Abstract
The increasing importance of thin films for new technologies has encouraged fundamental and applied research on their physical and chemical structures and on the interfaces made with them [1]. Their physical structures (e.g. morphology, topography, crystallite properties, extent and type of defects) are explored by diffraction and microscopic techniques including X-ray and electron diffraction, scanning tunnelling microscopy and ultrasonic microscopy. Their chemical structures (e.g. element type, concentration and spatial distribution) are explored by microanalytical techniques such as Fourier transform infra-red spectroscopy, secondary ion mass spectrometry (SIMS), X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), ion scattering spectroscopy (LEIS, HEIS), as well as dispersive X-ray analysis and electron energy loss spectrometry with scanning and transmission electron microscopy. As an ultimate objective, researchers desire a three-dimensional elemental map on an atomic scale for the thin film and its interfaces. Some progress towards that aim has been made, but achievement is some time away.
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References
H. Oechsner (ed.): Thin Films and Depth Profile Analysis, Topics Curr. Phys. Vol. 37 (Springer, Berlin, Heidelberg 1984)
U.S. Department of Energy, National Photovolt aies Program Five Year Research Plan, 1987–1991, DOE/CH1000093–7, 1987
W.J. Danaher, L.E. Lyons, G.C. Morris: Solar Energy Materials 12, 137 (1985)
G.C. Morris, P.G. Tanner, A. Tottszer: 21st Photovoltaic Specialist Conference, IEEE (1990)
L.E. Lyons, G.C. Morris, D.H. Horton, J.G. Keyes: J. Electroanal. Chem. 168, 101 (1984)
B.M. Basol: Solar Cells 23, 69 (1988)
G.C. Morris, L.E. Lyons, P. Tanner, C. Owen: Technical Reports of the 4th International Photovoltaic Science and Engineering Conference, Sydney (1989), p. 487
A 10% efficient solar array covering about 5% of the area of Australia would generate more electrical power than the world’s power stations
G.C. Morris, L.E. Lyons, R.K. Tandon, B.J. Wood: Nucl. Instrum. B 35, 257 (1988)
C.W. Magee, R.K. Honig: Surf. Interface Anal. 4, 35 (1982)
G.C. Morris, B.J. Wood: Materials Forum 15, 44 (1991)
L.E. Lyons, G.C. Morris, R.K. Tandon: Solar Energy Materials 18, 315 (1989)
D.S. Simons, P. Chi, R.G. Downing, J.R. Ehrstein, J.F. Knudsen: Proc. Sixth International Conference on Secondary Ion Mass Spectrometry, ed. by A. Bonninghoven, A.M. Huber, H.W. Werner (Wiley, Chichester 1988) p. 433
National Physics Laboratory, Certified Reference Material NPL No. S7B83, BCR No. 261
G.C. Morris, M. Marychurch: Materials Forum 15, 143 (1991)
C.T. Au, M.W. Roberts: Chem. Phys. Lett. 74, 472 (1980)
W.J. Danaher, L.E. Lyons, G.C. Morris: Appl. Surf. Sci. 22/23, 1083 (1985)
F. Wang, A. Schwartzman, A.L. Fahrenbruch, R. Sinclair, R.H. Bube, C.M. Stahle: J. Appl. Phys. 62, 1469 (1987)
W.J. Danaher, L.E. Lyons, M. Marychurch, G.C. Morris: Appl. Surf. Sci. 27, 338 (1986)
A. Ebina, K. Asano, Y. Suna, T. Takahashi: J. Vac. Sci. Technol. 17, 1074 (1980)
L.L. Kazmerski: Solar Cells 24, 211 (1988)
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Morris, G.C. (2003). Thin Film Analysis. In: O’Connor, D.J., Sexton, B.A., Smart, R.S.C. (eds) Surface Analysis Methods in Materials Science. Springer Series in Surface Sciences, vol 23. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-05227-3_21
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DOI: https://doi.org/10.1007/978-3-662-05227-3_21
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