Abstract
Silicon nitride is applied in integrated optics, for example, in coupling active and passive optical components, such as monolithically integrated devices, which convert electric signals into photons, and complementary ones, which convert photons into electric signals. Topics concerning optical materials, such as epitaxial growth of silicon nitride and its mechanism, were reported [1].
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© 1991 Springer-Verlag Berlin Heidelberg
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Krimmel, E.F., Hezel, R., Nohl, U., Bohrer, R. (1991). Silicon Nitride in Integrated Optics. In: Pebler, A., Schröder, F. (eds) Si Silicon. Si. Silicium. Silicon (System-Nr. 15), vol S-i / B / 1-5 / 5 / c. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-09901-8_26
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DOI: https://doi.org/10.1007/978-3-662-09901-8_26
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