Skip to main content

Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 23))

Abstract

The detection and energy analysis of photoelectrons produced by radiation whose energy exceeds their binding energies is the subject of an extensively-used technique known as Photoelectron (PE) Spectroscopy. This technique can be conveniently divided into two broad areas, the first employing ultraviolet radiation, hence called Ultraviolet Photoelectron Spectroscopy (UPS), and the second using X-rays, termed X-ray Photoelectron Spectroscopy (XPS). The latter spectroscopy is the subject of this present chapter, while UPS is discussed in Chap. 14.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 54.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. J.G. Jenkin, R.C.G. Leckey, J. Liesegang: J. Electron Spectrosc. 12, 1 (1977)

    Article  CAS  Google Scholar 

  2. J.G. Jenkin, J.D. Riley, J. Liesegang, R.C.G. Leckey: J. Electron Spectrosc. 14, 477 (1978)

    Article  CAS  Google Scholar 

  3. J.G. Jenkin, J. Liesegang, R.C.G. Leckey, J.D. Riley: J. Electron Spectrosc. 15, 307 (1979)

    Article  CAS  Google Scholar 

  4. J.G. Jenkin: J. Electron Spectrosc. 23, 187 (1981)

    Article  CAS  Google Scholar 

  5. K. Siegbahn, C. Nordling, A. Fahlman, R. Nordberg, K. Hamrin, J. Hedman, G. Johansson, T. Bergmark, S.-E. Karlsson, I. Lindgren, B. Lindgren: ESCA: Atomic, Molecular and Solid State Structure Studied by Means of Electron Spectroscopy (Almqvist & Wiksells, Stockholm 1967)

    Google Scholar 

  6. K. Siegbahn, G. Nordling, G. Johansson, J. Hedman, P.F. Heden, K. Hamrin, U. Gelius, T. Bergmark, L.O. Werme, R. Manne, Y. Baer: ESCA Applied to Free Molecules (North-Holland, Amsterdam 1969)

    Google Scholar 

  7. M.H. Kibel: X-Ray Spectrometry 19, 73 (1990)

    Article  CAS  Google Scholar 

  8. J. Chastien (Ed.): Handbook of X-Ray Photoelectron Spectroscopy (Perkin-Elmer Corp., 1992)

    Google Scholar 

  9. D. Briggs, M.P. Seah (Eds): Practical Surface Analysis by Auger and Photo-electron Spectroscopy (Wiley, New York 1983) Appendix 6

    Google Scholar 

  10. J.B. Lumsden: In Metals Handbook, 9th edn. Vol. 10 (1986) pp. 568–580

    Google Scholar 

  11. J.E. Castle, L.B. Hazell, R.H. West: J. Electron Spectrosc. 16, 97 (1979)

    Article  CAS  Google Scholar 

  12. M.A. Kelly, C.E. Tyler: Hewlett-Packard Journal 24, 2 (1972)

    Google Scholar 

  13. D.E. Golden, A. Zecca: Rev. Sci. Instr. 42, 210 (1971)

    Article  CAS  Google Scholar 

  14. J.D. Lee: Rev. Sci. Instr. 43, 1291 (1972)

    Article  Google Scholar 

  15. F.J. Leng, G.L. Nyberg: J. Phys. E. 10, 686 (1977)

    Article  CAS  Google Scholar 

  16. R.G. Dromey, J.B. Peel: Aust. J. Chem. 28, 2353 (1975)

    Article  CAS  Google Scholar 

  17. D. Roy, J.-D. Carette: Canadian J. Phys. 49, 2138 (1971)

    Article  Google Scholar 

  18. J.C. Riviere: In Practical Surface Analysis by Auger and X-Ray Photoelectron Spectroscopy, ed. by D. Briggs, M.P. Seah (Wiley, New York 1983) Chap. 2

    Google Scholar 

  19. A. Barrie: In Handbook of X-Ray and and Ultraviolet Photoelectron Spectroscopy ed. by D. Briggs (Heyden & Sons, London 1977) Chap. 2

    Google Scholar 

  20. C. Klauber: Microbeam Analysis 4, 341 (1995)

    CAS  Google Scholar 

  21. I.W. Drummond: Phil. Trans. R. Soc. Lond. A 354, 2667 (1996)

    Article  CAS  Google Scholar 

  22. M.P. Seah, G.C. Smith: Surf. Interface Anal. 11, 69 (1988)

    Article  CAS  Google Scholar 

  23. I.W. Drummond, T.A. Cooper, F.J. Street: Spectrochimica Acta 40B, 801 (1985)

    Article  Google Scholar 

  24. R.L. Chaney: Surf. Interface Anal. 10, 36 (1987)

    Article  CAS  Google Scholar 

  25. A.R. Walker: A charged particle energy analyser, European Patent Specification, Publication no. 0 243 060 Bl, European Patent Office (1991)

