Skip to main content
SpringerLink
Log in
Book cover

Si Silicon pp 316–320Cite as

Specific Applications of Silicon Nitride Films

  • Chapter

  • 310 Accesses

Part of the book series: Si. Silicium. Silicon (System-Nr. 15) ((2074,volume S-i / B / 1-5 / 5 / c))

Abstract

There are applications of silicon nitride which were not covered in the preceding chapters. Some of those will be briefly mentioned here. Others to be touched upon serve to indicate the diversity of applications for silicon nitride films.

This is a preview of subscription content, log in via an institution.

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   1,459.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Araki, Y. (Japan. Kokai Tokkyo Koho 61–220456 [1986] from C.A. 106 [1987] No. 77146).

    Google Scholar 

  2. Hayashi, H.; Yamoto, H. (Japan. Kokai Tokkyo Koho 60–215765 [1985] from C.A. 104 [1986] No. 197689).

    Google Scholar 

  3. Hitachi Hokkai Semiconductor K. K.; Hitachi Ltd. (Japan. Kokai Tokkyo Koho 60–21525 [1985] from C.A. 103 [1985] No. 31231).

    Google Scholar 

  4. Amano, N.; Ito, Y.; Kuroishi, A. (Japan. Kokai Tokkyo Koho 62–232943 [1987] from C.A. 108 [1988] No. 86353).

    Google Scholar 

  5. Murakami, T.; Fujimoto, H.; Wada, Y. (Japan. Kokai Tokkyo Koho 62–286247 [1987] from C.A. 109 [1988] No. 84676).

    Google Scholar 

  6. Tanaka, S. (Japan. Kokai Tokkyo Koho 63–222046 [1988] from C.A. 110 [1989] No. 68104).

    Google Scholar 

  7. Iguchi, M.; Ito, I. (Japan. Kokai Tokkyo Koho 61–289690 [1986] from C.A. 107 [1987] No. 69278).

    Google Scholar 

  8. NGK Spark Plug Co., Ltd. (Japan. Kokai Tokkyo Koho 55–59603 [1978/80] from C.A. 93 [1980] No. 178377).

    Google Scholar 

  9. Semiconductor Energy Laboratory Co., Ltd. (Japan. Kokai Tokkyo Koho 60–127608 [1985] from C.A. 104 [1986] No. 7786).

    Google Scholar 

  10. Panwar, B. S.; Bhattacharyya, A. B.; Nagpal, K. C; Mall, R. P. (Thin Solid Films 168 [1989] 291/305).

    Article  CAS  Google Scholar 

  11. Ninomiya, Y.; Takao, M. (Japan. Kokai Tokkyo Koho 63–102048 [1988] from C.A. 109 [1988] No. 240800).

    Google Scholar 

  12. Ninomiya, Y.; Takao, M. (Japan. Kokai Tokkyo Koho 62–245541 [1987] from C.A. 109 [1988] No. 64432).

    Google Scholar 

  13. Suzuki, K. (Japan. Kokai Tokkyo Koho 62–202342 [1987] from CA. 108 [1988] No. 104084).

    Google Scholar 

  14. Suzuki, K.; Nakamura, N.; Kobayashi, T. (Japan. Kokai Tokkyo Koho 62–226438 [1987] from CA. 108 [1988] No. 229723).

    Google Scholar 

  15. Suzuki, K.; Nakamura, N.; Kobayashi, T. (Japan. Kokai Tokkyo Koho 62–226439 [1987] from CA. 109 [1988] No. 119766).

    Google Scholar 

  16. Suzuki, K.; Nakamura, N.; Kobayashi, T. (Japan. Kokai Tokkyo Koho 63–10342 [1988] from CA. 109 [1988] No. 83623).

    Google Scholar 

  17. Suzuki, K. (Japan. Kokai Tokkyo Koho 63–206927 [1988] from CA. 110 [1989] No. 67013).

    Google Scholar 

  18. Suzuki, K.; Kobayashi, T. Japan. Kokai Tokkyo Koho 62–275335 [1987] from CA. 109 [1988] No. 64445).

    Google Scholar 

  19. Utsunomiya, H.; Arai, F. (Japan. Kokai Tokkyo Koho 63–56827 [1988] from CA. 109 [1988] No. 160741).

    Google Scholar 

  20. Utsunomiya, H.; Arai, F.; Shimizu, Y. (Japan. Kokai Tokkyo Koho 63–161549 [1986/88] from CA. 110 [1989] No. 105118).

    Google Scholar 

  21. Utsunomiya, H.; Arai, F.; Shimizu, Y. (Japan. Kokai Tokkyo Koho 63–160028 [1986/88] from CA. 110 [1989] No. 105111).

    Google Scholar 

