Zusammenfassung
Um eine mikroelektronische Schaltung zu fertigen, müssen verschiedene geometrische Strukturen nacheinander auf der Scheibenoberfläche erzeugt werden. Zum Beispiel müssen elektrisch aktive Gebiete von inaktiven Gebieten getrennt werden, die Steuerelektrode eines Transistors muß richtig plaziert sein und genau die richtige Breite haben, und am Ende des Fertigungsprozesses müssen alle Schaltungselemente durch Leiterbahnen miteinander verbunden werden. Die Größen dieser Strukturen liegen im Bereich einiger µm, wobei der Zwang zur fortschreitenden Verkleinerung der Schaltungselemente bereits zu Strukturen von nur noch 1 µm Breite oder sogar darunter geführt hat.
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Fock, J.H., Fehling, H. (1991). Strukturerzeugung. In: Prozeßtechnologie. Mikroelektronik. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-09540-9_4
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