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Si Silicon pp 250-262 | Cite as

Silicon Nitride in Compound Semiconductor Field Effect Transistors

  • Eberhard F. Krimmel
  • Rudolf Hezel
  • Uwe Nohl
  • Rainer Bohrer
Chapter
Part of the Si. Silicium. Silicon (System-Nr. 15) book series (GMELIN, volume S-i / B / 1-5 / 5 / c)

Abstract

The problem to grow natural, insulating oxides with good properties on compound semiconductors such as GaAs does not favor the fabrication and application of bipolar devices and even less of MIS devices. Therefore, silicon nitride plays an important role as a masking material for diffusion, implantation, and as dielectric in the manufacture of compound semiconductor devices.

Keywords

Silicon Nitride GaAs Substrate Gate Electrode Silicon Oxide Film Silicon Nitride Film 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. [1]
    Zak, J. (Pr. Inst. Technol. Elektron. [Warsaw] 1973 No. 6, p. 22 from C.A. 80 [1974] No. 31404).Google Scholar
  2. [2]
    Seki, H.; Ohosaka, S.; Kanda, M.; Kawasaki, Y.; Yamazaki, H.; Fujimoto, M. (Kenkyu Jitsuyoka Hokoku Denki Tsushin Kenkyushe 20 [1971] 1829/45 from C.A. 76 [1972] No. 8043).Google Scholar
  3. [3]
    Seki, H.; Ohosaka, S.; Kanda, M.; Kawasaki, Y.; Yamazaki, H.; Fujimoto, M. (Rev. Elec. Commun. Lab. 20 [1972] 810/6 from C.A. 78 [1973] No. 49681).Google Scholar
  4. [4]
    Sony Corp. (Japan. Kokai Tokkyo Koho 59–105376 [1982/84] from C.A. 101 [1984] No. 220922).Google Scholar
  5. [5]
    Nakagawa, Y.; Takagi, J.; Sakurai, T. (Japan. Kokai Tokkyo Koho 61–144822 [1986] from C.A. 106 [1987] No. 11685).Google Scholar
  6. [6]
    Yamane, Y.; Ishii, Y.; Mizutani, T. (Japan. J. Appl. Phys. 22 Suppl. 2 [1983] 350/2).Google Scholar
  7. [7]
    Vanner, K. C; Cockrill, J. R.; Turner, J. A. (ASTM Spec. Tech. Publ. No. 960 [1987] 220/40 from C.A. 106 [1987] No. 167052).Google Scholar
  8. [8]
    Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 59–175772 [1983/84] from C.A. 102 [1985] No. 124048).Google Scholar
  9. [9]
    Nippon Telegraph and Telephone Public Corp. (Japan. Kokai Tokkyo Koho 58–206166 [1982/83] from C.A. 100 [1984] No. 149529).Google Scholar
  10. [10]
    Mitsubishi Electric Corp. (Japan. Kokai Tokkyo Koho 59–208786 [1983/84] from C.A. 102 [1985] No. 177615).Google Scholar
  11. [11]
    Shimoyama, T.; Omori, M. (Japan. Kokai Tokkyo Koho 63–224262 [1988] from C.A. 110 [1989] No. 68064).Google Scholar
  12. [12]
    Sony Corp. (Japan. Kokai Tokkyo Koho 60–39874 [1985] from C.A. 103 [1985] No. 80529).Google Scholar
  13. [13]
    Toshiba Corp. (Japan. Kokai Tokkyo Koho 59–225573 [1983/84] from C.A. 102 [1985] No. 230381).Google Scholar
  14. [14]
