristow, D.; Boroffka, H. (Tech. Dig. Intern. Electron Devices Meeting 1975 238/42; C.A. 85 [1976] No. 152816).

    Google Scholar 

  54. Eisen, F. H.; Welch, B. M.; Gamo, K.; Inada, T.; Mueller, H.; Nicolet, M. A.; Mayer, J. W. (Conf. Ser. Inst. Phys. No. 28 [1976] 64/8; C.A. 85 [1976] No. 39662).

    Google Scholar 

  55. NEC Corp. (Japan. Kokai Tokkyo Koho 59–149023 [1983/84] from C.A. 102 [1985] No. 88547).

    Google Scholar 

  56. Matsumoto, Y. (Japan. Kokai Tokkyo Koho 60–250622 [1985] from C.A. 104 [1986] No. 198352).

    Google Scholar 

  57. Goetz, G.; Gruska, B.; Schwabe, F. (Zentralinst. Kernforsch. Rossendorf Dresden Ber. ZfK–350 [1978] 141/2; C.A. 89 [1978] No. 189815).

    Google Scholar 

  58. Nakagawa, Y.; Takagi, T.; Sakurai, T. (Japan. Kokai Tokkyo Koho 61–18126 [1986] from C.A. 105 [1986] No. 16551).

    Google Scholar 

  59. Sakashita, T. (Japan. Kokai Tokkyo Koho 61–94321 [1986] from C.A. 105 [1986] No. 162707).

    Google Scholar 

  60. Immorlica, A. A., Jr. (U.S. 4174982 [1977/79]; C.A. 92 [1980] No. 32882).

    Google Scholar 

  61. Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 56–135925 [1980/81] from C.A. 96 [1982] No. 78579).

    Google Scholar 

  62. Kakiuchi, T.; Onaka, S. (Japan. Kokai Tokkyo Koho 61–255018 [1986] from C.A. 106 [1987] No. 130221).

    Google Scholar 

  63. Olowolafe, J. O. (Thin Solid Films 161 [1988] 181/5).

    Article  Google Scholar 

  64. Kovalev, A. N.; Kurtaikin, A. I.; Goland, V. V.; Marshalova, K. S. (Sb. Mosk. Inst. Stali Splavov No. 89 [1976] 130/6 from C.A. 86 [1977] No. 132108).

    Google Scholar 

  65. Matsumoto, S.; Hiroshima, Y. (Japan. Kokai Tokkyo Koho 63–142822 [1988] from C.A. 109 [1988] No. 182007).

    Google Scholar 

  66. Watanabe, M. (Japan. Kokai Tokkyo Koho 62–219515 [1987] from C.A. 108 [1988] No. 67300).

    Google Scholar 

  67. Watanabe, M. (Japan. Kokai Tokkyo Koho 63–107019 [1988] from C.A. 110 [1989] No. 17251).

    Google Scholar 

  68. Oshika, K. (Japan. Kokai Tokkyo Koho 63–52480 [1988] from C.A. 109 [1988] No. 30944).

    Google Scholar 

  69. NEC Corp. (Japan. Kokai Tokkyo Koho 59–193025 [1983/84] from C.A. 102 [1985] No. 159063).

    Google Scholar 

  70. Kasashima, M. (Japan. Kokai Tokkyo Koho 01–137624 [1987/89] from C.A. 111 [1989] No. 185732).

    Google Scholar 

  71. Kuzuhara, M. (Japan. Kokai Tokkyo Koho 61–95515 [1986] from C.A. 105 [1986] No. 182299).

    Google Scholar 

  72. Nishibori, K. (Japan. Kokai Tokkyo Koho 63–86426 [1988] from C.A. 109 [1988] No. 65484).

    Google Scholar 

  73. Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–6119 [1981/83] from C.A. 98 [1983] No. 208536).

    Google Scholar 

  74. Lidow, A.; Gibbons, J. F.; Magee, T. (Appl. Phys. Letters 31 [1977] 158/61).

    Article  Google Scholar 

  75. Lidow, A.; Gibbons, J. F.; Magee, T.; Peng, J. (J. Appl. Phys. 49 [1978] 5213/7).

    Article  Google Scholar 

  76. Matsushita Electric Industrial Co., Ltd. (Japan. Kokai Tokkyo Koho 57–19849 [1976/82] from C.A. 97 [1982] No. 119153).

