Models for Resonant Sensors
The quartz crystal resonator (QCR), as its acronym implies, is a resonant physical device. Many of its behaviors and properties can be understood physically by examining its resonant behavior. The basic principle of operation for a generic acoustic-wave sensor is a traveling wave combined with a confinement structure to produce a standing wave whose frequency is determined jointly by the velocity of the traveling wave and the dimensions of the confinement structure. The most basic way of resonator modeling consequently requires applying the theory of wave propagation whereby considering material properties and geometric dimensions of the resonator. As another successful way, there is an electrical equivalent circuit often used to characterize the resonance. For these reasons, a closer inspection of the phenomenon of resonance is useful.
KeywordsAcoustic Wave Quartz Crystal Transmission Line Model Acoustic Wave Propagation Quartz Resonator
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- 1.R.D. Mindlin, “High frequency vibrations of plated crystal plates”, Progr. Appl. Mech., (1963), 73 – 84.Google Scholar
- 2.H. Tiersten, “Linear piezoelectric plate vibrations”, Plenum Press, New York, 1969.Google Scholar
- 4.G.S. Kino, “Acoustic Waves: Devices, Imaging and Analog Signal Processing”, Englewood Cliffs, N.J.: Prentice-Hall, 1987.Google Scholar
- 5.H. Nowotny and E. Benes, “General one-dimensional treatment of the layered piezoelectric resonator with two electrodes,” J. Acoust. Soc. Am., 82 (1987), 513 – 521. C. Behling, “The non-gravimetric response of thickness shear mode resonators for sensor applications” ShakerVerlag, Aachen (1999)Google Scholar
- 8.C. Behling, R. Lucklum, and P. Hauptmann, “Possibilities and limitations in quantitative determination of polymer shear parameters by TSM resonators,” Sensors and Actuators, A 61 (1997), 260 – 266.Google Scholar
- 15.R. Lucklum, P. Hauptmann, “The quartz crystal microbalance: Mass sensitivity, viscoelasticity and acoustic amplification”, Sensors Actuators B 70/1-3 (2000), 30 – 36.Google Scholar
- 17.R. Lucklum, P. Hauptmann, “Transduction meachanism of acoustic-wave based chemical and biochemical sensors”, Meas. Sci. Techn. (2003), 1854–1864Google Scholar