    Adaka, S.; Mori, M.; Matsuoka, N.; Kodera, N.; Shigeta, J. (Japan. Kokai Tokkyo Koho 60–170265 [1985] from C.A. 104 [1986] No. 100597).Google Scholar
  15. [15]
    Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–194373 [1982/83] from C.A. 100 [1984] No. 113402).Google Scholar
  16. [16]
    Omura, S. (Japan. Kokai Tokkyo Koho 61–156817 [1986] from C.A. 106 [1987] No. 26591).Google Scholar
  17. [17]
    NEC Corp. (Japan. Kokai Tokkyo Koho 59–205765 [1983/84] from C.A. 102 [1985] No. 177551).Google Scholar
  18. [18]
    NEC Corp. (Japan. Kokai Tokkyo Koho 60–25277 [1985] from C.A. 103 [1985] No. 31130).Google Scholar
  19. [19]
    Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 59–47771 [1982/84] from C.A. 101 [1984] No. 82667).Google Scholar
  20. [20]
    NEC Corp. (Japan. Kokai Tokkyo Koho 59–126676 [1983/84] from C.A. 102 [1985] No. 38053).Google Scholar
  21. [21]
    Mizuno, H. (Japan. Kokai Tokkyo Koho 62–32617 [1987] from C.A. 107 [1987] No. 248351).Google Scholar
  22. [22]
    NEC Corp. (Japan. Kokai Tokkyo Koho 59–224178 [1983/84] from C.A. 103 [1985] No. 15516).Google Scholar
  23. [23]
    Shikada, S.; Ehata, T. (Japan. Kokai Tokkyo Koho 62–47150 [1987] from C.A. 107 [1987] No. 16288).Google Scholar
  24. [24]
    Hitachi Ltd. (Japan. Kokai Tokkyo Koho 58–196055 [1983] from C.A. 100 [1984] No. 113395).Google Scholar
  25. [25]
    Toshiba Corp. (Japan. Kokai Tokkyo Koho 58–12368 [1981/83] from C.A. 99 [1983] No. 14982).Google Scholar
  26. [26]
    Nakagawa, A.; Hirose, T. (Japan. Kokai Tokkyo Koho 61–181169 [1986] from C.A. 106 [1987] No. 59930).Google Scholar
  27. [27]
    Nozaki, T.; Tosaka, A. (Japan. Kokai Tokkyo Koho 61–97870 [1986] from C.A. 105 [1986] No. 163347).Google Scholar
  28. [28]
    Tsujii, H. (Japan. Kokai Tokkyo Koho 61–6871 [1986] from C.A. 104 [1986] No. 235645).Google Scholar
  29. [29]
    Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 59–4173 [1982/84] from C.A. 100 [1984] No. 201840).Google Scholar
  30. [30]
    Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 58–10823 [1981/83]; C.A. 98 [1983] No. 208560).Google Scholar
  31. [31]
    Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 55–160433 [1979/80] from C.A. 94 [1981] No. 184437).Google Scholar
  32. [32]
    Mitsui, Y. (Japan. Kokai Tokkyo Koho 61–8976 [1986] from C.A. 105 [1986] No. 16493).Google Scholar
  33. [33]
    Asai, S. (Japan. Kokai Tokkyo Koho 61–80821 [1986] from C.A. 105 [1986] No. 125469).Google Scholar
  34. [34]
    Asai, S. (Japan. Kokai Tokkyo Koho 61–204940 [1986] from C.A. 106 [1987] No. 77131).Google Scholar
  35. [35]
    Asai, S. (Japan. Kokai Tokkyo Koho 61–77365 [1986] from C.A. 105 [1986] No. 144537).Google Scholar