    Google Scholar 

  77. Watanabe, M. (Japan. Kokai Tokkyo Koho 63–44722 [1988] from C.A. 109 [1988] No. 15757).

    Google Scholar 

  78. Kasahara, J.; Gibbons, J. F.; Magee, T.; Peng, J. (J. Appl. Phys. 51 [1980] 4119/24).

    Article  Google Scholar 

  79. Nishimura, T. (Japan. Kokai Tokkyo Koho 61–234026 [1986] from C.A. 106 [1987] No. 187012).

    Google Scholar 

  80. Otori, K. (Japan. Kokai Tokkyo Koho 61–16758 [1986] from C.A. 105 [1986] No. 106294).

    Google Scholar 

  81. Akasaka, Y. (Japan. Kokai Tokkyo Koho 55–1155 [1980] from C.A. 92 [1980] No. 190249).

    Google Scholar 

  82. Teng, T. (U.S. 4431459 [1981/84]; C.A. 100 [1984] No. 149594).

    Google Scholar 

  83. Kular, S. S.; Sealy, B. J.; Badawi, M. H.; Stephens, K. G.; Sadana, D.; Booker, G. R. (Electron. Letters 15 [1979] 413/4; C.A. 92 [1980] No. 103112).

    Article  Google Scholar 

  84. Badawi, M. H.; Akintunde, J. A.; Sealy, B. J.; Stephens, K. G. (Electron. Letters 15 [1979] 447/8; C.A. 92 [1980] No. 120141).

    Google Scholar 

  85. Woodcock, H. M. (Mater. Res. Soc. Symp. Proc. 4 [1982] 665/670; C.A. 97 [1982] No. 191688).

    Google Scholar 

  86. Compaan, A.; Abbi, S. C; Yao, H. D.; Bhat, A.; Langer, D. W. (J. Appl. Phys. 62 [1987] 2561/3).

    Article  Google Scholar 

  87. Bhat, A.; Yao, H. D.; Compaan, A.; Horak, A.; Rys, A. (J. Appl. Phys. 64 [1988] 2591/4).

    Article  Google Scholar 

  88. Woodcock, J. M.; Butler, H. (Radiât. Eff. 47 [1980] 81/4; C.A. 93 [1980] No. 59470).

    Google Scholar 

  89. Compaan, A.; Abbi, S. C; Yao, H. D.; Bhat, A.; Hashmi, F. (Mater. Res. Soc. Symp. Proc. 74 [1987] 147/52; C.A. 107 [1987] No. 166444).

    Google Scholar 

  90. Vigil, E.; Zehe, A.; Gracia, M.; Martinez, M. (Cryst. Res. Technol. 23 [1988] 1043/51; C.A. 110 [1989] No. 67656).

    Google Scholar 

  91. Martin, G. M.; Steers, M.; Venger, C; Simondet, F.; Rigo, S. (Laser Electron Beam Process. Mater. Proc. Symp., Cambridge, Mass., 1979 [1980], pp. 360/6; C.A. 93 [1980] No. 178190).

    Google Scholar 

  92. Wilson, M. R.; Kosel, P. B.; Shen, Y. D.; Welch, B. M. (J. Electrochem. Soc. 134 [1987] 2560/5).

    Google Scholar 

  93. Miyano, N. (Japan. Kokai Tokkyo Koho 62–165326 [1987] from C.A. 107 [1987] No. 227487).

    Google Scholar 

  94. Miyano, N.; Takebe, T.; Murai, S. (Japan. Kokai Tokkyo Koho 62–71221 [1987] from C.A. 107 [1987] No. 88015).

    Google Scholar 

  95. Shahid, M. A.; Gwilliam, R.; Sealy, B. J. (Electron. Letters 21 [1985] 729/30; C.A. 103 [1985] No. 151735).

    Article  Google Scholar 

  96. Barrett, N. J.; Grange, J. D.; Sealy, B. J.; Stephens, K. G. (J. Appl. Phys. 56 [1984] 3503/7).

    Article  Google Scholar 

  97. Gwilliam, R.; Deol, R. S.; Blunt, R.; Sealy, B. J. (Conf. Ser. Inst. Phys. No. 87 [1987] 315/20 from C.A. 109 [1988] No. 220511).

