Shape Memory Actuation

  • Manfred Kohl
Part of the Microtechnology and MEMS book series (MEMS)


Actuator development requires appropriate simulation tools and optimization methods as well as a systematic actuator design. Furthermore, technologies of sufficient precision and flexibility are needed to manufacture SMA actuators. Conventional NiTi actuators mostly consist of semi-products such as wires or plates, due to the bad material-cutting properties. Through the use of microtechnologies, however, microactuators with much higher geometrical complexity can be produced. The transition to SMA microactuation, therefore, results in a modified approach to actuator development. First, the aspects of simulation and optimization will be discussed. Then, the design of SMA microactuators and technological aspects will be addressed.


Shape Memory Effect Finite Element Method Simulation Finite Element Method Analysis Valve Seat Martensitic Condition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer-Verlag Berlin Heidelberg 2004

Authors and Affiliations

  • Manfred Kohl
    • 1
  1. 1.Institut für MikrostrukturtechnikForschungszentrum KarlsruheKarlsruheGermany

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