  36. [36]
    Nikaido, J. (Japan. Kokai Tokkyo Koho 01–048428 [1987/89] from C.A. 111 [1989] No. 16275).Google Scholar
  37. [37]
    Oshika, K. (Japan. Kokai Tokkyo Koho 61–78171 [1986] from C.A. 105 [1986] No. 89726).Google Scholar
  38. [38]
    Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–79767 [1981/83] from C.A. 99 [1983] No. 97795).Google Scholar
  39. [39]
    Sumitomo Electric Industries, Ltd. (Japan. Kokai Tokkyo Koho 59–126678 [1983/84] from C.A. 102 [1985] No. 16104).Google Scholar
  40. [40]
    Mitsui, Y.; Kobiki, M.; Sasaki, Y. (Japan. Kokai Tokkyo Koho 61–174723 [1986] from C.A. 106 [1987] No. 42541).Google Scholar
  41. [41]
    Fowler, A. B.; Rosenberg, R.; Rupprecht, S. S. (Eur. Appl. 63221 [1981/82]; C.A. 98 [1983] No. 99793).Google Scholar
  42. [42]
    Miyazaki, M.; Takahashi, S.; Kohashi, T.; Ueyanagi, K. (Eur. Appl. 101960 [1982/84]; C.A. 100 [1984] No. 220171).Google Scholar
  43. [43]
    Yamada, Y. (Japan. Kokai Tokkyo Koho 63–133680 [1988] from C.A. 109 [1988] No. 181976).Google Scholar
  44. [44]
    Hairi, I. (Japan. Kokai Tokkyo Koho 62–35679 [1987] from C.A. 106 [1987] No. 206350).Google Scholar
  45. [45]
    NEC Corp. (Japan. Kokai Tokkyo Koho 59–224179 [1984] from C. A. 103 [1985] No. 31144).Google Scholar
  46. [46]
    Matsushita Electric Industrial Co., Ltd. (Japan. Kokai Tokkyo Koho 60–37784 [1985] from C.A. 103 [1985] No. 97427).Google Scholar
  47. [47]
    NEC Corp. (Japan. Kokai Tokkyo Koho 59–193069 [1983/84] from C.A. 102 [1985] No. 159069).Google Scholar
  48. [48]
    Konuma, T.; Sugawa, T. (Japan. Kokai Tokkyo Koho 61–4200 [1986] from C.A. 105 [1986] No. 89609).Google Scholar
  49. [49]
    NEC Corp. (Japan. Kokai Tokkyo Koho 60–37172 [1985] from C.A. 103 [1985] No. 63518).Google Scholar
  50. [50]
    NEC Corp. (Japan. Kokai Tokkyo Koho 60–37173 [1985] from C.A. 103 [1985] No. 97440).Google Scholar
  51. [51]
    NEC Corp. (Japan. Kokai Tokkyo Koho 60–37174 [1985] from C.A. 103 [1985] No. 97441).Google Scholar
  52. [52]
    NEC Corp. (Japan. Kokai Tokkyo Koho 60–37175 [1985] from C.A. 103 [1985] No. 97442).Google Scholar
  53. [53]
    NEC Corp. (Japan. Kokai Tokkyo Koho 60–37176 [1985] from C.A. 103 [1985] No. 97443).Google Scholar
  54. [54]
    NEC Corp. (Japan. Kokai Tokkyo Koho 60–52061 [1985] from C.A. 103 [1985] No. 133370).Google Scholar
  55. [55]
    NEC Corp. (Japan. Kokai Tokkyo Koho 60–111474 [1985] from C.A. 104 [1986] No. 13733).Google Scholar
  56. [56]
    Tamura, A. (Japan. KokaiTokkyo Koho 61–216425 [1986] from C.A. 106 [1987] No. 77163).Google Scholar
  57. [57]
    Toshiba Corp. (Japan. Kokai Tokkyo Koho 60–70768 [1985] from C.A. 103 [1985] No. 133463).Google Scholar
  58. [58]