    Google Scholar 

  98. Gwilliam, R.; Shahid, M. A.; Sealy, B. J. (Mater. Res. Soc. Symp. Proc. 52 [1986] 391/6; C.A. 105 [1986] No. 89328).

    Google Scholar 

  99. Paulson, W. M.; Legge, R. N.; Weitzel, C. E. (J. Electron. Mater. 16 [1987] 187/93; C.A. 107 [1987] No. 50197).

    Article  Google Scholar 

  100. Ito, K.; Yoshida, M.; Otsubo, M.; Murotani, T. (Japan. J. Appl. Phys. 22 Pt. 2 [1983] 299/300).

    Google Scholar 

  101. Barrett, N. J.; Bartle, D. C; Nicholls, R.; Grange, J. D. (Conf. Ser. Inst. Phys. No. 74 [1985] 77/82; C.A. 104 [1986] No. 27276).

    Google Scholar 

  102. Haynes, T. E.; Chu, W. K.; Picraux, S. T. (Appl. Phys. Letters 50 [1987] 1071/3).

    Article  Google Scholar 

  103. Haynes, T. E.; Picraux, S. T.; Chu, W. K. (Mater. Res. Soc. Symp. Proc. 74 [1987] 693/8; C.A. 107 [1987] No. 166646).

    Google Scholar 

  104. Sumitomo Electric Industries, Ltd. (Japan. Kokai Tokkyo Koho 60–3124 [1983/85] from C.A. 102 [1985] No. 230398).

    Google Scholar 

  105. Ehata, T. (Japan. Kokai Tokkyo Koho 60–239398 [1985] from C.A. 104 [1986] No. 198286).

    Google Scholar 

  106. Ehata, T. (Japan. Kokai Tokkyo Koho 60–239030 [1985] from C.A. 104 [1986] No. 140518).

    Google Scholar 

  107. Ehata, T. (Japan. Kokai Tokkyo Koho 60–239399 [1985] from C.A. 104 [1986] No. 198285).

    Google Scholar 

  108. Kamitake, K. (Japan. Kokai Tokkyo Koho 63–173321 [1988] from C.A. 109 [1988] No. 242410).

    Google Scholar 

  109. Kazior, T. E.; Tabatabaie-Alavi, K. (Mater. Res. Soc. Symp. Proc. 52 [1986] 397/402; C.A. 105 [1986] No. 89426).

    Google Scholar 

  110. Thompson, P. E.; Wilson, R. G.; Ingram, D. C; Pronko, P. P. (J. Appl. Phys. 65 [1989] 2986/90).

    Google Scholar 

  111. Biedenbender, M. D.; Kapoor, V. J.; Xu, D.; Williams, W. D. (Proc. Electrochem. Soc. 88–15 [1988] 103/20; C.A. 110 [1989] No. 16767).

    Google Scholar 

  112. Wilkie, J.H.; Spiller, G.D.T.; Henning, I.D.; Sealy, B.J. (J.Cryst.Growth 85 [1987] 433/9).

    Article  Google Scholar 

  113. Rao, M. V.; Mulpuri, S. (Ind. Univ. Advan. Mater. Conf. Proc. Conf. TMS Annu. Meet., Denver 1987, pp. 225/8 from C.A. 107 [1987] No. 226758).

    Google Scholar 

  114. Gill, S. S.; Sealy, B. J. (J. Cryst. Growth 64 [1983] 174/80).

    Article  Google Scholar 

  115. Gill, S. S.; Sealy, B. J. (J. Phys. Colloq. [Paris] 44 [1983] C5–253/C5–259).

    Article  Google Scholar 

  116. Wilkie, J. H.; Sealy, B. J. (Thin Solid Films 162 [1988] 49/57).

    Article  Google Scholar 

  117. Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 57–30337 [1980/82] from C.A. 96 [1982] No. 227554).

    Google Scholar 

  118. Mimura, T.; Hikosaka, K.; Odani, K.; Ishikawa, T.; Nishi, H. (Eur. Appl. 113983 [1982/84] from C.A. 101 [1984] No. 142364).

    Google Scholar 

  119. Xin, S. H.; Schaff, W. J.; Wood, C. E. C; Eastman, L F. (Appl. Phys. Letters 41 [1982] 742/4).

    Article  Google Scholar 

  120. Hasegawa, F.; Yamamoto, N.; Nannichi, Y. (Appl. Phys. Letters 45 [1984] 461/3).

    Article  Google Scholar 

  121. Dindo, S.; Abdel-Motaleb, I.; Lowe, K.; Tang, W.; Young, L. (J. Electrochem. Soc. 132 [1985] 2673/7).

    Article  Google Scholar 

  122. Yokota, K.; Furuta, H.; Tamura, S.; Katayama, S.; Ishihara, S.; Nishikawa, S.; Kimura, I.; Gamo, K.; Namba, S. (Kyoto Daigaku Genshiro Jikkensho Gakujutsu Koenkai Koen Yoshishu 15 [1981] 43/50 from C.A. 95 [1981] No. 89812).

