Abstract
In terms of identifying applications of SMA microactuators the field of microfluidics appears to be particularly promising. An approach to the development of SMA microvalves is described in the following. It is based on hybrid integration of micromachined SMA foils and thin films with optimized lateral shape. Recent publications on this subject can be found in Refs. [186, 199, 206, 220, 249–260].
Cui bono? (What is the good of it?)
—Marcus Tullius Cicero
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© 2004 Springer-Verlag Berlin Heidelberg
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Kohl, M. (2004). SMA Microvalves. In: Shape Memory Microactuators. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-09875-2_5
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DOI: https://doi.org/10.1007/978-3-662-09875-2_5
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-05837-0
Online ISBN: 978-3-662-09875-2
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