Abstract
Various SMA microactuators have been developed since the introduction of SMAs in microsystems technology at the beginning of the nineties. The SMA microvalves and linear actuators discussed in detail in this book show promising specifications reflecting the advances in the fields of material development, modeling, actuator design, micromachining, and system integration. These microactuators are not well engineered products but prototypes that have been fabricated in small quantities. Generally speaking, SMA microactuators are in an early development stage. The progress made so far already demonstrates, however, that SMA microactuators have a large potential for innovation and may contribute significantly to future developments in microsystems technology.
Now, you might say, “Who should do this and why should they do it?” Well, I pointed out a few of the economic applications, but I know that the reason that you would do it might be just for fun.
-R.P. Feynman in There’s Plenty of Room at the Bottom
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© 2004 Springer-Verlag Berlin Heidelberg
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Kohl, M. (2004). Summary. In: Shape Memory Microactuators. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-09875-2_7
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DOI: https://doi.org/10.1007/978-3-662-09875-2_7
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-05837-0
Online ISBN: 978-3-662-09875-2
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