    Google Scholar 

  123. Bell, E. C; Sealy, B. J.; Surridge, R. K. (Thin Solid Films 51 [1978] 77/82).

    Article  Google Scholar 

  124. Wilson, R. G. (Conf. Ser. Inst. Phys. No. 63 [1982] 1/6; C.A. 97 [1982] No. 173161).

    Google Scholar 

  125. Cunningham, B. T.; Guido, L J.; Baker, J. E.; Major, J. S.; Holonyak, N. J. (Appl. Phys. Letters 55 [1989] 687/9).

    Article  Google Scholar 

  126. Anteil, G. R. (Appl. Phys. Letters 30 [1977] 432/4).

    Google Scholar 

  127. Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–103123 [1981/83] from C.A. 99 [1983] No. 150685).

    Google Scholar 

  128. Kuzuhara, M.; Nozaki, T. (Semi-Insul. I1I-V Mater. Proc. 4th Conf., Hakone, Japan, 1986, pp. 291/6 from C.A. 107 [1987] No. 31608).

    Google Scholar 

  129. Williamson, K. R.; Theis, W. M.; Yun, S. S.; Park, Y. S.; Ehret, J. E. (Japan. J. Appl. Phys. 50 [1979] 8019/24).

    Google Scholar 

  130. Vigil, E.; Gutierrez, M.; Mestre, M. (Rev. Cubana Fis. 7 [1987] 75/9 from C.A. 108 [1988] No. 103347).

    Google Scholar 

  131. Favennec, P. N.; L’Haridon, H.; Gauneau, M.; Salvi, M.; Roquais, J. M.; Razeghi, M. (Conf. Ser. Inst. Phys. No. 79 [1986] 343/8 from C.A. 105 [1986] No. 106390).

    Google Scholar 

  132. Vescan, L; Selders, J.; Maier, M.; Kraeutle, H.; Beneking, H. (J. Cryst. Growth 67 [1984] 353/7).

    Article  Google Scholar 

  133. Fastow, R.; Brener, R.; Kalish, R.; Eizenberg, M. (J. Appl. Phys. 63 Pt. 1 [1988] 2586/90).

    Google Scholar 

  134. Guoba, L; Pranevicius, L.; Sargunas, V.; Zubauskas, G. (Phys. Status Solidi A109 [1988] 239/41; C.A. 110 [1989] No. 49297).

    Google Scholar 

  135. Guoba, L; Zilenis, S.; Zubauskas, G.; Ulbikas, J. (Poverkhnost 1987 No. 5, pp. 137/40; C.A. 107 [1987] No. 142128).

    Google Scholar 

  136. Inada, T.; Taka, S.; Hara, T. (Nucl. Instrum. Methods 182/183 [1981] 641/6; C.A. 95 [1981] No. 53202).

    Google Scholar 

  137. Farley, C. W.; Kim, T. S.; Streetman, B. G.; Lareau, R. T.; Williams, P. (Thin Solid Films 146 [1987] 221/31).

    Article  Google Scholar 

  138. Kim, T. S.; Lester, S. D.; Streetman, B. G. (J. Appl. Phys. 61 [1987] 4598/602).

    Google Scholar 

  139. Magee, T. J.; Lee, K. S.; Ormond, R.; Blattner, R. J.; Evans, C. A. (Appl. Phys. Letters 37 [1980] 447/9).

    Google Scholar 

  140. Nippon Telegraph and Telephone Public Corp.; Sumitomo Electric Industries, Ltd. (Japan. Kokai Tokkyo Koho 60–57923 [1985] from C.A. 103 [1985] No. 133418).

    Google Scholar 

  141. Murai, S.; Shimazu, M.; Takebe, T.; Hayashi, A.; Honda, T. (Japan. Kokai Tokkyo Koho 61–34949 [1986] from C.A. 105 [1986] No. 16578).

    Google Scholar 

  142. Murai, S.; Shimazu, M.; Takebe, T.; Hayashi, S.; Honda, T. (Japan. Kokai Tokkyo Koho 60–186024 [1985] from C.A. 104 [1986] No. 100633).