    Verner, V. D.; Radautsan, G. I.; Neustroev, S. A. (Izv. Akad. Nauk Mold. SSR Ser. Fiz. Tekh. Mat. Nauk 1984 No. 2, pp. 24/7 from C.A. 101 [1984] No. 181914).Google Scholar
  59. [59]
    Anholt, R.; Sigmon, T. W. (IEEE Trans. Electron Devices 36 [1989] 250/5; C.A. 110 [1989] No. 145750).CrossRefGoogle Scholar
  60. [60]
    Maier, M.; Bachern, K. H.; Hornung, J. (Second. Ion Mass Spectrom. Proc. 6th Intern. Conf., Versailles 1987 [1988], pp. 765/8; C.A. 111 [1989] No. 15923).Google Scholar
  61. [61]
    Yan, B.; Shi, C; Xin, S.; Zhou, W. (Bandaoti Xuebao9 [1988] 308/11 from C.A. 110 [1989] No. 86438).Google Scholar
  62. [62]
    Shikada, S. (Japan. Kokai Tokkyo Koho 61–295626 [1986] from C.A. 106 [1987] No. 187499).Google Scholar
  63. [63]
    Eisen, F. H.; Harris, J. S.; Welch, B.; Pashley, R. D.; Sigurd, D.; Mayer, J. W. (Ion Implant. Semicond. Other Mater. Proc. 3rd Intern. Conf., Yorktown Heights, N.Y., 1972 [1973], pp. 631/40; C.A. 81 [1974] No. 178843).Google Scholar
  64. [64]
    Adaka, S.; Miyazaki, M.; Goshima, S.; Mori, M.; Shigata, J.; Kodera, N. (Japan. Kokai Tokkyo Koho 60–257175 [1985] from C.A. 104 [1986] No. 217654).Google Scholar
  65. [65]
    NEC Corp. (Japan. Kokai Tokkyo Koho 60–15978 [1985] from C.A. 103 [1985] No. 46820).Google Scholar
  66. [66]
    Shimazu, M.; Takebe, T.; Murai, S. (Japan. Kokai Tokkyo Koho 61–187329 [1986] from C.A. 106 [1987] No. 42579).Google Scholar
  67. [67]
    Uchitomi, N.; Mizoguchi, T. (Japan. Kokai Tokkyo Koho 63–58877 [1988] from C.A. 109 [1988] No. 161839).Google Scholar
  68. [68]
    Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 57–15418 [1980/82] from C.A. 96 [1982] No. 191684).Google Scholar
  69. [69]
    Kitahara, T.; Yukimoto, T.; Inaba, K. (Japan. Kokai Tokkyo Koho 61–269311 [1986] from C.A. 106 [1987] No. 147919).Google Scholar
  70. [70]
    Bell, E. C; Glaccum, A. E.; Hemment, P. L F.; Sealy, B.J. (Radiât. Eff. 22 [1974] 253/8; C.A. 81 [1974] No. 178810).Google Scholar
  71. [71]
    Rode, A. G.; Verma, K. B. (Proc. Bienn. Cornell Electr. Eng. Conf. 7 [1979] 249/56; C.A. 93 [1980] No. 141786).Google Scholar
  72. [72]
    Aoki, I.; Otsuki, T.; Shimano, A.; Kaneko, H. (Japan. Kokai Tokkyo Koho 61–121328 [1986] from C.A. 105 [1986] No. 217452).Google Scholar
  73. [73]
    Matsushita Electric Industrial Co., Ltd. (Japan. Kokai Tokkyo Koho 59–111372 [1982/84] from C.A. 101 [1984] No. 220912).Google Scholar
  74. [74]
    Matsushita Electric Industrial Co., Ltd. (Japan. Kokai Tokkyo Koho 59–111373 [1982/84] from C.A. 101 [1984] No. 220911).Google Scholar
  75. [75]
    Shikat[d]a, S.; Hayashi, H. (Eur. Appl. 268298 [1986/88]; C.A. 109 [1988] No.181934).Google Scholar
  76. [76]