  22. Utsunomiya, H.; Arai, F.; Shimizu, Y. (Japan. Kokai Tokkyo Koho 63–160029 [1986/88] from CA. 110 [1989] No. 105112).

    Google Scholar 

  23. Netterfield, R. P.; Martin, P. J.; Sainty, W. G. (Appl. Opt. 25 [1986] 3808/9; CA. 105 [1986] No. 235400).

    Article  CAS  Google Scholar 

  24. Taghizadeh, M. R.; Wilson, J. I. B.; Turunen, J.; Vasara, A.; Westerholm, J. (Appl. Phys. Letters 54 [1989] 1492/4).

    Article  CAS  Google Scholar 

  25. Taneya, M.; Matsumoto, M.; Matsui, S. (U.S. 4780175 [1986/88]; CA. 110 [1989] No. 85121).

    Google Scholar 

  26. Wreede, J. E.; Graube, A.; Mulvihill, M. A. (Eur. Appl. 45409 [1981/82] from CA. 96 [1982] No. 172191).

    Google Scholar 

  27. Wreede, J. E.; Graube, A. (Eur. Appl. 45410 [1981/82]; CA. 96 [1982] No. 172192).

    Google Scholar 

  28. Kudo, Y.; Fukamachi, Y.; Kawabata, H.; Yashiro, M. (Japan. Kokai Tokkyo Koho 62–298037 [1987] from CA. 109 [1988] No. 83620).

    Google Scholar 

  29. Esaev, D. G.; Sinitsa, S. P. (Zh. Tekh. Fiz. 56 [1986] 571/2;

    CAS  Google Scholar 

  30. Esaev, D. G.; Sinitsa, S. P. Soviet Phys.-Tech. Phys. 31 [1986] 343).

    Google Scholar 

  31. Shibata, K. (Japan. Kokai Tokkyo Koho 63–201078 [1988] from CA. 110 [1989] No. 43840).

    Google Scholar 

  32. Shibata, K. (Japan. Kokai Tokkyo Koho 63–201077 [1988] from CA. 110 [1989] No. 43770).

    Google Scholar 

  33. Plys, V. V.; Sergienko, G. P. (Poluprov. Tekh. Mikroelektron. No. 13 [1973] 58/63 from CA. 80 [1974] No. 89522).

    Google Scholar 

  34. Jain, F. C; Rosato, J. J.; Kalonia, K. S.; Agarwala, V. S. (Mater. Res. Soc. Symp. Proc. 125 [1988] 329/41; CA. 110 [1989] No. 103831).

    Article  CAS  Google Scholar 

  35. Jain, F. C; Rosato, J. J.; Kalonia, K. S.; Agarwala, V. S. (Polym. Sei. Technol. [Plenum] 37 [1988] 381/404 from CA. 111 [1989] No. 62195).

    CAS  Google Scholar 

  36. Bellau, R. V.; Brander, R. W.; Todkill, A. (Brit. 1303658 [1969/73]; CA. 78 [1973] No. 90143).

    Google Scholar 

  37. Malter, L. (Phys. Rev. [2] 49 [1936] 478).

    Article  CAS  Google Scholar 

  38. Malter, L. (Phys. Rev. [2] 50 [1936] 48/58).

    Article  Google Scholar 

  39. Baranov, A. V.; Buznikov, Yu. N.; Vorob’ev, G. A.; Galanskii, V. L; Drei, N. I.; Krivoshchekov, V. P.; Smirnova, K. I.; Troyan, L A.; Troyan, P. E.; Yankelevich, Yu. B. (Izv. Akad. Nauk SSSR Ser. Fiz. 38 [1974] 291/5; Bull. Acad. Sei. USSR Phys. Ser. 38 No. 2 [1974] 100/3).

    CAS  Google Scholar 

  40. Morev, S. N. (Radiotekh. Elektron. 21 [1976] 205/6 from CA. 84 [1976] No. 143519).

    CAS  Google Scholar 

  41. Galanskii, V. L; Zelenskü, V. I. (Radiotekh. Elektron. 31 [1986] 1665/8 from CA. 105 [1986] No. 125417).

    CAS  Google Scholar 

  42. Galanskii, V. L; Motoshkin, V. V. (U.S.S.R. 700882 [1975/79] from CA. 92 [1980] No. 50945).

    Google Scholar 

  43. Sukegawa, T.; Kan, H.; Nakamura, T.; Katsuno, H.; Hagino, M. (J. Appl. Phys. 50 [1979] 3780/2).

    Article  CAS  Google Scholar 

  44. Gentsch, H.; Prueller, H. (Z. Naturforsch. 26a [1971] 1010/6).

    Google Scholar 

  45. Iwamatsu, S. (Japan. Kokai Tokkyo Koho 63–124413 [1988] from CA. 109 [1988] No. 102362).

    Google Scholar 

  46. Zandbergen, H. W.; Pruymboom, A.; Van Tendeloo, G. (Ultramicroscopy 24 [1988] 45/8; CA. 108 [1988] No. 141622).

    Article  CAS  Google Scholar 

  47. Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–162044 [1982/83] from CA. 100 [1984] No. 43477).