    Google Scholar 

  143. Imai, K.; Ugaji, M.; Konaka, N.; Amamiya, Y. (Japan. Kokai Tokkyo Koho 01–36033 [1989] from C.A. 111 [1989] No. 207431).

    Google Scholar 

  144. Ishiwatari, O. (Japan. Kokai Tokkyo Koho 01–151232 [1987/89] from C.A. 111 [1989] No. 207533).

    Google Scholar 

  145. Takashi, I.; Shinpei, H. (Brit. Appl. 2050049 [1979/80] from C.A. 95 [1981] No. 71997).

    Google Scholar 

  146. Oki Electric Industry Co., Ltd. (Japan. Kokai Tokkyo Koho 58–162061 [1982/83] from C.A. 100 [1984] No. 44043).

    Google Scholar 

  147. Murphy, B. T.; Panousis, P. T. (U.S. 3730787 [1970/73]; C.A. 79 [1973] No. 36438).

    Google Scholar 

  148. Matsushita Electric Industrial Co., Ltd. (Japan. Kokai Tokkyo Koho 57–136333 [1982] from C.A. 98 [1983] No. 45241).

    Google Scholar 

  149. Suwa Seikosha Co., Ltd. (Japan. Kokai Tokkyo Koho 59–154030 [1983/84] from C.A. 102 [1985] No. 71234).

    Google Scholar 

  150. Suzuki, K.; Horie, H. (Japan. Kokai Tokkyo Koho 63–95619 [1988] from C.A. 109 [1988] No. 161884).

    Google Scholar 

  151. Tsai, J. C. C; Schimmel, D. G.; Ahrens, R. E.; Fair, R. B. (J. Electrochem. Soc. 134 [1987] 2348/56).

    Google Scholar 

  152. Sandera, J. (U.S. 3689392 [1970/72]; C.A. 77 [1972] No. 132400).

    Google Scholar 

  153. Tanzawa, K.; Fukuda, K.; Furukawa, K.; Shinho, M. (Japan. Kokai Tokkyo Koho 63–93107 [1988] from C.A. 109 [1988] No. 161882).

    Google Scholar 

  154. Inada, T.; Miwa, H.; Kato, S.; Kobayashi, E.; Hara, T.; Mihara, M. (Japan. J. Appl. Phys. 49 [1978] 4571/3).

    Google Scholar 

  155. Harris, J. S.; Eisen, F. H.; Welch, B. M.; Haskell, J. D.; Pashley, R. D.; Mayer, J. W. (Appl. Phys. Letters 21[1973] 601/3).

    Google Scholar 

  156. Yokota, K. (KURRI-TR–236 [1985] 18/22 from C.A. 103 [1985] No. 151760).

    Google Scholar 

  157. Valco, G. J.; Kapoor, V. J. (J. Electrochem. Soc. 134 [1987] 685/92).

    Article  Google Scholar 

  158. Hitachi Ltd. (Japan. Kokai Tokkyo Koho 59–84416 [1982/84] from C.A. 101 [1984] No. 162234).

    Google Scholar 

  159. Okura, O.; Sunami, H.; Kusukawa, K. (Japan. Kokai Tokkyo Koho 60–140812 [1985] from C.A. 104 [1986] No. 44529).

    Google Scholar 

  160. Okura, O.; Sunami, H.; Kusukawa, K. (Japan. Kokai Tokkyo Koho 60–158616 [1985] from C.A. 104 [1986] No. 80529).

    Google Scholar 

  161. Hasegawa, M. (Japan. Kokai Tokkyo Koho 63–300509 [1988] from C.A. 111 [1989] No. 88821).

    Google Scholar 

  162. Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 57–208124 [1981/82] from C.A. 98 [1983] No. 99796).

    Google Scholar 

  163. Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 59–182291 [1983/84] from C.A. 102 [1985] No. 124067).

    Google Scholar 

  164. Takahashi, M. (Japan. Kokai Tokkyo Koho 63–19810 [1988] from C.A. 109 [1988] No. 84587).

    Google Scholar 

  165. Kamins, T. I. (J. Electrochem. Soc. 128 [1981] 1824/6; C.A. 95 [1981] No. 107257).

    Google Scholar 

  166. Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 59–123224 [1982/84] from C.A. 101 [1984] No. 238964).

    Google Scholar 

  167. Ramesh, S.; Martinez, A. M. (Eur. Appl. 202718 [1986]; C.A. 106 [1987] No. 187490).

    Google Scholar 

  168. Toshiba Corp. (Japan. Kokai Tokkyo Koho 58–206163 [1982/83] from C.A. 100 [1984] No. 149530).

    Google Scholar 

  169. Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 58–139423 [1982/83] from C.A. 99 [1983] No. 185489).

