Advertisement

Si Silicon pp 270-283 | Cite as

Silicon Nitride in Photoelectric Devices

  • Eberhard F. Krimmel
  • Rudolf Hezel
  • Uwe Nohl
  • Rainer Bohrer
Chapter
Part of the Si. Silicium. Silicon (System-Nr. 15) book series (GMELIN, volume S-i / B / 1-5 / 5 / c)

Abstract

Semiconductor devices, which utilize the interaction between photons and semiconductors, are applied as photosensors for various ranges of photon energy, photovoltaic cells, sensors in electrophotography, image sensors, etc. For CCD devices cf. Chapter 14, p. 201; for photovoltaic (solar) cells cf. Chapter 32, p. 321.

Keywords

Silicon Nitride Avalanche Photodiode Antireflection Coating Conductive Substrate Silicon Nitride Film 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. [1]
    Tanimura, S.; Miura, N.; Miyamoto, M. (Ger. Offen. 2316290 [1972/73] from C.A. 80 [1974] No. 20697).Google Scholar
  2. [2]
    Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–119675 [1982/83] from C.A. 99 [1983] No. 168071).Google Scholar
  3. [3]
    Toshiba Corp. (Japan. Kokai Tokkyo Koho 57–170576 [1981/82] from C.A. 98 [1983] No. 136168).Google Scholar
  4. [4]
    Fuji Photo Film Co., Ltd. (Japan. Kokai Tokkyo Koho 58–155760 [1982/83] from C.A. 100 [1984] No. 28701).Google Scholar
  5. [5]
    Semiconductor Energy Research Institute Co., Ltd. (Japan. Kokai Tokkyo Koho 59–107579 [1982/84] from C.A. 101 [1984] No. 202732).Google Scholar
  6. [6]
    Semiconductor Energy Research Institute Co., Ltd. (Japan. Kokai Tokkyo Koho 59–94884 [1982/84] from C.A. 101 [1984] No. 182259).Google Scholar
  7. [7]
    Masaki, Y.; Fukaya, M.; Furushima, T.; Terada, K.; Kakimoto, S. (Japan. Kokai Tokkyo Koho 60–218885 [1985] from C.A. 104 [1986] No. 177866).Google Scholar
  8. [8]
    Baranov, A. V.; Troyan, L. A. (Izv. Vysshikh Uchebn. Zaved. Fiz. 16 No. 10 [1973] 20/4;Google Scholar
  9. [8a]
    Baranov, A. V.; Troyan, L. A. Soviet Phys. J. 16 [1973] 1353/6).Google Scholar
  10. [9]
    Baranov, A. V.; Troyan, L. A. (Izv. Vysshikh Uchebn. Zaved. Fiz. 16 No. 9 [1973] 151/3;Google Scholar
  11. [9a]
    Baranov, A. V.; Troyan, L. A. Soviet Phys. J. 16 [1973] 1328/9).Google Scholar
  12. [10]
    Kravchenko, A. B.; Plotnikov, A. F.; Popov, Yu. M.; Seleznev, V. N.; Shubin, V. E. (Fiz. Tekh. Poluprov. [Leningrad] 8 [1974] 810/2;Google Scholar
  13. [10a]
    Kravchenko, A. B.; Plotnikov, A. F.; Popov, Yu. M.; Seleznev, V. N.; Shubin, V. E. Soviet Phys.-Semicond. 8 [1974] 522/3).Google Scholar
  14. [11]
    Roloff, H. F. (Ger. Offen. 3016498 [1980/81]; C.A. 96 [1982] No. 27487).Google Scholar
  15. [12]
    Sanyo Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 57–87183 [1980/82] from C.A. 97 [1982] No. 173541).Google Scholar
  16. [13]
    Yamazaki, S. (Japan. Kokai Tokkyo Koho 61–159772 [1986] from C.A. 106 [1987] No. 42621).Google Scholar
  17. [14]
    Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 57–104275 [1980/82] from C.A. 97 [1982] No. 206736).Google Scholar
  18. [15]
    NEC Corp. (Japan. Kokai Tokkyo Koho 59–105382 [1982/84] from C.A. 101 [1984] No. 237959).Google Scholar
  19. [16]
    Fuji Electric Corporate Research and Development, Ltd. (Japan. Kokai Tokkyo Koho 60–21 576 [1985] from C.A. 103 [1985] No. 31 264).Google Scholar
