High Resolution Microellipsometry
Optical inspection and metrology are widely used in materials diagnostics and characterization. From the simple qualitative information obtained from imaging and phase contrast optics to the highly precise measurements provided by interferometry, polarimetry, and ellipsometry, optical techniques have been instrumental in advancing the state-of-the-art in materials science, microelectronics, biology, and many other disciplines . The non-destructive nature of most optical measurements and their inherent simplicity have made them valuable to modern research and fabrication.
KeywordsObjective Lens Ratio Signal High Numerical Aperture Polarize Incident Light Radial Analyzer
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