    Google Scholar 

  170. Levine, J. D.; McKee, W. R.; Carson, K. R. (Eur. Appl. 71731 [1981/83]; C.A. 98 [1983] No. 189561).

    Google Scholar 

  171. Ohkura, M.; Kusukawa, K.; Yoshida, I.; Miyao, M.; Tokuyama, T. (Extend. Abstr. Conf. Solid State Devices Mater. 15 [1983] 43/6 from C.A. 101 [1984] No. 15725).

    Google Scholar 

  172. Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 59–61117 [1982/84] from C.A. 101 [1984] No. 121475).

    Google Scholar 

  173. Hitachi Ltd. (Japan. Kokai Tokkyo Koho 59–202621 [1983/84] from C.A. 102 [1985] No. 196406).

    Google Scholar 

  174. Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 58–26 094 [1981/83] from C.A. 98 [1983] No. 226502).

    Google Scholar 

  175. Hitachi Ltd. (Japan. Kokai Tokkyo Koho 60–83321 [1985] from C.A. 103 [1985] No. 152163).

    Google Scholar 

  176. Matsushita Electric Industrial Co., Ltd. (Japan. Kokai Tokkyo Koho 59–84418 [1982/84] from C.A. 101 [1984] No. 162235).

    Google Scholar 

  177. Demchuk, A. V.; Labunov, V. A. (Pis’maZh. Tekhn. Fiz. 15 [1989] 25/8 from C.A. 111 [1989] No. 64789).

    Google Scholar 

  178. Samejima, T.; Usui, S. (Japan. Kokai Tokkyo Koho 61–145819 [1986] from C.A. 105 [1986] No. 236919).

    Google Scholar 

  179. Calder, I. D.; Naem, A. A.; Naguib, H. H. [M.] (Mater. Res. Symp. Proc. 13 [1983] 443/8; C.A. 99 [1983] No. 80753).

    Google Scholar 

  180. Nishimura, T. (Fr. Demande 2537607 [1983/84]; C.A. 101 [1984] No. 238968).

    Google Scholar 

  181. Calder, I. D.; Naguib, H. M. (IEEE Electron Device Letters EDL–6 [1985] 557/9; C.A. 104 [1986] No. 27257).

    Google Scholar 

  182. Kusunoki, S.; Nishimura, T.; Sugahara, K. (Japan. Kokai Tokkyo Koho 60–150618 [1985] from C.A. 104 [1986] No. 60584).

    Google Scholar 

  183. Rivier, M.; Cserhati, A. F.; Goetz, G. G. (Eur. Appl. 217179 [1987]; C.A. 107 [1987] No. 68653).

    Google Scholar 

  184. Naem, A. A.; Calder, I. D.; Naguib, H. M. (Can. 1161969 [1982/84]; C.A. 101 [1984] No. 15950).

    Google Scholar 

  185. Colinge, J. P.; Demoulin, E.; Bensahel, D.; Auvert, G. (J. Phys. Colloq. [Paris] 44 [1983] C5–409/C5–413; C.A. 100 [1984] No. 15950).

    Article  Google Scholar 

  186. Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 59–132120 [1983/84] from C.A. 102 [1985] No. 54736).

    Google Scholar 

  187. Mukai, R. (Japan. Kokai Tokkyo Koho 60–249312 [1985] from C.A. 105 [1986] No. 53088).

    Google Scholar 

  188. Mukai, R. (Japan. Kokai Tokkyo Koho 61–89620 [1986] from C.A. 105 [1986] No. 144543).

    Google Scholar 

  189. Schaub, R.; Pensl, G.; Schulz, M.; Maier, H.; Geibel, C. (IEE Conf. Publ. No. 263 [1986] 13/7; C.A. 105 [1986] No. 69777).

    Google Scholar 

  190. Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–132919 [1982/83] from C.A. 99 [1983] No. 204595).

    Google Scholar 

  191. Suguro, K.; Inoue, T. (Japan. Kokai Tokkyo Koho 61–113229 [1986] from C.A. 105 [1986] No. 201518).

    Google Scholar 

  192. Tillack, B.; Reinboth, R.; Moeck, P.; Bugiel, E.; Winkler, R. (Zentralinst. Kernforsch. Rossendorf Dresden Ber. ZfK–555-Pt. 2 [1984] 406/10; C.A. 103 [1985] No. 187008).