  20. [17]
    Hoshino, M. (Japan. Kokai Tokkyo Koho 61–154084 [1986] from C.A. 105 [1986] No. 237010).Google Scholar
  21. [18]
    Hoshino, M. (Japan. Kokai Tokkyo Koho 61–156778 [1986] from C.A. 106 [1987] No. 93424).Google Scholar
  22. [19]
    Huang, W. C. (U.S. 4772335 [1988]; C.A. 109 [1988] No. 240441).Google Scholar
  23. [20]
    Kervin, D.; Derrington, C. E. (U.S. 4606115 [1986]; C.A. 105 [1986] No. 236997).Google Scholar
  24. [21]
    Lin, Y.; Sun, Y.; Lu, Z. (Hangzhou Daxue Xuebao Ziran Kexueban 113 [1986] 435/43 from C.A. 107 [1987] No. 225683).Google Scholar
  25. [22]
    Toshiba Corp. (Japan. Kokai Tokkyo Koho 57–155785 [1981/82] from C.A. 98 [1983] No. 82381).Google Scholar
  26. [23]
    Angerstein, J.; Mischel, P.; Suri, J. S. (Ger. Offen. 3001899 [1980/81]; C.A. 95 [1981] No. 143053).Google Scholar
  27. [24]
    Kagawa, S. (Japan. Kokai Tokkyo Koho 61–129880 [1985/86] from C.A. 105 [1986] No. 216469).Google Scholar
  28. [25]
    Nishizawa, J.; Kiyasu, Z. (Japan. Kokai Tokkyo Koho 55–27778 [1978/80] from C.A. 93 [1980] No. 87049).Google Scholar
  29. [26]
    Mitsubishi Electric Corp. (Japan. Kokai Tokkyo Koho 58–48476 [1981/83] from CA. 99 [1983] No. 56521).Google Scholar
  30. [27]
    Wang, W.; Liao, K. (Wuji Cailiao Xuebao 3 [1988] 79/84 from CA. 109 [1988] No. 84426).Google Scholar
  31. [28]
    Yagi, T.; Terazono, S.; Miyagawa, R.; Shimizu, I. (J. Non-Cryst. Solids 59/60 [1983] 1223/6).CrossRefGoogle Scholar
  32. [29]
    Kaneko, S.; Okumura, F.; Uchida, H.; Kanamori, M.; Sakamoto, M.; Itano, T.; Kajiwara, U.; Saito, T. (J. Non-Cryst. Solids 59/60 [1983] 1227/30).CrossRefGoogle Scholar
  33. [30]
    Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–79756 [1981/83] from CA. 100 [1984] No. 112333).Google Scholar
  34. [31]
    Senda, K.; Susa, M.; Hiroshima, Y; Mizuno, H. (Japan. Kokai Tokkyo Koho 61–70753 [1986] from CA. 105 [1986] No. 106923).Google Scholar
  35. [32]
    Yamazaki, S. (Japan. Kokai Tokkyo Koho 59–229879 [1984] from CA. 103 [1985] No. 97415).Google Scholar
  36. [33]
    Canon K. K. (Japan. Kokai Tokkyo Koho 56–135979 [1980/81] from CA. 96 [1982] No. 78631).Google Scholar
  37. [34]
    Goto, A. (Japan. Kokai Tokkyo Koho 61–44478 [1986] from CA. 105 [1986] No. 16637).Google Scholar
  38. [35]
    Takeuchi, M.; Nakayama, S.; Nakajima, S.; Noguchi, S.; Nakano, S.; Kuwano, Y. (Japan. Kokai Tokkyo Koho 60–224285 [1985] from CA. 104 [1986] No. 159765).Google Scholar
  39. [36]
    Kitagawa, M.; Ishihara, S.; Ono, M.; Ono, M.; Hirao, T. (Japan. Kokai Tokkyo Koho 61–84859 [1986] from CA. 106 [1987] No. 41 720).Google Scholar
  40. [37]
    Oki Electric Industry Co., Ltd. (Japan. Kokai Tokkyo Koho 58–140153 [1982/83] from CA. 99 [1983] No. 222518).Google Scholar
  41. [38]
    Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–61662 [1981/83] from CA. 100 [1984] No. 112332).Google Scholar
  42. [39]
    Hirooka, M.; Ishihara, S.; Hanna, J.; Shimizu, I. (Eur. Appl. 226461 [1987]; CA. 108 [1988] No. 66 062).Google Scholar
  43. [40]
    Nishikura, T.; Kojima, N.; Wasa, K.; Yoshigami, N. (Japan. Kokai Tokkyo Koho 61–84860 [1986] from CA. 105 [1986] No. 106924).Google Scholar
  44. [41]
    Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–201356 [1982/83] from CA. 100 [1984] No. 130040).Google Scholar
  45. [42]
    Susa, N. (Japan. Kokai Tokkyo Koho 55–8021 [1978/80] from CA. 93 [1980] No. 17923).Google Scholar
  46. [43]
    Takahashi, M.; Nozawa, T.; Yumonji, H.; Matsuo, S. (Japan. Kokai Tokkyo Koho 61–3476 [1986] from CA. 105 [1986] No. 105525).Google Scholar
  47. [44]
    Beerlage, M. J. M. (Eur. Appl. 257678 [1988]; CA. 109 [1988] No. 83685).Google Scholar
  48. [45]
    Semiconductor Energy Research Institute Co., Ltd. (Japan. Kokai Tokkyo Koho 58–161380 [1982/83] from CA. 99 [1983] No. 223622).Google Scholar
  49. [46]
    Semiconductor Energy Research Institute Co., Ltd. (Japan. Kokai Tokkyo Koho 58–161381 [1982/83] from CA. 99 [1983] No. 223587).Google Scholar
  50. [47]
    Kanegafuchi Chemical Industry Co., Ltd. (Japan. Kokai Tokkyo Koho 58–191479 [1982/83] from CA. 101 [1984] No. 63439).Google Scholar
  51. [48]
    Shmyreva, A. N.; Ivashchuk, A. V. (Fiz. Tekh. Poluprov. [Leningrad] 13 [1979] 1835/8;Google Scholar
  52. [48a]
    Shmyreva, A. N.; Ivashchuk, A. V. Soviet Phys.-Semicond. 13 [1979] 1067/8).Google Scholar
  53. [49]
    Hatanaka, Y.; Kawai, S.; Suzuki, Y., Asai, Y.; Shimaoka, G. (Appl. Surf. Sei. 33/34 [1987/88] 792/6; CA. 110 [1989] No. 16805).Google Scholar
  54. [50]
    Yamazaki, K. (Japan. Kokai Tokkyo Koho 56–79477 [1980/81] from CA. 95 [1981] No. 125007).Google Scholar
  55. [51]
    Yamazaki, K. (Japan. Kokai Tokkyo Koho 56–79479 [1979/81] from CA. 95 [1981] No. 125006).Google Scholar
  56. [52]
    Yamazaki, S. (Japan. Kokai Tokkyo Koho 57–10277 [1980/82] from C.A. 96 [1982] No. 154027).Google Scholar
  57. [53]
    Shmyreva, A. N.; Kirpatenko, L. T. (Dielektriki Poluprov. No. 21 [1982] 45/9 from C.A. 98 [1983] No. 45143).Google Scholar
  58. [54]
    Kravchenko, A. B.; Plotnikov, A. F.; Seleznev, V. N.; Tokarchuk, D. N.; Shubin, V. E. (Kvantovaya Elektron. [Moscow] 1 [1974] 2291/3 from C.A. 82 [1975] No. 79500).Google Scholar
  59. [55]
    Hamano, T.; Nakamura, T.; Fuse, M. (Eur. Appl. 115654 [1983/84]; C.A. 102 [1985] No. 54792).Google Scholar
  60. [56]
    Aoyama, A. (Japan. Kokai Tokkyo Koho 01–055755 [1987/89] from C.A. 111 [1989] No. 184286).Google Scholar
  61. [57]
    Aoyama, A. (Japan. Kokai Tokkyo Koho 01–066842 [1987/89] from C.A. 111 [1989] No. 244418).Google Scholar
  62. [58]
    Pai, D. M.; Kuhn, E. R. (Eur. Appl. 217623 [1987]; C.A. 107 [1987] No. 68112).Google Scholar
  63. [59]
    Tanaka, E.; Takeda, E.; Fujiwara, S. (Japan. Kokai Tokkyo Koho 61–27555 [1986] from C.A. 105 [1986] No. 15265).Google Scholar
  64. [60]
    Xerox Corp. (Japan. Kokai Tokkyo Koho 60–59367 [1985] from C.A. 103 [1985] No. 113296).Google Scholar
  65. [61]
    Xerox Corp. (Japan. Kokai Tokkyo Koho 63–8748 [1988] from C.A. 109 [1988] No. 101784).Google Scholar
  66. [62]
    Yamazaki, T.; Sakai, E.; Nakanishi, T.; Nomori, H. (Japan. Kokai Tokkyo Koho 60–235148 [1985] from C.A. 104 [1986] No. 159616).Google Scholar
  67. [63]
    Inoue, E.; Shimizu, I. (Phot. Sei. Eng. 26 [1982] 148/52; C.A. 96 [1982] No. 226481).Google Scholar
  68. [64]
    Araki, M.; Kyota, K. (Japan. Kokai Tokkyo Koho 60–256151 [1985] from C.A. 104 [1986] No. 177732).Google Scholar
  69. [65]
