Abstract
Charge-coupled devices (CCD) are applied to integrate circuits for signal processing, optical imaging, and computer memory. The device consists of an input element for injecting a controlled charge into the main part, an array of MIS capacitors used in the dynamic operation mode, and a sensor device registering the charge arriving at the end of the array. Charge losses must be minimized. This imposes severe requirements on the quality of the gate insulator.
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Krimmel, E.F., Hezel, R., Nohl, U., Bohrer, R. (1991). Charge-Coupled Devices (CCDs). In: Pebler, A., Schröder, F. (eds) Si Silicon. Si. Silicium. Silicon (System-Nr. 15), vol S-i / B / 1-5 / 5 / c. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-09901-8_14
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DOI: https://doi.org/10.1007/978-3-662-09901-8_14
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