    Kasahara, J. (Japan. Kokai Tokkyo Koho 63–147372 [1986/88] from C.A. 109 [1988] No. 220932).Google Scholar
  77. [77]
    Schuermeyer, F. L (U.S. 4532695 [1985]; C.A. 103 [1985] No. 152177).Google Scholar
  78. [78]
    Lee, R. E.; Levy, H. M. (PCT Intern. Appl. 85–00077 [1983/85]; C.A. 102 [1985] No. 213801).Google Scholar
  79. [79]
    Kriegel, B.; Mientus, R,; Eichhorn, L; Lentzsch, P.; Kerkow, H. (Ger. [East] 257714 [1987/88]; C.A. 110 [1989] No. 17302).Google Scholar
  80. [80]
    Matsushita Electric Industrial Co., Ltd. (Japan. Kokai Tokkyo Koho 59–141 272 [1983/84] from C.A. 102 [1985] No. 71 200).Google Scholar
  81. [81]
    Matsushita Electric Industrial Co., Ltd. (Japan. Kokai Tokkyo Koho 60–68660 [1985] from C.A. 103 [1985] No. 152141).Google Scholar
  82. [82]
    Matsushita Electric Industrial Co., Ltd. (Japan. Kokai Tokkyo Koho 59–225574 [1983/84] from C.A. 102 [1985] No. 230380).Google Scholar
  83. [83]
    NEC Corp. (Japan. Kokai Tokkyo Koho 59–184572 [1983/84] from C.A. 102 [1985] No. 124072).Google Scholar
  84. [84]
    Stoneham, E.; Tan, T. S.; Gladstone, J. (Tech. Dig. Intern. Electron Devices Meeting 1977 330/3 from C.A. 89 [1978] No. 224900).Google Scholar
  85. [85]
    Immorlica, A. A.; Ch’en, D. R.; Decker, D. R.; Fairman, R. D. (Proc. Bienn. Cornell Electr. Eng. Conf. 7 [1979] 267/74; C.A. 93 [1980] No. 141 788).Google Scholar
  86. [86]
    Pettenpaul, E.; Huber, J.; Weidlich, H. (Ger. Offen. 3005733 [1980/81] from C.A. 95 [1981] No. 143101).Google Scholar
  87. [87]
    NEC Corp. (Japan. Kokai Tokkyo Koho 59–99775 [1982/84] from C.A. 101 [1984] No. 202668).Google Scholar
  88. [88]
    Hitachi Ltd. (Japan. Kokai Tokkyo Koho 58–130533 [1982/83] from C.A. 99 [1983] No. 204599).Google Scholar
  89. [89]
    McLevige, W. V. (U.S. 4711701 [1987]; C.A. 108 [1988] No. 67308).Google Scholar
  90. [90]
    Gleason, K. R.; Dietrich, H. B.; Henry, R. L; Cohen, E. D.; Bark, M. L (Appl. Phys. Letters 32 [1978] 578/81).CrossRefGoogle Scholar
  91. [91]
    Nissim, Y.; Bensoussan, M. (Eur. Appl. 266268 [1988]; C.A. 109 [1988] No. 181890).Google Scholar
  92. [92]
    Bayraktaroglu, B.; Johnson, R. L. (J. Appl. Phys. 52 [1981] 3515/9).CrossRefGoogle Scholar
  93. [93]
    Liu, E. (Xi’an Jiaotong Daxue Xuebao 21 [1987] 69/78 from C.A. 108 [1988] No. 86018).Google Scholar
  94. [94]
    Gaonach, C; Tardella, A. (Vide Couches Minces 43 [1988] 281/3; C.A. 109 [1988] No. 46664).Google Scholar
  95. [95]
    Petruchuk, 1.1.; Surin, Yu. V. (Elektron. Tekhn. Nauchn. Tekh. Sb. Mikroelektron. 1971No. 3, pp. 88/91 from C.A. 77 [1972] No. 67644).Google Scholar
  96. [96]
    Adamcik, I. (Tesla Electron. 18 [1985] 10/5 from C.A. 105 [1986] No. 89414).Google Scholar