    Google Scholar 

  193. Yamaguchi, Y. (Japan. Kokai Tokkyo Koho 63–114208 [1988] from C.A. 109 [1988] No. 181079).

    Google Scholar 

  194. Yoshii, S.; Akiyama, S.; Terui, Y. (Japan. Kokai Tokkyo Koho 60–210833 [1985] from C.A. 104 [1986] No. 198280).

    Google Scholar 

  195. Hamazaki, T.; Taniguchi, K. (Japan. Kokai Tokkyo Koho 61–214423 [1986] from C.A. 106 [1987] No. 77168).

    Google Scholar 

  196. Mukai, R. (Japan. Kokai Tokkyo Koho 62–36809 [1987] from C.A. 106 [1987] No. 205712).

    Google Scholar 

  197. Inoue, T.; Shibata, K. (U.S. 4498226 [1981/85]; C.A. 102 [1985] No. 196447).

    Google Scholar 

  198. Fan, J. C. C; Zavracky, P. M.; Narayan, J.; Allan, L P.; Vu Duy Phach (PCT Intern. Appl. 8904550 [1989]; C.A. 111 [1989] No. 106320).

    Google Scholar 

  199. Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 60–126815 [1985] from C.A. 104 [1986] No. 44462).

    Google Scholar 

  200. Seiko Denshi Kogyo K.K. (Japan. Kokai Tokkyo Koho 59–128292 [1983/84] from C.A. 101 [1984] No. 238486).

    Google Scholar 

  201. Mukai, R.; Sasaki, N.; Iwai, T.; Kawamura, S.; Nakano, M. (Mater. Res. Soc. Symp. Proc. 35 [1985] 663/8; C.A. 103 [1985] No. 63266).

    Google Scholar 

  202. Usui, S.; Kano, Y. (Japan. Kokai Tokkyo Koho 60–191088 [1985] from C.A. 104 [1986] No. 178149).

    Google Scholar 

  203. Yokogawa-Hewlett Packard, Ltd. (Japan. Kokai Tokkyo Koho 60–115217 [1985] from C.A. 103 [1985] No. 204527).

    Google Scholar 

  204. Sugahara, K.; Nishimura, T. (Japan. Kokai Tokkyo Koho 61–84825 [1986] from C.A. 105 [1986] No. 106890).

    Google Scholar 

  205. Sugahara, K.; Nishimura, T.; Kusunoki, S.; Inoue, Y. (U.S. 4714684 [1987]; C.A. 108 [1988] No. 104388).

    Google Scholar 

  206. Matyi, R. J.; Duncan, W. M.; Shichijo, H.; Tsai, H. L (Appl. Phys. Letters 53 [1988] 2611/3).

    Article  Google Scholar 

  207. Geis, M. W.; Smith, H. I.; Tsaur, B. Y.; Fan, J. C. C; Maby, E. W.; Antoniadis, D. A. (Appl. Phys. Letters 40 [1982] 158/60).

    Article  Google Scholar 

  208. Sakurai, J. (Eur. Appl. 124261 [1983/84] from C.A. 102 [1985] No. 16143).

    Google Scholar 

  209. Scharff, W.; Weissmantel, C. (J. Vac. Sei. Technol. [2] A 4 [1986] 3160/4).

    Google Scholar 

  210. Mukai, R. (Japan. Kokai Tokkyo Koho 60–231319 [1985] from C.A. 104 [1986] No. 178640).

    Google Scholar 

  211. Mitsubishi Electric Corp. (Japan. Kokai Tokkyo Koho 58–33822 [1981/83] from C.A. 99 [1983] No. 31 781).

    Google Scholar 

  212. Shibata, K.; Ohmura, Y.; Inoue, T.; Kato, K.; Horiike, Y.; Kashiwagi, M. (Japan. J. Appl. Phys. 22 [1983] 213/6; C.A. 98 [1983] No. 226118).

    Google Scholar 

  213. Knapp, J. A.; Picraux, S. T.; Lee, K.; Gibbons, J. F.; Sedgwick, T. O.; Depp, S. W. (Mater. Res. Soc. Symp. Proc. 4 [1982] 511/6; C.A. 97 [1982] No. 191322).