    Tanaka, S.; Fujita, N.; Nakagama,S.;Ichiyanagi, H. (Japan. Kokai Tokkyo Koho 61–239249 [1986] from C.A. 106 [1987] No. 186400).Google Scholar
  70. [66]
    Nippon Telegraph and Telephone Public Corp. (Japan. Kokai Tokkyo Koho 57–200047 [1981/82] from C.A. 100 [1984] No. 129827).Google Scholar
  71. [67]
    Mitsubishi Chemical Industries Co., Ltd. (Japan. Kokai Tokkyo Koho 58–182642 [1982/83] from C.A. 101 [1984] No. 161 201).Google Scholar
  72. [68]
    Konishiroku Photo Industry Co., Ltd. (Japan. Kokai Tokkyo Koho 59–15940 [1982/84] from C.A. 101 [1984] No. 201444).Google Scholar
  73. [69]
    Konishiroku Photo Industry Co., Ltd. (Japan. Kokai Tokkyo Koho 59–15941 [1982/84] from C.A. 101 [1984] No. 201445).Google Scholar
  74. [70]
    Suwa Seikosha Co., Ltd. (Japan. Kokai Tokkyo Koho 59–33457 [1982/84] from C.A. 102 [1985] No. 53867).Google Scholar
  75. [71]
    Suwa Seikosha Co., Ltd. (Japan. Kokai Tokkyo Koho 59–36257 [1982/84] from C.A. 101 [1984] No. 219744).Google Scholar
  76. [72]
    Matsuzaki, M.; Yamazaki, T.; Nomori, H. (Ger. Offen. 3321135 [1982/83]; C.A. 100 [1984] No. 94526).Google Scholar
  77. [73]
    Ogawa, K.; Shirai, S.; Kanbe, J.; Saitoh, K.; Osato, Y.; Misumi, T. (Ger. Offen. 3304198 [1982/83]; C.A. 99 [1983] No. 222394).Google Scholar
  78. [74]
    Stolka, M.; Pai, D. M. (U.S. 4758487 [1988]; C.A. 109 [1988] No. 219566).Google Scholar
  79. [75]
    Mitsubishi Chemical Industries Co., Ltd. (Japan. Kokai Tokkyo Koho 58–186748 [1982/83] from C.A. 101 [1984] No. 181110).Google Scholar
  80. [76]
    Saitoh, K.; Ohnuki, Y.; Ohno, S. (Ger. Offen. 3447671 [1985]; C.A. 103 [1985] No. 186879).Google Scholar
  81. [77]
    Konishiroku Photo Industry Co., Ltd. (Japan. Kokai Tokkyo Koho 60–48045 [1983/85] from C.A. 102 [1985] No. 195180).Google Scholar
  82. [78]
    Yamazaki, T.; Sakai, E.; Nakanishi, T.; Nomori, H. (Ger. Offen. 3511315 [1985]; C.A. 104 [1986] No. 159561).Google Scholar
  83. [79]
    Ricoh Co., Ltd. (Japan. Kokai Tokkyo Koho 60–118844 [1985] from C.A. 103 [1985] No. 224392).Google Scholar
  84. [80]
    Ricoh Co., Ltd. (Japan. Kokai Tokkyo Koho 60–118848 [1985] from C.A. 103 [1985] No. 224391).Google Scholar
  85. [81]
    Oki Electric Industry Co., Ltd. (Japan. Kokai Tokkyo Koho 58–190 955 [1982/83] from C.A. 101 [1984] No. 120457).Google Scholar
  86. [82]
    Yamazaki, T.; Sakai, E.; Nakanishi,T.; Nomori, H. (Japan. Kokai Tokkyo Koho 60–235154 [1985] from C.A. 104 [1986] No. 159620).Google Scholar
  87. [83]
    Yamazaki, T.; Sakai, E.; Nakanishi, T.; Nomori, H. (Japan. Kokai Tokkyo Koho 60–235155 [1985] from C.A. 104 [1986] No. 159621).Google Scholar
  88. [84]
    Yamazaki, T.; Sakai, E.; Nakanishi, T.; Nomori, H. (Japan. Kokai Tokkyo Koho 60–235156 [1985] from C.A. 104 [1986] No. 159622).Google Scholar
  89. [85]
    Yamazaki, T.; Nakanishi, T.; Marukawa, Y.; Takeuchi, S.; Nomori, H. (Japan. Kokai Tokkyo Koho 60–183661 [1986] from C.A. 106 [1987] No. 129274).Google Scholar
  90. [86]
    Yamazaki, T.; Nakanishi, T.; Marukawa, Y.; Nomori, H. (Japan. Kokai Tokkyo Koho 61–243459 [1986] from C.A. 106 [1987] No. 129311).Google Scholar
  91. [87]
    Yamazaki, T.; Nakanishi, T.; Marukawa, Y.; Take[no]uchi, S.; Nomori, H. (Ger. Offen. 3546314 [1986]; C.A. 106 [1987] No. 205135).Google Scholar
