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Auger Electron Spectroscopy and Microscopy — Techniques and Applications

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Surface Analysis Methods in Materials Science

Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 23))

Abstract

Auger electron spectroscopy (AES) is one of the most commonly used surface analytical techniques available to the materials scientist. It has the ability to measure the chemical composition of the first few monolayers of a given surface with a sensitivity of the order of 0.1 atomic % and a spatial resolution of the order of 10nm [1]. Its ease of interpretation means that AES is often the analysis technique of choice and has been used to study a wide range of different materials.

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Authors
  1. P. C. Dastoor
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Editors and Affiliations

  1. School of Mathematical and Physical Sciences, University Newcastle, 2308, Callaghan, NSW, Australia

    D. John O’Connor

  2. CSIRO Manufacturing Science and Technology, Private Bag 33, 3169, Clayton South, VIC, Australia

    Brett A. Sexton

  3. South Australian Surface Technology Centre, University of South Australia, 25095, The Levels, Adelaide, SA, Australia

    Roger St. C. Smart

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Dastoor, P.C. (2003). Auger Electron Spectroscopy and Microscopy — Techniques and Applications. In: O’Connor, D.J., Sexton, B.A., Smart, R.S.C. (eds) Surface Analysis Methods in Materials Science. Springer Series in Surface Sciences, vol 23. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-05227-3_6

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  • DOI: https://doi.org/10.1007/978-3-662-05227-3_6

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