Quantitative Analytical Transmission Electron Microscopy

  • P. Kohler-Redlich
  • J. Mayer
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 50)


Over the past decade analytical transmission electron microscopy (ATEM) has experienced a more rapid growth than any other major TEM technique. The main reasons for this development are the growing interest in the wealth of information that can be revealed by electron energy loss spectroscopy (EELS) and the rapid spread of new instrumental developments, in particular field-emission guns and imaging energy filters. One of the trends in transmission electron microscopy is to consider a microscope not primarily as an instrument to obtain micrographs but as an experimental tool on which information from a sample can be obtained via various channels in parallel [1]. The channels are defined by the available detectors, such as two-dimensional detectors for imaging and diffraction, electron counting devices for STEM bright-and dark-field imaging, an electron energy-loss spectrometer and an energy-dispersive X-ray spectrometer (EDS). There are also many competing analytical or spectroscopic techniques (some of which are be discussed in other chapters of this book) that are better in terms of energy resolution, detection limits, error of absolute compositional quantification, angular dependence, retrieval of three-dimensional information and reduction of sample damage due to irradiation. However, none of them offers a spatial resolution comparable to the one obtainable on a TEM, and none of them offers all the other high resolution imaging and diffraction techniques mentioned above.


Diamond Film Electron Energy Loss Spectroscopy Electron Energy Loss Spectroscopy Spectrum Incident Beam Direction Convergent Beam Electron Diffraction Pattern 
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  • P. Kohler-Redlich
  • J. Mayer

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