    Google Scholar 

  26. G. Beamson, H.Q. Porter, D.W. Turner: Nature 290, 556 (1981)

    Article  CAS  Google Scholar 

  27. D.W. Turner, LR. Plummer, H.Q. Porter: Phil. Trans. R. Soc. Lond. A 318, 219 (1986)

    Article  CAS  Google Scholar 

  28. P. Coxon, J. Krizek, J. Humpherson, I.R.M. Wardell: J. Electron Spectrosc. 52, 821 (1990)

    Article  CAS  Google Scholar 

  29. P.E. Larson, P.W. Palmberg: Scanning and high resolution X-ray photo electron spectroscopy and imaging, European Patent Specification, Publication no. 0 590 308 A2, European Patent Office (1994)

    Google Scholar 

  30. H.W. Ade, J. Kirz, S.L. Hulbert, E.D. Johnson, E. Anderson, D. Kern: Appl. Phys. Lett 56, 1841 (1990)

    Article  CAS  Google Scholar 

  31. U. Gelius, B. Wannberg, P. Baltzer, H. Fellner-Feiegg, G. Carlsson, C.-G. Johansson, J. Larsson, P. Münger, G. Vegefors: J. Electron Spectrosc. 52, 747 (1990)

    Article  CAS  Google Scholar 

  32. P.J.C. Chappell, M.H. Kibel, B.G. Baker: J. Catalysis 110, 139 (1988)

    Article  CAS  Google Scholar 

  33. CD. Wagner: Anal. Chem. 47, 1201 (1975)

    Article  CAS  Google Scholar 

  34. CD. Wagner, L.H. Gale, R.H. Raymond: Anal. Chem. 51, 466 (1979)

    Article  CAS  Google Scholar 

  35. R.H. West, J.E. Castle: Surf. Interface Anal. 4, 68 (1982)

    Article  CAS  Google Scholar 

  36. J.C Riviere, J.A. Crossley, B.A. Sexton: J. Appl. Phys. 64, 4585 (1986)

    Article  Google Scholar 

  37. M.H. Kibel, CG. Kelly: Materials Aust. 19(10), 15 (1987)

    CAS  Google Scholar 

  38. CD. Wagner, D.E. Passoja, H.F. Hillery, T.G. Kinisky, H.J.A. Six, W.T. Jansen, J.A. Taylor: J. Vac. Sci. Technol. 21, 933 (1982)

    Article  CAS  Google Scholar 

  39. A. D’Agnano, M. Gargano, C. Malitesta, N. Ravasio, L. Sabbatini: J. Electron Spectrosc. 53, 213 (1991)

    Article  Google Scholar 

  40. R. Alfonsetti, G. De Simone, L. Lozzi, M. Passacantando, P. Picozzi, S. San-tucci: Surf. Interface Anal. 22, 89 (1994)