  97. [97]
    Aigo, T. (Japan. Kokai Tokkyo Koho 63–281471 [1987/88] from C.A. 110 [1989] No. 204074).Google Scholar
  98. [98]
    Senoshenko, O. V.; Maronchuk, Yu. E. (Izv. Vysshikh Uchebn. Zaved. Fiz. 16 No. 5 [1973] 59/64;Google Scholar
  99. [98A]
    Senoshenko, O. V.; Maronchuk, Yu. E. Soviet Phys.-J. 16 [1973] 641/5).Google Scholar
  100. [99]
    Sakalas, A.; Zukauskas, S. (Solid State Commun. 70 [1989] 363/5).CrossRefGoogle Scholar
  101. [100]
    Harrison, A. J.; Adama-Acquah, R. W.; Swanson, J. G. (Insul. Films Semicond. Proc. Intern. Conf. INFOS 85 [1985] 65/9; C.A. 104 [1986] No. 160316).Google Scholar
  102. [101]
    Foster, J. E.; Swartz, J. M. (J. Electrochem. Soc. 117 [1970] 1410/7).Google Scholar
  103. [102]
    Harrison, A. J.; Swanson, J. G. (Electron. Letters 21 [1985] 976/8; C.A. 103 [1985] No. 225333).CrossRefGoogle Scholar
  104. [103]
    Klose, H.; Maronchuk, Y. E.; Senochenko, O. V. (Phys. status solidi (a) 21 [1974] 659/64; C.A. 80 [1974] No. 113749).Google Scholar
  105. [104]
    Chang, E. Y.; Cibuzar, G. T.; Pande, K. P. (IEEETrans. Electron Devices 35 [1988] 1412/8; C.A. 109 [1988] No. 220477).Google Scholar
  106. [105]
    Chang, E. Y.; Cibuzar, G. T.; Yard, T. K.; Pande, K. P. (Mater. Res. Soc. Symp. Proc. 126 [1988] 271/6; C.A. 110 [1989] No. 32105).CrossRefGoogle Scholar
  107. [106]
    Chang, E. Y.; Cibuzar, G. T.; Vanhove, J. M.; Nagarajan, R. M.; Pande, K. P. (Appl. Phys. Letters 53 [1988] 1638/40).Google Scholar
  108. [107]
    Tanho, T.; Ishikawa, O.; Ban, Y.; Tsujii, H. (Japan. Kokai Tokkyo Koho 63–228760 [1988] from C.A. 110 [1989] No. 68084).Google Scholar
  109. [108]
    Ohnstein, T. R. (Diss. Univ. Minnesota 1982,185 pp. from Diss. Abstr. Intern. B 43 [1982] 2661; C.A. 98 [1983] No. 153386).Google Scholar
  110. [109]
    Taillepied, M.; Gourrier, S. (Appl. Phys. Letters 48 [1986] 978/80).CrossRefGoogle Scholar
  111. [110]
    Taillepied, M.; Gourrier, S.; Chane, J. P. (Insul. Films Semicond. Proc. Intern. Conf. INFOS 85 [1985] 85/8; C.A. 104 [1986] No. 160320).Google Scholar
  112. [111]
    Barrier, J.; Boher, P.; Renaud, M. (Appl. Phys. Letters 53 [1988] 1192/4).CrossRefGoogle Scholar
  113. [112]
    Erman, M.; Renaud, M.; Gourrier, S. (Japan. J. Appl. Phys. 26 Suppl. 1 [1987] 1891/7).Google Scholar
  114. [113]
    Richard, P. D.; Markunas, R. J.; Lucovsky, G.; Fountain, G. G.; Mansour, A. N.;Tsu, D. V. (J. Vac. Sei. Technol. [2] A 3 [1985] 867/72).Google Scholar
  115. [114]
    O’Connor, P.; Pearsall, T. P.; Cheng, K. Y.; Cho, A. Y.; Hwang, J. C. M.; Alavi, K. (IEEE Electron Device Letters EDL-3 [1982] 64/6; C.A. 97 [1982] No. 173272).Google Scholar
  116. [115]