  92. [88]
    Yamazaki, T.; Nakanishi, T.; Nomori, H. (Ger. Offen. 3418596 [1983/84]; C.A. 102 [1985] No. 87617).Google Scholar
  93. [89]
    Shirai, S.; Kanbe, J.; Fukuda, T. (Fr. Demande 2497604 [1981/82] from C.A. 97 [1982] No. 153925).Google Scholar
  94. [90]
    Sharp Corp. (Japan. Kokai Tokkyo Koho 58–137840 [1982/83] from C.A. 101 [1984] No. 101200).Google Scholar
  95. [91]
    Canon K. K. (Japan. Kokai Tokkyo Koho 59–52249 [1983/84] from C.A. 101 [1984] No. 201482).Google Scholar
  96. [92]
    Kodera, K.; Ota, T. (Japan. Kokai Tokkyo Koho 61–190733 [1986] from C.A. 106 [1987] No. 166300).Google Scholar
  97. [93]
    Konishiroku Photo Industry Co., Ltd. (Japan. Kokai Tokkyo Koho 59–84255 [1982/84] from C.A. 101 [1984] No. 238117).Google Scholar
  98. [94]
    Matsumura, Y.; Omi, K.; Okano, S.; Inoue, T. (Japan. Kokai Tokkyo Koho 63–88560 [1988] from C.A. 109 [1988] No. 101875).Google Scholar
  99. [95]
    Mort, J.; Jansen, F.; Grammatica, S. J.; Morgan, M. A. (Eur. Appl. 141664 [1985]; C.A. 103 [1985] No. 62528).Google Scholar
  100. [96]
    Nippon Telegraph and Telephone Public Corp. (Japan. Kokai Tokkyo Koho 60–107035 [1985] from C.A. 103 [1985] No. 96365).Google Scholar
  101. [97]
    Komatsu, T.; Hirai, H.; Nakagawa, K.; Fukuda, C. (Japan. Kokai Tokkyo Koho 54–145537 [1978/79] from C.A. 92 [1980] No. 119710).Google Scholar
  102. [98]
    Stanley Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–152255 [1982/83] from C.A. 101 [1984] No. 101205).Google Scholar
  103. [99]
    Semiconductor Energy Research Institute Co., Ltd. (Japan. Kokai Tokkyo Koho 57–202546 [1981/82] from C.A. 100 [1984] No. 183124).Google Scholar
  104. [100]
    Shiwa, S.; Oba, Y. (Japan. Kokai Tokkyo Koho 61–13251 [1986] from C.A. 104 [1986] No. 216512).Google Scholar
  105. [101]
    Canon K. K. (Japan. Kokai Tokkyo Koho 58–80647 [1981/83] from C.A. 101 [1984] No. 31107).Google Scholar
  106. [102]
    Yoshizawa, H.; Miki, A.; Mitani, W.; Nagae, M.; Ikesue, T. (Japan. Kokai Tokkyo Koho 62–70854 [1987] from C.A. 107 [1987] No. 87151).Google Scholar
  107. [103]
    Yamazaki, M. (Japan. Kokai Tokkyo Koho 61–134768 [1986] from C.A. 106 [1987] No. 11182).Google Scholar
  108. [104]
    Narukawa, S.; Kojima, Y.; Ebara, N. (Japan. Kokai Tokkyo Koho 60–256152 [1985] from C.A. 104 [1986] No. 177731).Google Scholar
  109. [105]
    Hayakawa, T.; Nojima, H.; Kojima, Y.; Narikawa, S.; Matsuyama, T.; Imada, E.; Ehara, S. (Eur. Appl. 194874 [1986]; C.A. 105 [1986] No. 235829).Google Scholar
  110. [106]
    Nakagama, S.; Tanaka, S.; Ishii, M.; Fujita, N.; Ichiyanagi, H. (Japan. Kokai Tokkyo Koho 61–248057 [1986] from C.A. 107 [1987] No. 49517).Google Scholar
  111. [107]
    Hitachi Koki Co., Ltd. (Japan. Kokai Tokkyo Koho 60–125846 [1985] from C.A. 103 [1985] No. 169862).Google Scholar
  112. [108]
    Hitachi Koki Co., Ltd. (Japan. Kokai Tokkyo Koho 60–104955 [1985] from C.A. 103 [1985] No. 96363).Google Scholar
  113. [109]
    Hitachi Koki Co., Ltd. (Japan. Kokai Tokkyo Koho 60–104954 [1985] from C.A. 103 [1985] No. 79489).Google Scholar
  114. [110]
    Yasuoka, H.; Murase, C; Terao, M.; Nishida, T.; Ando, K.; Oshima, M. (Japan. Kokai Tokkyo Koho 63–181137 [1988] from C.A. 110 [1989] No. 67009).Google Scholar