    Article  CAS  Google Scholar 

  41. M.H. Kibel, P.W. Leech: Surf. Interface Anal. 24, 605 (1996)

    Article  CAS  Google Scholar 

  42. M. Scrocco: Chem. Phys. Lett. 63, 52 (1979)

    Article  CAS  Google Scholar 

  43. J.M. Ritchie: Phys. Rev. 106, 874 (1957)

    Article  CAS  Google Scholar 

  44. A. Barrie: Chem. Phys. Lett. 19, 109 (1973)

    Article  CAS  Google Scholar 

  45. B.A. Sexton: Materials Forum 10, 134 (1987)

    CAS  Google Scholar 

  46. P.W. Leech, P.J. Gwynn, M.H. Kibel: Appl. Surf. Sci. 37, 291 (1989)

    Article  CAS  Google Scholar 

  47. P.W. Leech, M.H. Kibel, P.J. Gwynn: J. Electrochem. Soc. 137, 705 (1990)

    Article  CAS  Google Scholar 

  48. A. Ishizaka, S. Iwata: Appl. Phys. Lett. 36, 71 (1980)

    Article  CAS  Google Scholar 

  49. B.L. Maschhoff, K.R. Zavadil, K.W. Nebesny, N.R. Armstrong: J. Vac. Sci. Technol. A 6, 907 (1988)

    Article  CAS  Google Scholar 

  50. D.E. Fowler, J. Rogozik: J. Vac. Sci. Technol. A 6, 928 (1988)

    Article  CAS  Google Scholar 

  51. T. Czeppe, P. Nowak: Materials Sci. Forum 25/26, 525 (1988)

    Article  Google Scholar 

  52. T.M.H. Saber, A.A. El-Warraky: J. Mater Sci. 23, 1496 (1988)

    Article  CAS  Google Scholar 

  53. E. Paparazzo: Surf. Interface Anal. 12, 115 (1988)

    Article  Google Scholar 

  54. E.W.A. Young, J.C. Riviere, L.S. Welch: Appl. Surf. Sci. 28, 71 (1987)

    Article  CAS  Google Scholar 

  55. N.S. McIntyre: In Practical Surface Analysis by Auger and Photoelectron Spectroscopy, ed. by D. Briggs, M.P. Seah (Wiley, New York 1983) Chap. 10, p. 397 and references therein

    Google Scholar 

  56. D. Landolt: Surf. Interface Anal. 15, 395 (1990)

    Article  CAS  Google Scholar 

  57. P.M.A. Sherwood: Anal. Chim. Acta 283, 52 (1993)

    Article  CAS  Google Scholar 

  58. M.F. Guimon, G. Pfister-Guillouzo, M. Bremont, W. Brockmann, C. Quet, J.Y. Chenard: Appl. Surf. Sci. 108, 149 (1997)

    Article  CAS  Google Scholar 

  59. M. Ben-Haim, U. Atzmony, N. Shamir: Corrosion Sci. 44, 461 (1988)

    Article  CAS  Google Scholar 

  60. K.L. Rhodes, P.C. Stair: J. Vac. Sci. Technol. A 6, 971 (1988)

    Article  CAS  Google Scholar 

  61. J.C. Langevoort, I. Sutherland, L.J. Hanekamp, P.J. Gellings: Appl. Surf. Sci. 28, 167 (1987)

    Article  CAS  Google Scholar 

  62. F.-M. Pan, P.C. Stair: J. Vac. Sci. Technol. A 5, 1036 (1987)

    Article  CAS  Google Scholar 

  63. R.J. Bird: Metal Sci. J. 7, 109 (1973)

    CAS  Google Scholar 

  64. H.J. Brabke: Surf. Interface Anal. 14, 686 (1989)

    Article  Google Scholar 

  65. J. Jedlinski, A. Glazkov, M. Konopka, G. Borchardt, E. Tscherkasova, M. Bronfin, M. Nocun: Appl. Surf. Sci. 103, 205 (1996)

    Article  CAS  Google Scholar 

  66. I. Milosev, H.-H. Strehblow, B. Navinsek: Surf. Interface Anal. 26, 242 (1998)

    Article  CAS  Google Scholar 

  67. S. Akhter, X.-L. Zhon, J.M. White: Appl. Surf. Sci. 37, 201 (1989)

    Article  CAS  Google Scholar 

  68. J.G. Clabes, M.J. Goldberg, A. Viehbeck, CA. Kovac: J. Vac. Sci. Technol. A 6, 985 (1988)

    Article  CAS  Google Scholar 

  69. H.M Meyer III, S.G. Anderson, Lj. Atanasoska, J.H. Weaver: J. Vac. Sci. Technol. A 6, 1002 (1988)

    Article  Google Scholar 

  70. J.L. Jordan, C.A. Kovac, J.F. Morar, R.A. Pollack: Phys. Rev. B 36, 1369 (1987)

    Article  CAS  Google Scholar 

  71. H. Ohno, T. Ichikawa, N. Shiokawa, S. Ino, H. Iwasaki: J. Mater Sci. 16, 1381 (1981)

    Article  CAS  Google Scholar 

  72. C. Argile, G.E. Rhead: Surface Sci. Rep. 10, 277 (1989)

    Article  CAS  Google Scholar 

  73. W.W. Zhao, F.J. Boerio: Surf. Interface Anal. 26, 316 (1998)

    Article  CAS  Google Scholar 

  74. A.J. Hartmann, R.N. Lamb: Current Opinion in Solid State & Mater. Sci. 2, 511 (1997)

    Article  CAS  Google Scholar 

  75. N. Bertrand, B. Drevillon, A. Gheorghiu, C. Senemaud, L. Martinu, J.E. Klemberg-Sapieha: J. Vac. Sci. Technol. A 16, 6 (1998)

    Article  CAS  Google Scholar 

  76. G. Moretti, G. Fierro, M. Lo Jacono, P. Porta: Surf. Interface Anal. 6, 188 (1980)

    Google Scholar 

  77. T.L. Barr: In Practical Surface Analysis by Auger and X-Ray Photoelectron Spectroscopy, ed. by D. Briggs, M.P. Seah (Wiley, New York 1983) Chap. 8 p. 283 and refences therein

