Zusammenfassung
Die Reinstmedientechnik als Teilgebiet der Reinraumtechnik beschäftigt sich mit der Ver- und Entsorgung von Prozessgeräten mit Prozessmedien hoher und hñchster Reinheit, einschl. des Recyclings und anderweitiger Wiedernutzbarmachung von Ressourcen (Abb. 9.1).
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Gail, L., Hortig, HP. (2004). Ver- und Entsorgung von Reinstmedien. In: Gail, L., Hortig, HP. (eds) Reinraumtechnik. VDI-Buch. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-09732-8_9
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DOI: https://doi.org/10.1007/978-3-662-09732-8_9
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