  115. [111]
    Tanaka, S.; Fujita, N. (Japan. Kokai Tokkyo Koho 62–28766 [1987] from C.A. 107 [1987] No. 106250).Google Scholar
  116. [112]
    Tanaka, S.; Fujita, N. (Japan. Kokai Tokkyo Koho 62–28767 [1987] from C.A. 107 [1987] No. 106251).Google Scholar
  117. [113]
    Canon K. K. (Japan. Kokai Tokkyo Koho 58–80641 [1981/83] from C.A. 99 [1983] No. 96819).Google Scholar
  118. [114]
    Yoshizawa, H.; Ikesue, T. (Japan. Kokai Tokkyo Koho 63–113549 [1988] from C.A. 109 [1988] No. 160576).Google Scholar
  119. [115]
    Yoshizawa, H.; Ikesue, T. (Japan. Kokai Tokkyo Koho 63–137234 [1988] from C.A. 109 [1988] No. 139154).Google Scholar
  120. [116]
    Yoshizawa, H.; Ikesue, T. (Japan. Kokai Tokkyo Koho 63–137235 [1988] from C.A. 109 [1988] No. 139153).Google Scholar
  121. [117]
    Yoshizawa, H.; Ikesue, T. (Japan. Kokai Tokkyo Koho 63–137236 [1988] from C.A. 109 [1988] No. 139155).Google Scholar
  122. [118]
    Yoshizawa, H.; Ikesue, T. (Japan. Kokai Tokkyo Koho 63–137237 [1988] from C.A. 109 [1988] No. 160588).Google Scholar
  123. [119]
    Yoshizawa, H.; Ikesue, T. (Japan. Kokai Tokkyo Koho 63–137238 [1988] from C.A. 109 [1988] No. 160587).Google Scholar
  124. [120]
    Yoshizawa, H.; Ikesue, T. (Japan. Kokai Tokkyo Koho 63–137239 [1988] from C.A. 109 [1988] No. 160586).Google Scholar
  125. [121]
    Yoshizawa, H.; Ikesue, T. (Japan. Kokai Tokkyo Koho 63–163862 [1988] from C.A. 109 [1988] No. 180421).Google Scholar
  126. [122]
    Yoshizawa, H.; Ikesue, T. (Japan. Kokai Tokkyo Koho 01–059235 [1987/89] from C.A. 111 [1989] No. 184137).Google Scholar
  127. [123]
    Ebara, N. (Japan. Kokai Tokkyo Koho 62–192752 [1987] from C.A. 108 [1988] No. 177138).Google Scholar
  128. [124]
    Ebara, N. (Japan. Kokai Tokkyo Koho 62–192753 [1987] from C.A. 108 [1988] No. 177140).Google Scholar
  129. [125]
    Energy Conversion Devices, Inc. (Japan. Kokai Tokkyo Koho 61–137784 [1986] from C.A. 106 [1987] No. 129415).Google Scholar
  130. [126]
    Miki, A.; Mitani, W.; Ikesue, T. (Japan. Kokai Tokkyo Koho 61–133949 [1986] from C.A. 106 [1987] No. 11184).Google Scholar
  131. [127]
    Miki, A.; Mitani, W.; Ikesue, T. (Japan. Kokai Tokkyo Koho 61–137158 [1986] from CA. 105 [1986] No. 235800).Google Scholar
  132. [128]
    Coleman, J. H. (Eur. Appl. 70715 [1981/83]; CA. 98 [1983] No. 189002).Google Scholar
  133. [129]
    Ishihara, S.; Ono, S.; Kanai, M.; Oda, T.; Shimizu, I. (Japan. Kokai Tokkyo Koho 61–198618 [1986] from CA. 106 [1987] No. 76665).Google Scholar
  134. [130]
    Konishiroku Photo Industry Co., Ltd. (Japan. Kokai Tokkyo Koho 60–98441 [1985] from CA. 104 [1986] No. 119905).Google Scholar
  135. [131]
    Toshiba Corp. (Japan. Kokai Tokkyo Koho 57–196263 [1981/82] from CA. 100 [1984] No. 94506).Google Scholar
  136. [132]
    Canon K. K. (Japan. Kokai Tokkyo Koho 58–82253 [1981/83] from CA. 101 [1984] No. 14996).Google Scholar
  137. [133]
    Fukagai, T.; Taniguchi, K.; Yokoyama, K.; Oota, K. (Japan. Kokai Tokkyo Koho 01–073353 [1987/89] from CA. 111 [1989] No. 105780).Google Scholar
  138. [134]
    Koyama, M.; Kato, K.; Fukuda, Y.; Suda, F. (Japan. Kokai Tokkyo Koho 62–288852 [1987] from CA. 109 [1988] No. 83370).Google Scholar