    Google Scholar 

  78. J.S. Brinen: In Applied Surface Analysis ed. by T.L. Barr, L.E. Davis (ASTM, Philadelphia 1978) p. 24

    Google Scholar 

  79. J. Grimblot, L. Gengembre, A. D’Huysser: J. Electron Spectrosc. 52, 485 (1990)

    Article  CAS  Google Scholar 

  80. B.G. Baker, Chapter 17, and references therein

    Google Scholar 

  81. F. Gaillard, P. Artizzu, Y. Brullé, M. Primet: Surf. Interface Anal. 26, 242 (1998)

    Article  Google Scholar 

  82. J.H. Thomas III, G. Kaganowicaz, J.W. Robinson: J. Electrochem. Soc. 135, 1201 (1988)

    Article  CAS  Google Scholar 

  83. T. Wada: Appl. Phys. Lett. 52, 1056 (1988)

    Article  CAS  Google Scholar 

  84. R.N.S. Sodhi, W.M. Lan, S.I.J. Ingrey: Surf. Interface Anal. 12, 321 (1988)

    Article  Google Scholar 

  85. C.F. Yu, M.T. Schmidt, D.V. Podlesnik, R.M. Osgood, Jr.: J. Vac. Sci. Technol. B 5, 1087 (1987)

    Article  CAS  Google Scholar 

  86. M.D. Biedenbender, V.J. Kapoor, W.D. Williams: J. Vac. Sci. Technol. A 5, 1437 (1987)

    Article  CAS  Google Scholar 

  87. H.J. Kim, R.F. Davis, X.P. Cox, R.W. Linton: J. Electrochem. Soc. 134, 2269 (1987)

    Article  CAS  Google Scholar 

  88. T. Hattori: J. Vac. Sci. Technol. B 11, 1528 (1993)

    Article  CAS  Google Scholar 

  89. W. Palmer: Surf. Interface Anal. 22, 331 (1994)

    Article  Google Scholar 

  90. L.-Y. Chen, G.W. Hunter, P.G. Neudeck, D. Knight: J. Vac. Sci. Technol. A 16, 2990 (1998)

    Article  Google Scholar 

  91. A. Nelson, S. Glenin, A. Frank: J. Vac. Sci. Technol. A 6, 954 (1988)

    Article  CAS  Google Scholar 

  92. B. Mutel, O. Dessaux, P. Goudmand, J. Grimblot, A. Carpentier, A. Szarzbajnski: Rev. Phys. Appl. 23, 1253 (1988)

    Article  CAS  Google Scholar 

  93. D.T. Clark, D.R. Hutton: J. Polym. Sci. A 25, 2643 (1987)

    Article  CAS  Google Scholar 

  94. T.J. Hook, J.A. Cardella Jr., L. Salvati, Jr.: J. Mater Res. 2, 117 (1987)

    Article  CAS  Google Scholar 

  95. G. Gilberg: J. Adhes. 21, 129 (1987)

    Article  Google Scholar 

  96. D. Briggs: In Practical Surface Analysis by Auger and Photoelectron Spectroscopy ed. by D. Briggs, M.P. Seah (Wiley, New York 1983) Chap. 9, p. 359 and references therein

    Google Scholar 

  97. M.M. Millard: In Industrial Applications of Surface Analysis, ACS Symposium Series, ed. by L.A. Casper, C.J. Powell (Am. Chem. Soc. 1982) Chap. 8, p. 143

    Chapter  Google Scholar 

  98. H.S. Munro, S. Singh: In Polymer Characterisation ed. by B.J. Hunt, M.I. James (Blackie, Glasgow, UK, 1993) pp 333–356

    Chapter  Google Scholar 

  99. F.C. Loh, K.L. Tan, E.T. Kang, K. Kato, Y. Uyama, Y. Ikada: Surf. Interface Anal. 24, 597 (1996)

    Article  CAS  Google Scholar 

  100. R.W. Paynter: Surf. Interface Anal. 26, 674 (1998)

    Article  CAS  Google Scholar 

  101. E.A. Thomas, J.E. Fulghum: J. Vac. Sci. Technol. A 16, 1106 (1998)

    Article  CAS  Google Scholar 

  102. M.A. Barteau, E.I. Koh, R.J. Madix: Surf. Sci. 102, 99 (1981)

    Article  CAS  Google Scholar 

  103. G.A. Sormorjai: Chemistry in Two Dimensions: Surfaces (Cornell University Press, Ithaca 1981)

    Google Scholar 

  104. M.W. Roberts, CS. McKee: Chemistry of the Metal-Gas Interface (Clarendon, Oxford 1981)

    Google Scholar 

  105. M.W. Roberts: Adv. Catal. 29, 55 (1980)

    Article  CAS  Google Scholar 

  106. R. Gomer (Ed.): Interactions on Metal Surfaces (Springer, Berlin, Heidelberg 1975)

    Google Scholar 

  107. CR. Brundle, C.J. Todd (Eds.): Adsorption at Solid Surfaces (North-Holland, Amsterdam 1975)

    Google Scholar 

  108. C Poncey, F. Rochet, G. Dufour, H. Roulet, F. Sirotti, G. Panaccione: Surf. Sci. 338, 143 (1995)

    Article  CAS  Google Scholar 

  109. S.R. Bare, K. Griffiths, W.N. Lennard, H.T. Tang: Surf. Sci. 342, 185 (1995)

    Article  CAS  Google Scholar 

  110. G.C. Allen, K.R. Hallam, J.R. Eastman, G.J. Graveling, V.K. Ragnarsdottir, D.R. Skuse: Surf. Interface Sci. 26, 518 (1998)

    Article  CAS  Google Scholar 

  111. H. Ihara, M. Jo, N. Terada, M. Hirabayashi, H. Oyanagi, K. Murata, Y. Kimura, R. Sugise, I. Hayashida: Physica C 153–155, 131 (1988)

    Article  Google Scholar 

  112. P.C. Healy, S. Myhra, A.M. Stewart: Philos. Mag. B 58, 257 (1988)

    Article  CAS  Google Scholar 

  113. A. Mogro-Campero, L.G. Turner, E.L. Hall, M.C Burrell: Appl. Phys. Lett. 52, 2068 (1988)

    Article  CAS  Google Scholar 

  114. G.G. Peterson, B.R. Weinberger, L. Lynds, H.A. Krasinski: J. Mater. Res. 3, 605 (1988)

    Article  CAS  Google Scholar 

  115. S. Horn, J. Cai, S. Shaheen, CL. Chang, M.L. Den Boer: Rev. Solid State Sci. 1, 411 (1987)

    CAS  Google Scholar 

  116. P. Steiner, R. Courths, V. Kinsinger, I. Sander, B. Siegivart, S. Hüfher, C Politis: Appl. Phys. A 44, 75 (1987)

    Article  Google Scholar 

  117. M.S. Golden, S.J. Golden, R.G. Edgell, W.R. Flavell: J. Mater. Chem. 1, 63 (1991)

    Article  CAS  Google Scholar 

  118. CR. Brundle, D.E. Fowler: Surface Sci. Rep. 19, 143 (1993)

    Article  CAS  Google Scholar 

  119. D. Klissurski, V. Rives: Appl. Catal. A 109, 1 (1994)

    Article  CAS  Google Scholar 

  120. A. Hartmann, G.J. Russell, D.N. Matthews, J.W. Cochrane: Surf. Interface Anal. 24, 657 (1996)

    Article  CAS  Google Scholar 

  121. B.D. Ratner, Cardiovasc. Pathol. 2, 87S (1993)

    Article  Google Scholar 

  122. B.D. Ratner, B.J. Tyler, A. Chilkoti: Clin. Mater. 13, 71 (1993)

    Article  CAS  Google Scholar 

  123. J.C. Lin, S.L. Cooper: Polymer Prepr. (Am. Chem. Soc, Div. Polymer Chem.) 34, 659 (1993)

    CAS  Google Scholar 

  124. D.S. Sutherland, P.D. Forshaw, G.C. Allen, I.T. Brown, K.R. Williams: Bio-materials 14, 893 (1993)

    CAS  Google Scholar 

  125. J. Lausmaa, J. Electron Spectrosc. 81, 343 (1996)

    Article  CAS  Google Scholar 

  126. R.A. Brizzola, J.L. Boyd, A.E. Tate: J. Vac. Sci. Technol. A 15, 773 (1997)

    Article  Google Scholar 

Download references

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2003 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Kibel, M.H. (2003). X-Ray Photoelectron Spectroscopy. In: O’Connor, D.J., Sexton, B.A., Smart, R.S.C. (eds) Surface Analysis Methods in Materials Science. Springer Series in Surface Sciences, vol 23. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-05227-3_7

Download citation

  • DOI: https://doi.org/10.1007/978-3-662-05227-3_7

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-07458-5

  • Online ISBN: 978-3-662-05227-3

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics