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Si Silicon pp 285-286 | Cite as

Silicon Nitride in Integrated Optics

  • Eberhard F. Krimmel
  • Rudolf Hezel
  • Uwe Nohl
  • Rainer Bohrer
Chapter
Part of the Si. Silicium. Silicon (System-Nr. 15) book series (GMELIN, volume S-i / B / 1-5 / 5 / c)

Abstract

Silicon nitride is applied in integrated optics, for example, in coupling active and passive optical components, such as monolithically integrated devices, which convert electric signals into photons, and complementary ones, which convert photons into electric signals. Topics concerning optical materials, such as epitaxial growth of silicon nitride and its mechanism, were reported [1].

Keywords

Silicon Nitride Rapid Thermal Annealing Transverse Electric Wave Guide Integrate Optic 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1991

Authors and Affiliations

  • Eberhard F. Krimmel
    • 1
  • Rudolf Hezel
    • 2
  • Uwe Nohl
    • 3
  • Rainer Bohrer
    • 3
  1. 1.Universität Frankfurt/MainGermany
  2. 2.Universität ErlangenNürnbergGermany
  3. 3.Gmelin InstituteFrankfurt/MainGermany

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