  139. [135]
    Konishiroku Photo Industry Co., Ltd. (Japan. Kokai Tokkyo Koho 58–59454 [1981/83] from CA. 99 [1983] No. 80022).Google Scholar
  140. [136]
    Fuji Photo Film Co., Ltd. (Japan. Kokai Tokkyo Koho 59–53848 [1982/84] from CA. 101 [1984] No. 219763).Google Scholar
  141. [137]
    Nippon Telegraph and Telephone Public Corp. (Japan. Kokai Tokkyo Koho 57–82237 [1980/82] from CA. 98 [1983] No. 117159).Google Scholar
  142. [138]
    Takeda, E.; Tanaka, E.; Takimoto, A.; Fujiwara, S. (Japan. Kokai Tokkyo Koho 61–7669 [1986] from CA. 104 [1986] No. 235720).Google Scholar
  143. [139]
    Shimomoto, Y.; Tanaka, Y.; Takasaki, Y.; Ishioka, S.; Tsukada, T.; Baji, T. (Eur. Appl. 32847 [1980/81]; CA. 95 [1981] No. 178715).Google Scholar
  144. [140]
    Hitachi Ltd. (Japan. Kokai Tokkyo Koho 56–85876 [1979/81] from CA. 95 [1981] No. 143052).Google Scholar
  145. [141]
    Matsushita Electric Industrial Co., Ltd. (Japan. Kokai Tokkyo Koho 58–32478 [1981/83] from CA. 99 [1983] No. 31871).Google Scholar
  146. [142]
    Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 55–107279 [1979/80] from CA. 94 [1981] No. 23923).Google Scholar
  147. [143]
    Takeda, Y.; Fujiwara, S. (Japan. Kokai Tokkyo Koho 60–178458 [1985] from CA. 104 [1986] No. 79206).Google Scholar
  148. [144]
    Takeda, Y.; Fujiwara, S. (Japan. Kokai Tokkyo Koho 60–178459 [1985] from CA. 104 [1986] No. 79205).Google Scholar
  149. [145]
    Sadamatsu, K.; Tanaka, E.; Takeda, E.; Fujiwara, S. (Japan. Kokai Tokkyo Koho 60–201 675 [1985] from CA. 104 [1986] No. 121 233).Google Scholar
  150. [146]
    Jedlicka, M.; Kocka, J.; Kubelik, I.; Stika, O.; Stuchlik, J. (Proc. Intern. Symp. Tech. Comm. Photon-Detect. Intern. Meas. Confed. 11 [1984] 72/7 from CA. 103 [1985] No. 79385).Google Scholar
  151. [147]
    Kocka, J.; Kubelik, I.; Stuchlik, J.; Stika, O.; Vanecak, M.; Jedlicka, M.; Scoba, K. (Czech. 245592 [1987] from CA. 109 [1988] No. 64515).Google Scholar
  152. [148]
    Schauer, F.; Jedlicka, M.; Kocka, J. (Advan. Electron. Electron Phys. 74 [1988] 359/67 from CA. 110 [1989] No. 202657).Google Scholar
  153. [149]
    Tabei, M.; Mizobuchi, J. (Japan. Kokai Tokkyo Koho 63–198472 [1988] from CA. 110 [1989] No. 31 544).Google Scholar
  154. [150]
    Maronchuk, Yu. E.; Senoshenko, O. V. (Fiz. Tekh. Poluprov. [Leningrad] 8 [1974] 1376/8;Google Scholar
  155. [150]
    Maronchuk, Yu. E.; Senoshenko, O. V. Soviet Phys.-Semicond. 8 [1974] 895/6).Google Scholar
  156. [151]
    Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 58–169967 [1982/83] from CA. 100 [1984] No. 78455).Google Scholar
  157. [152]
    Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 58–170054 [1982/83] from CA. 100 [1984] No. 78456).Google Scholar
  158. [153]
    Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 59–3920 [1982/84] from CA. 100 [1984] No. 201957).Google Scholar
  159. [154]
    Miura, S. (Japan. Kokai Tokkyo Koho 61–150387 [1986] from CA. 105 [1986] No. 237008).Google Scholar
  160. [155]
    Camlibet, I.; Singh, S.; Van Uitert, L G.; Zuber, J. R.; Zydzik, G. J. (U.S. 4455351 [1983/84]; CA. 101 [1984] No. 63462).Google Scholar
  161. [156]
    Fujiwara, I.; Matsuda, H.; Ito, K.; Ochi, H. (Japan. Kokai Tokkyo Koho 61–112386 [1986] from CA. 105 [1986] No. 201590).Google Scholar