    Google Scholar 

  48. Bergendahl, A. S.; Cade, P. E.; Gonella, N. T.; Luecke, F. S.; Petersen, K. E. (U.S. 4724043 [1988]; CA. 108 [1988] No. 140866).

    Google Scholar 

  49. Nagashima, H.; Matsuo, H.; Shibuya, T. (Japan. Kokai Tokkyo Koho 55–43886 [1978/80] from CA. 93 [1980] No. 124630).

    Google Scholar 

  50. Becker, F. S. (Ger. Offen. 3441056 [1986]; CA. 105 [1986] No. 53189).

    Google Scholar 

  51. Imamura, T.; Kadoi, Y.; Shirasu, T. (Japan. Kokai Tokkyo Koho 61–241915 [1986] from CA. 106 [1987] No. 112258).

    Google Scholar 

  52. Matsuo, H.; Goto, I.; Nozawa, T.; Shida, T. (Japan. Kokai Tokkyo Koho 62–96349 [1987] from CA. 107 [1987] No. 27367).

    Google Scholar 

  53. Matsuo, H.; Nakayama, C; Shibuya, T. (Japan. Kokai Tokkyo Koho 61–45853 [1986] from CA. 106 [1987] No. 94575).

    Google Scholar 

  54. Pammer, E.; Folkmann, E. (Ger. Offen. 1957952 [1969/71]; CA. 75 [1971] No. 26988).

    Google Scholar 

  55. Cohen, R. A.; Wheeler, R. (J. Electrochem. Soc. 116 [1969] 506).

    Article  CAS  Google Scholar 

  56. Hitachi Ltd. (Japan. Kokai Tokkyo Koho 59–191327 [1983/84] from CA. 102 [1985] No. 196396).

    Google Scholar 

  57. Kagami, T.; Matsuo, H.; Karita, A. (Japan. Kokai Tokkyo Koho 54–157778 [1978/79] from CA. 92 [1980] No. 207855).

    Google Scholar 

  58. Kamiyama, K. (Japan. Kokai Tokkyo Koho 61–55918 [1986] from CA. 105 [1986] No. 89637).

    Google Scholar 

  59. Toshiba Corp. (Japan. Kokai Tokkyo Koho 59–163827 [1983/84] from CA. 102 [1985] No. 88670).

    Google Scholar 

  60. Bassous, E.; Ephrath, L. M. (Eur. Appl. 12327 [1978/80]; CA. 94 [1981] No. 93703).

    Google Scholar 

  61. Kaneko, K.; Mizumoto, H. (Japan. Kokai Tokkyo Koho 62–108515 [1987] from CA. 107 [1987] No. 107583).

    Google Scholar 

  62. Matsutomo, T.; Shimoda, T. (Japan. Kokai Tokkyo Koho 62–182185 [1987] from CA. 108 [1988] No. 14296).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Universität Frankfurt/Main, Germany

    Eberhard F. Krimmel

  2. Universität Erlangen, Nürnberg, Germany

    Rudolf Hezel

  3. Gmelin Institute, Frankfurt/Main, Germany

    Uwe Nohl & Rainer Bohrer

Authors
  1. Eberhard F. Krimmel
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Rudolf Hezel
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Uwe Nohl
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Rainer Bohrer
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Gmelin Institute, Frankfurt/Main, Germany

    Alfred Pebler  & Friedrich Schröder  & 

Rights and permissions

Reprints and permissions

Copyright information

© 1991 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Krimmel, E.F., Hezel, R., Nohl, U., Bohrer, R. (1991). Specific Applications of Silicon Nitride Films. In: Pebler, A., Schröder, F. (eds) Si Silicon. Si. Silicium. Silicon (System-Nr. 15), vol S-i / B / 1-5 / 5 / c. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-09901-8_31

Download citation

  • DOI: https://doi.org/10.1007/978-3-662-09901-8_31

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-09903-2

  • Online ISBN: 978-3-662-09901-8

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation