Abstract
Electrochemical etching of semiconductors, beside technical applications, provides an interesting experimental setup for self-organized structure formation capable of regular, diameter-modulated, and branching pores. The underlying dynamical processes governing current transfer and structure formation are described by the Current-Burst-Model: all dissolution processes are assumed to occur inhomogeneously in time and space as a Current Burst (CB); properties and interactions between CB’s are described by a number of material- and chemistry-dependent ingredients, like passivation and aging of surfaces in different crystallographic orientations, giving a qualitative understanding of resulting pore morphologies.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Yablonovich, E., Allara, D. L., Chang, C. C., Gmitter,T., Bright, T. B.: Phys. Rev. Lett., 57, 249 (1986)
Föll, H., Appl. Phys. A 53, 8 (1991)
Smith, R. L., Collins, S. D., J. Appl. Phys., 71, R1 (1992)
Carstensen, J., Christophersen, M., Föll, H.: Mat. Sci. Eng. B, 69, 23 (2000)
Carstensen, J., Prange, R., Popkirov, G., Föll, H.: Appl. Phys. A 67, 459 (1998)
Carstensen, J., Prange, R., Föll, H.: in: Proc ECS San Diego 1998, 98 148
Carstensen, J., Prange, R., Föll, H.: J. Electrochem. Soc. 146 (3), (1999) 1134
Propst, E. K., Kohl, P. A.: J. Electrochem. Soc., 141, (1994) 1006
Ponomarev, E. A., Levy-Clement, C.: J. Electrochem. Soc. Lett., 1, (1998) 1002
Föll, H., Carstensen, J., Christophersen, M., Hasse, G.: in: Proc. ECS 2001
Christophersen, M., Carstensen, J., Föll, H.: Phys. Stat. Sol. (a) 182, 45 (2000)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2003 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Claussen, J.C., Carstensen, J., Christophersen, M., Langa, S., Föll, H. (2003). Self-Organized Formation of Fractal and Regular Pores in Semiconductors. In: Emmerich, H., Nestler, B., Schreckenberg, M. (eds) Interface and Transport Dynamics. Lecture Notes in Computational Science and Engineering, vol 32. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-07969-0_7
Download citation
DOI: https://doi.org/10.1007/978-3-662-07969-0_7
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-07320-5
Online ISBN: 978-3-662-07969-0
eBook Packages: Springer Book Archive