  162. [157]
    Chane, J. P.; Martin, B. G.; Patillon, J. N.; Gentner, J. L (Vide Couches Minces 41 [1986] 203/4; CA. 105 [1986] No. 33769).Google Scholar
  163. [158]
    Safrankova, J.; Kordos, P.; Guldan, A.; Chromik, S.; Kubek, J. (Elektrotech. Casopis 36 [1985] 915/23 from CA. 104 [1986] No. 119610).Google Scholar
  164. [159]
    Fujita, S.; Noda, S.; Ishio, K.; Sasaki, A. (Solar Energy Mater. 11 [1984] 249/60; CA. 102 [1985] No. 98393).Google Scholar
  165. [160]
    Braun, D. M. (Appl. Opt. 27 [1988] 2006/11; CA. 109 [1988] No. 29824).Google Scholar
  166. [161]
    Lee, D. H.; Li, S.; Lee, S. J.; Paulter, N. G. (Proc. SPlE-lntem. Soc. Opt. Eng. No. 1102 [1989] 46/52; CA. 111 [1989] No. 221718).Google Scholar
  167. [162]
    Takahashi, K.; Shiba, T.; Yoshida, K.; Namizaki, H. (Mitsubishi Denki Giho 60 [1986] 137/40 from CA. 105 [1986] No. 51881).Google Scholar
  168. [163]
    Hikita, S.; Kajiwara, N.; Miyamoto, Y.; Tanigawa, K. (Japan. Kokai Tokkyo Koho 62–272544 [1987] from CA. 108 [1988] No. 214955).Google Scholar
  169. [164]
    Trivich, D.; Wang, E. Y.; Komp, R. J. (COO-4726–10 [1978] 52 pp. from CA. 93 [1980] No. 98438).Google Scholar
  170. [165]
    Coulter Systems Corp. (Neth. Appl. 79–2071 [1979/80] from CA. 94 [1981] No. 22959).Google Scholar
  171. [166]
    Coulter Systems Corp. (Fr. Demande 2456342 [1979/80] from CA. 95 [1981] No. 33462).Google Scholar
  172. [167]
    Ricoh Co., Ltd. (Japan. Kokai Tokkyo Koho 59–58437 [1982/84] from CA. 101 [1984] No. 201 473).Google Scholar
  173. [168]
    Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 58–180073 [1982/83] from CA. 100 [1984] No. 113443).Google Scholar
  174. [169]
    Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–1552 [1973/83] from CA. 99 [1983] No. 14995).Google Scholar
  175. [170]
    Friedrich, P.; Sopko, B. (Czech. 242139 [1988] from CA. 109 [1988] No. 45883).Google Scholar
  176. [171]
    Friedrich, P.; Sopko, B. (Czech. 242027 [1987] from CA. 109 [1988] No. 64037).Google Scholar
  177. [172]
    Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 58–157177 [1982/83] from CA. 100 [1984] No. 28703).Google Scholar
  178. [173]
    Shirai, T.; Kobayashi, M. (Japan. Kokai Tokkyo Koho 63–274132 [1987/88] from CA. 110 [1989] No. 204060).Google Scholar
  179. [174]
    Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 58–168283 [1982/83] from CA. 100 [1984] No. 44070).Google Scholar
  180. [175]
    Kobayashi, M.; Yamazaki, S. (Japan. Kokai Tokkyo Koho 61–3477 [1986] from CA. 104 [1986] No. 235722).Google Scholar
  181. [176]
    Kishi, Y.; Yamazaki, S. (Japan. Kokai Tokkyo Koho 61–56410 [1986] from CA. 105 [1986] No. 89120).Google Scholar
  182. [177]
    Fujiwara, M.; Shiba, T.; Kakimoto, S.; Takahashi, K. (Japan. Kokai Tokkyo Koho 63–20878 [1988] from CA. 108 [1988] No. 229367).Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1991

Authors and Affiliations

  • Eberhard F. Krimmel
    • 1
  • Rudolf Hezel
    • 2
  • Uwe Nohl
    • 3
  • Rainer Bohrer
    • 3
  1. 1.Universität Frankfurt/MainGermany
  2. 2.Universität ErlangenNürnbergGermany
  3. 3.Gmelin InstituteFrankfurt/MainGermany

Personalised recommendations