    Liao, A. S. H.; Leheny, R. F.; Nahory, R. E.; De Winter, J. C. (IEEE Electron Device Letters EDL-2 [1981] 288/90; C.A. 95 [1981] No. 230537).Google Scholar
  117. [116]
    Hasegawa, H.; Akazawa, M.; Matsuzaki, K.; Ishii, H.; Ono, H. (Japan. J. Appl. Phys. 27 Pt.2[1988] L2265/L2267).Google Scholar
  118. [117]
    Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 58–164269 [1982/83] from C.A. 100 [1984] No. 44045).Google Scholar
  119. [118]
    Hasegawa, H.; Ono, H.; Shimotsuma, M.; Sawada, T.; Tagashira, H. (Japan. Kokai Tokkyo Koho 61–84836 [1986] from C.A. 105 [1986] No. 144087).Google Scholar
  120. [119]
    Iwamatsu, S. (Japan. Kokai Tokkyo Koho 60–239062 [1985] from C.A. 104 [1986] No. 160553).Google Scholar
  121. [120]
    Young, P. G.; Kapoor, V. J. (Proc. Electrochem. Soc. 88–15 [1988] 151/79; C.A. 109 [1988] No. 220482).Google Scholar
  122. [121]
    Pantic, D. M.; Kapoor, V. J.; Young, P. G.; Williams, W. D.; Dickman, J. E. (Proc. Electrochem. Soc. 88–15 [1988] 187/202; C.A. 109 [1988] No. 241827).Google Scholar
  123. [122]
    Cameron, D. C; Irving, L D.; Whitehouse, C. R.; Woodward, J.; Brown, G. T.; Cockayne, B. (Thin Solid Films 103 [1983] 61/70).CrossRefGoogle Scholar
  124. [123]
    Woodward, J.; Cameron, D.; Irving, R. (RSRE Newsletter Res. Rev. No. 4 [1980] 30–1/30–6; C.A. 94 [1981] No. 218436).Google Scholar
  125. [124]
    Ullrich, B.; Kuchar, F.; Meisels, R.; Olcaytug, F.; Jachimowicz, A. (Thin Solid Films 168 [1989] 157/63).CrossRefGoogle Scholar
  126. [125]
    Dohsen, M.; Kasahara, J.; Kato, Y.; Watanabe, N. (IEEE Electron Device Letters EDL-2 [1981] 157/8; C.A. 95 [1981] No. 107216).Google Scholar
  127. [126]
    Endo, M.; Hori, Y.; Yoshida, T.; Doi, K.; Yatani, M. (Japan. Kokai Tokkyo Koho 63–200525 [1988] from C.A. 110 [1989] No. 17279).Google Scholar
  128. [127]
    Kamitake, K. (Japan. Kokai Tokkyo Koho 60–165764 [1985] from C.A. 104 [1986] No. 80501).Google Scholar
  129. [128]
    Kasahara, K. (Japan. Kokai Tokkyo Koho 62–141781 [1987] trom C.A. 107 [1987] No. 167064).Google Scholar
  130. [129]
    NEC Corp. (Japan. Kokai Tokkyo Koho 59–110171 [1982/84] from C.A. 101 [1984] No. 202679).Google Scholar
  131. [130]
    NEC Corp. (Japan. Kokai Tokkyo Koho 59–117172 [1984] from C.A. 102 [1985] No. 54696).Google Scholar
  132. [131]
    NEC Corp. (Japan. Kokai Tokkyo Koho 59–127875 [1983/84] from C.A. 102 [1985] No. 16108).Google Scholar
  133. [132]
    Hairi, I. (Japan. Kokai Tokkyo Koho 63–224263 [1988] from C.A. 110 [1989] No. 68063).Google Scholar
  134. [133]
    Matsushita Electric Industrial Co., Ltd. (Japan. Kokai Tokkyo Koho 60–58678 [1985] from C.A. 103 [1985] No. 133426).Google Scholar
  135. [134]
    Hitachi Ltd. (Japan. Kokai Tokkyo Koho 59–217373 [1984] from C.A. 102 [1985] No. 213767).Google Scholar
  136. [135]
    NEC Corp. (Japan. Kokai Tokkyo Koho 59–224176 [1983/84] from C.A. 103 [1985] No. 15524).Google Scholar
  137. [136]
    NEC Corp. (Japan. Kokai Tokkyo Koho 59–224177 [1983/84] from C.A. 103 [1985] No. 15515).Google Scholar
  138. [137]
    NEC Corp. (Japan. Kokai Tokkyo Koho 59–136975 [1983/84] from C.A. 102 [1985] No. 38071).Google Scholar
  139. [138]
    Hitachi Ltd. (Japan. Kokai Tokkyo Koho 59–50567 [1982/84] from C.A. 101 [1984] No. 102434).Google Scholar
  140. [139]
    Maejima, T. (Japan. Kokai Tokkyo Koho 63–15417 [1988] from C.A. 109 [1988] No. 65431).Google Scholar
  141. [140]
    Mitsubishi Electric Corp. (Japan. Kokai Tokkyo Koho 59–231873 [1983/84] from C.A. 103 [1985] No. 15491).Google Scholar
  142. [141]
    Nagarajan, R. M.; Rask, S. D.; King, M. R.; Yard, T. K. (Proc. SPIE-Intern. Soc. Opt. Eng. No. 923 [1988] 194/200; C.A. 109 [1988] No. 119470).Google Scholar
  143. [142]
    Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 57–124443 [1981/82] from C.A. 98 [1983] No. 10479).Google Scholar
  144. [143]
    Mitsubishi Electric Corp. (Japan. Kokai Tokkyo Koho 57–172720 [1981/82] from C.A. 98 [1983] No. 117549).Google Scholar
  145. [144]
    Oki Electric Industry Co., Ltd. (Japan. Kokai Tokkyo Koho 59–165462 [1983/84] from C.A. 102 [1985] No. 124026).Google Scholar
  146. [145]
    Oki Electric Industry Co., Ltd. (Japan. Kokai Tokkyo Koho 59–165464 [1983/84] from C.A. 102 [1985] No. 124031).Google Scholar
  147. [146]
    Oki Electric Industry Co., Ltd. (Japan. Kokai Tokkyo Koho 58–52879 [1981/83] from C.A. 99 [1983] No. 46705).Google Scholar
  148. [147]
    Oki Electric Industry Co., Ltd.; Ono, K. (Japan. Kokai Tokkyo Koho 59–165461 [1983/84] from C.A. 102 [1985] No. 124025).Google Scholar
  149. [148]
    Katano, F. (Japan. Kokai Tokkyo Koho 61–220477 [1986] from C.A. 106 [1987] No. 77144).Google Scholar
  150. [149]
    Nagahama, K. (Japan. Kokai Tokkyo Koho 61–70761 [1986] from C.A. 105 [1986] No. 106845).Google Scholar
  151. [150]
    Ike, M.; Takahashi, S.; Nagayama, H.; Nonaka, T. (Japan. Kokai Tokkyo Koho 62–132327 [1987] from C.A. 107 [1987] No. 145779).Google Scholar
  152. [151]
    Nishii, K. (Japan. Kokai Tokkyo Koho 61–6870 [1986] from C.A. 104 [1986] No. 235646).Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1991

Authors and Affiliations

  • Eberhard F. Krimmel
    • 1
  • Rudolf Hezel
    • 2
  • Uwe Nohl
    • 3
  • Rainer Bohrer
    • 3
  1. 1.Universität Frankfurt/MainGermany
  2. 2.Universität ErlangenNürnbergGermany
  3. 3.Gmelin InstituteFrankfurt/MainGermany

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