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Si Silicon pp 298-299 | Cite as

Silicon Nitride in High-Tc Superconductor and Superconducting Device Technology

  • Eberhard F. Krimmel
  • Rudolf Hezel
  • Uwe Nohl
  • Rainer Bohrer
Chapter
Part of the Si. Silicium. Silicon (System-Nr. 15) book series (GMELIN, volume S-i / B / 1-5 / 5 / c)

Abstract

Silicon nitride is applied in the field of high-temperature superconductors as a buffer layer between the substrate and a superconducting film, as encapsulant during annealing, and as a top layer mainly for passivating against humidity and to obtain longterm stability.

Keywords

Buffer Layer Silicon Nitride Strontium Titanate Oxide Superconductor Silicon Nitride Film 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1991

Authors and Affiliations

  • Eberhard F. Krimmel
    • 1
  • Rudolf Hezel
    • 2
  • Uwe Nohl
    • 3
  • Rainer Bohrer
    • 3
  1. 1.Universität Frankfurt/MainGermany
  2. 2.Universität ErlangenNürnbergGermany
  3. 3.Gmelin InstituteFrankfurt/MainGermany

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