Advertisement

Si Silicon pp 316-320 | Cite as

Specific Applications of Silicon Nitride Films

  • Eberhard F. Krimmel
  • Rudolf Hezel
  • Uwe Nohl
  • Rainer Bohrer
Chapter
Part of the Si. Silicium. Silicon (System-Nr. 15) book series (GMELIN, volume S-i / B / 1-5 / 5 / c)

Abstract

There are applications of silicon nitride which were not covered in the preceding chapters. Some of those will be briefly mentioned here. Others to be touched upon serve to indicate the diversity of applications for silicon nitride films.

Keywords

Silicon Nitride Silicon Nitride Film Silicon Nitride Layer Silicon Nitride Membrane Amorphous Silicon Nitride 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. [1]
    Araki, Y. (Japan. Kokai Tokkyo Koho 61–220456 [1986] from C.A. 106 [1987] No. 77146).Google Scholar
  2. [2]
    Hayashi, H.; Yamoto, H. (Japan. Kokai Tokkyo Koho 60–215765 [1985] from C.A. 104 [1986] No. 197689).Google Scholar
  3. [3]
    Hitachi Hokkai Semiconductor K. K.; Hitachi Ltd. (Japan. Kokai Tokkyo Koho 60–21525 [1985] from C.A. 103 [1985] No. 31231).Google Scholar
  4. [4]
    Amano, N.; Ito, Y.; Kuroishi, A. (Japan. Kokai Tokkyo Koho 62–232943 [1987] from C.A. 108 [1988] No. 86353).Google Scholar
  5. [5]
    Murakami, T.; Fujimoto, H.; Wada, Y. (Japan. Kokai Tokkyo Koho 62–286247 [1987] from C.A. 109 [1988] No. 84676).Google Scholar
  6. [6]
    Tanaka, S. (Japan. Kokai Tokkyo Koho 63–222046 [1988] from C.A. 110 [1989] No. 68104).Google Scholar
  7. [7]
    Iguchi, M.; Ito, I. (Japan. Kokai Tokkyo Koho 61–289690 [1986] from C.A. 107 [1987] No. 69278).Google Scholar
  8. [8]
    NGK Spark Plug Co., Ltd. (Japan. Kokai Tokkyo Koho 55–59603 [1978/80] from C.A. 93 [1980] No. 178377).Google Scholar
  9. [9]
    Semiconductor Energy Laboratory Co., Ltd. (Japan. Kokai Tokkyo Koho 60–127608 [1985] from C.A. 104 [1986] No. 7786).Google Scholar
  10. [10]
    Panwar, B. S.; Bhattacharyya, A. B.; Nagpal, K. C; Mall, R. P. (Thin Solid Films 168 [1989] 291/305).CrossRefGoogle Scholar
  11. [11]
    Ninomiya, Y.; Takao, M. (Japan. Kokai Tokkyo Koho 63–102048 [1988] from C.A. 109 [1988] No. 240800).Google Scholar
  12. [12]
    Ninomiya, Y.; Takao, M. (Japan. Kokai Tokkyo Koho 62–245541 [1987] from C.A. 109 [1988] No. 64432).Google Scholar
  13. [13]
    Suzuki, K. (Japan. Kokai Tokkyo Koho 62–202342 [1987] from CA. 108 [1988] No. 104084).Google Scholar
  14. [14]
    Suzuki, K.; Nakamura, N.; Kobayashi, T. (Japan. Kokai Tokkyo Koho 62–226438 [1987] from CA. 108 [1988] No. 229723).Google Scholar
  15. [15]
    Suzuki, K.; Nakamura, N.; Kobayashi, T. (Japan. Kokai Tokkyo Koho 62–226439 [1987] from CA. 109 [1988] No. 119766).Google Scholar
  16. [16]
    Suzuki, K.; Nakamura, N.; Kobayashi, T. (Japan. Kokai Tokkyo Koho 63–10342 [1988] from CA. 109 [1988] No. 83623).Google Scholar
  17. [17]
    Suzuki, K. (Japan. Kokai Tokkyo Koho 63–206927 [1988] from CA. 110 [1989] No. 67013).Google Scholar
  18. [18]
    Suzuki, K.; Kobayashi, T. Japan. Kokai Tokkyo Koho 62–275335 [1987] from CA. 109 [1988] No. 64445).Google Scholar
  19. [19]
    Utsunomiya, H.; Arai, F. (Japan. Kokai Tokkyo Koho 63–56827 [1988] from CA. 109 [1988] No. 160741).Google Scholar
  20. [20]
    Utsunomiya, H.; Arai, F.; Shimizu, Y. (Japan. Kokai Tokkyo Koho 63–161549 [1986/88] from CA. 110 [1989] No. 105118).Google Scholar
  21. [21]
    Utsunomiya, H.; Arai, F.; Shimizu, Y. (Japan. Kokai Tokkyo Koho 63–160028 [1986/88] from CA. 110 [1989] No. 105111).Google Scholar
  22. [22]
    Utsunomiya, H.; Arai, F.; Shimizu, Y. (Japan. Kokai Tokkyo Koho 63–160029 [1986/88] from CA. 110 [1989] No. 105112).Google Scholar
  23. [23]
    Netterfield, R. P.; Martin, P. J.; Sainty, W. G. (Appl. Opt. 25 [1986] 3808/9; CA. 105 [1986] No. 235400).CrossRefGoogle Scholar
  24. [24]
    Taghizadeh, M. R.; Wilson, J. I. B.; Turunen, J.; Vasara, A.; Westerholm, J. (Appl. Phys. Letters 54 [1989] 1492/4).CrossRefGoogle Scholar
  25. [25]
    Taneya, M.; Matsumoto, M.; Matsui, S. (U.S. 4780175 [1986/88]; CA. 110 [1989] No. 85121).Google Scholar
  26. [26]
    Wreede, J. E.; Graube, A.; Mulvihill, M. A. (Eur. Appl. 45409 [1981/82] from CA. 96 [1982] No. 172191).Google Scholar
  27. [27]
    Wreede, J. E.; Graube, A. (Eur. Appl. 45410 [1981/82]; CA. 96 [1982] No. 172192).Google Scholar
  28. [28]
    Kudo, Y.; Fukamachi, Y.; Kawabata, H.; Yashiro, M. (Japan. Kokai Tokkyo Koho 62–298037 [1987] from CA. 109 [1988] No. 83620).Google Scholar
  29. [29]
    Esaev, D. G.; Sinitsa, S. P. (Zh. Tekh. Fiz. 56 [1986] 571/2;Google Scholar
  30. [29a]
    Esaev, D. G.; Sinitsa, S. P. Soviet Phys.-Tech. Phys. 31 [1986] 343).Google Scholar
  31. [30]
    Shibata, K. (Japan. Kokai Tokkyo Koho 63–201078 [1988] from CA. 110 [1989] No. 43840).Google Scholar
  32. [31]
    Shibata, K. (Japan. Kokai Tokkyo Koho 63–201077 [1988] from CA. 110 [1989] No. 43770).Google Scholar
  33. [32]
    Plys, V. V.; Sergienko, G. P. (Poluprov. Tekh. Mikroelektron. No. 13 [1973] 58/63 from CA. 80 [1974] No. 89522).Google Scholar
  34. [33]
    Jain, F. C; Rosato, J. J.; Kalonia, K. S.; Agarwala, V. S. (Mater. Res. Soc. Symp. Proc. 125 [1988] 329/41; CA. 110 [1989] No. 103831).CrossRefGoogle Scholar
  35. [34]
    Jain, F. C; Rosato, J. J.; Kalonia, K. S.; Agarwala, V. S. (Polym. Sei. Technol. [Plenum] 37 [1988] 381/404 from CA. 111 [1989] No. 62195).Google Scholar
  36. [35]
    Bellau, R. V.; Brander, R. W.; Todkill, A. (Brit. 1303658 [1969/73]; CA. 78 [1973] No. 90143).Google Scholar
  37. [36]
    Malter, L. (Phys. Rev. [2] 49 [1936] 478).CrossRefGoogle Scholar
  38. [37]
    Malter, L. (Phys. Rev. [2] 50 [1936] 48/58).CrossRefGoogle Scholar
  39. [38]
    Baranov, A. V.; Buznikov, Yu. N.; Vorob’ev, G. A.; Galanskii, V. L; Drei, N. I.; Krivoshchekov, V. P.; Smirnova, K. I.; Troyan, L A.; Troyan, P. E.; Yankelevich, Yu. B. (Izv. Akad. Nauk SSSR Ser. Fiz. 38 [1974] 291/5; Bull. Acad. Sei. USSR Phys. Ser. 38 No. 2 [1974] 100/3).Google Scholar
  40. [39]
    Morev, S. N. (Radiotekh. Elektron. 21 [1976] 205/6 from CA. 84 [1976] No. 143519).Google Scholar
  41. [40]
    Galanskii, V. L; Zelenskü, V. I. (Radiotekh. Elektron. 31 [1986] 1665/8 from CA. 105 [1986] No. 125417).Google Scholar
  42. [41]
    Galanskii, V. L; Motoshkin, V. V. (U.S.S.R. 700882 [1975/79] from CA. 92 [1980] No. 50945).Google Scholar
  43. [42]
    Sukegawa, T.; Kan, H.; Nakamura, T.; Katsuno, H.; Hagino, M. (J. Appl. Phys. 50 [1979] 3780/2).CrossRefGoogle Scholar
  44. [43]
    Gentsch, H.; Prueller, H. (Z. Naturforsch. 26a [1971] 1010/6).Google Scholar
  45. [44]
    Iwamatsu, S. (Japan. Kokai Tokkyo Koho 63–124413 [1988] from CA. 109 [1988] No. 102362).Google Scholar
  46. [45]
    Zandbergen, H. W.; Pruymboom, A.; Van Tendeloo, G. (Ultramicroscopy 24 [1988] 45/8; CA. 108 [1988] No. 141622).CrossRefGoogle Scholar
  47. [46]
    Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–162044 [1982/83] from CA. 100 [1984] No. 43477).Google Scholar
  48. [47]
    Bergendahl, A. S.; Cade, P. E.; Gonella, N. T.; Luecke, F. S.; Petersen, K. E. (U.S. 4724043 [1988]; CA. 108 [1988] No. 140866).Google Scholar
  49. [48]
    Nagashima, H.; Matsuo, H.; Shibuya, T. (Japan. Kokai Tokkyo Koho 55–43886 [1978/80] from CA. 93 [1980] No. 124630).Google Scholar
  50. [49]
    Becker, F. S. (Ger. Offen. 3441056 [1986]; CA. 105 [1986] No. 53189).Google Scholar
  51. [50]
    Imamura, T.; Kadoi, Y.; Shirasu, T. (Japan. Kokai Tokkyo Koho 61–241915 [1986] from CA. 106 [1987] No. 112258).Google Scholar
  52. [51]
    Matsuo, H.; Goto, I.; Nozawa, T.; Shida, T. (Japan. Kokai Tokkyo Koho 62–96349 [1987] from CA. 107 [1987] No. 27367).Google Scholar
  53. [52]
    Matsuo, H.; Nakayama, C; Shibuya, T. (Japan. Kokai Tokkyo Koho 61–45853 [1986] from CA. 106 [1987] No. 94575).Google Scholar
  54. [53]
    Pammer, E.; Folkmann, E. (Ger. Offen. 1957952 [1969/71]; CA. 75 [1971] No. 26988).Google Scholar
  55. [54]
    Cohen, R. A.; Wheeler, R. (J. Electrochem. Soc. 116 [1969] 506).CrossRefGoogle Scholar
  56. [55]
    Hitachi Ltd. (Japan. Kokai Tokkyo Koho 59–191327 [1983/84] from CA. 102 [1985] No. 196396).Google Scholar
  57. [56]
    Kagami, T.; Matsuo, H.; Karita, A. (Japan. Kokai Tokkyo Koho 54–157778 [1978/79] from CA. 92 [1980] No. 207855).Google Scholar
  58. [57]
    Kamiyama, K. (Japan. Kokai Tokkyo Koho 61–55918 [1986] from CA. 105 [1986] No. 89637).Google Scholar
  59. [58]
    Toshiba Corp. (Japan. Kokai Tokkyo Koho 59–163827 [1983/84] from CA. 102 [1985] No. 88670).Google Scholar
  60. [59]
    Bassous, E.; Ephrath, L. M. (Eur. Appl. 12327 [1978/80]; CA. 94 [1981] No. 93703).Google Scholar
  61. [60]
    Kaneko, K.; Mizumoto, H. (Japan. Kokai Tokkyo Koho 62–108515 [1987] from CA. 107 [1987] No. 107583).Google Scholar
  62. [61]
    Matsutomo, T.; Shimoda, T. (Japan. Kokai Tokkyo Koho 62–182185 [1987] from CA. 108 [1988] No. 14296).Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1991

Authors and Affiliations

  • Eberhard F. Krimmel
    • 1
  • Rudolf Hezel
    • 2
  • Uwe Nohl
    • 3
  • Rainer Bohrer
    • 3
  1. 1.Universität Frankfurt/MainGermany
  2. 2.Universität ErlangenNürnbergGermany
  3. 3.Gmelin InstituteFrankfurt/MainGermany

Personalised recommendations