    Google Scholar 

  214. Mitsubishi Electric Corp. (Japan. Kokai Tokkyo Koho 59–28328 [1982/84] from C.A. 101 [1984] No. 31 940).

    Google Scholar 

  215. Kanamori, K. (Japan. Kokai Tokkyo Koho 60–161396 [1985] from C.A. 104 [1986] No. 139796).

    Google Scholar 

  216. Matsushita Electric Industrial Co., Ltd. (Japan. Kokai Tokkyo Koho 59–197147 [1983/84] from C.A. 102 [1985] No. 177687).

    Google Scholar 

  217. Hitachi Ltd. (Japan. Kokai Tokkyo Koho 59–217323 [1983/84] from C.A. 102 [1985] No. 213718).

    Google Scholar 

  218. Agency of Industrial Sciences and Technology (Japan. Kokai Tokkyo Koho 59–1211826 [1982/84] from C.A. 101 [1984] No. 238942).

    Google Scholar 

  219. Mitsubishi Electric Corp. (Japan. Kokai Tokkyo Koho 59–104116 [1982/84] from C.A. 101 [1984] No. 202649).

    Google Scholar 

  220. Chandrasekhar, S.; Apte, P. R.; Roy, S. K. (Bull. Mater. Sei. 8 [1986] 391/6; C.A. 105 [1986] No. 201 292).

    Google Scholar 

  221. Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 59–119823 [1982/84] from C.A. 101 [1984] No. 238925).

    Google Scholar 

  222. Laemmet, B.; Ochlich, H. M.; Zscherpe, G. (Ger. [East] 234529 [1986]; C.A. 105 [1986] No. 181920).

    Google Scholar 

  223. Ohmura, Y.; Shibata, K.; Inoue, T.; Yoshii, T.; Horiike, Y. (IEEE Electron Device Letters EDL-4 [1983] 57/9; C.A. 100 [1984] No. 16072).

    Google Scholar 

  224. Nishimura, T.; Sakurai, H.; Nagao, S.; Isu, T.; Akasaka, Y.; Tsubouchi, N. (Japan. J. Appl. Phys. 21 Pt. 1 [1982] 169/74; C.A. 96 [1982] No. 172738).

    Google Scholar 

  225. Shibata, K.; Inoue, T.; Takigawa, T. (Japan. J. Appl. Phys. 21 [1982] L 294/L 296; C.A. 97 [1982] No. 31 982).

    Article  Google Scholar 

  226. Kawamura, S.; Sasaki, N.; Iwai, T.; Nakano, M.; Takagi, M. (IEEE Electron Device Letters EDL-4 [1983] 336/68; C.A. 100 [1984] No. 16025).

    Google Scholar 

  227. Matsushita Electric Industrial Co., Ltd. (Japan. Kokai Tokkyo Koho 58–25220 [1981/83] from C.A. 98 [1983] No. 226499).

    Google Scholar 

  228. Agency of Industrial Sciences and Technology (Japan. Kokai Tokkyo Koho 59–83998 [1982/84] from C.A. 101 [1984] No. 162220).

    Google Scholar 

  229. Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–86718 [1981/83] from C.A. 99 [1983] No. 97817).

    Google Scholar 

  230. Hamazaki, T. (Japan. Kokai Tokkyo Koho 61–180422 [1986] from C.A. 106 [1987] No. 42557).

    Google Scholar 

  231. Higuchi, K.; Saito, S. (Japan. Kokai Tokkyo Koho 61–30025 [1986] from C.A. 105 [1986] No. 89089).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Universität Frankfurt/Main, Germany

    Eberhard F. Krimmel

  2. Universität Erlangen, Nürnberg, Germany

    Rudolf Hezel

  3. Gmelin Institute, Frankfurt/Main, Germany

    Uwe Nohl & Rainer Bohrer

Authors
  1. Eberhard F. Krimmel
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Rudolf Hezel
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Uwe Nohl
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Rainer Bohrer
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Gmelin Institute, Frankfurt/Main, Germany

    Alfred Pebler  & Friedrich Schröder  & 

Rights and permissions

Reprints and permissions

Copyright information

© 1991 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Krimmel, E.F., Hezel, R., Nohl, U., Bohrer, R. (1991). Silicon Nitride in Encapsulation and Recrystallization. In: Pebler, A., Schröder, F. (eds) Si Silicon. Si. Silicium. Silicon (System-Nr. 15), vol S-i / B / 1-5 / 5 / c. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-09901-8_7

Download citation

  • DOI: https://doi.org/10.1007/978-3-662-09901-8_7

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-09903-2

  • Online ISBN: 978-3-662-09901-8

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation