Abstract
Electron microscopy with fast electrons has reached a high state of sophistication allowing not only structural imaging with atomic resolution but also chemical analysis in the sub-nanometre range and magnetic imaging with Lorentz microscopy and holography below ten nonometres. These possibilities are due to the strong elastic forward scattering, to the signal accumulation along the path of the electron and to the small aberrations of the employed electron optical elements. In surface imaging, the signal must come from a small depth and fast electrons are useful in only a few imaging modes that emphasize the surface features. Examples are weak-beam imaging, secondary electron emission microscopy and reflection electron microscopy, the last being the most versatile.
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Bauer, E., Schmidt, T. (2003). Multi-Method High-Resolution Surface Analysis with Slow Electrons. In: Ernst, F., Rühle, M. (eds) High-Resolution Imaging and Spectrometry of Materials. Springer Series in Materials Science, vol 50. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-07766-5_8
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DOI: https://doi.org/10.1007/978-3-662-07766-5_8
Publisher Name: Springer, Berlin, Heidelberg
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