Surface Analysis III. Probing Surfaces with Ions

  • K. Oura
  • M. Katayama
  • A. V. Zotov
  • V. G. Lifshits
  • A. A. Saranin
Part of the Advanced Texts in Physics book series (ADTP)

Abstract

There is a set of various analytical techniques which employ an ion beam to probe a surface. The most widely used techniques are as follows.

Keywords

Anisotropy Argon Tungsten Azimuth Dition 

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References

  1. 6.1.
    C. Linsmeier, H. Knözinger, E. Taglauer: Ion Scattering and Auger Electron Spectroscopy Analysis of Alumina-Supported Rhodium Model Catalyst. Surf. Sci. 275, 101 (1992)CrossRefGoogle Scholar
  2. 6.2.
    H. Niehus: ‘Ion Scattering Spectroscopic Techniques’. In: Practical Surface Analysis. Vol. 2. Ion and Neutral Spectroscopy 2nd edn. ed. by D. Briggs, M.P. Seah (John Wiley, Chichester 1992) pp. 507–576.Google Scholar
  3. 6.3.
    R.S. Williams: ‘Quantitative Intensity Analysis of Low-Energy Scattering and Recoiling from Crystal Surfaces’. In: Low Energy Ion-Surface Interactions ed. by J.W. Rabalais (John Wiley, Chichester 1994) pp. 1–54Google Scholar
  4. 6.4.
    J.A. Cookson: ‘Analytical Techniques’. In: Principles and Applications of High-Energy Microbeams ed. by F. Watt, G.W. Grime (IOP Publishing, England 1987) pp. 21–78Google Scholar
  5. 6.5.
    C.S. Barrett, R.M. Müller, W. White: Proton Blocking in Cubic Crystals. J. Appl. Phys. 39, 4695 (1968)CrossRefGoogle Scholar
  6. 6.6.
    L.C. Feldman, J.W. Mayer, S.T. Picraux: Materials Analysis by Ion Channeling. Submicron Crystallography (Academic Press, New York 1982)Google Scholar
  7. 6.7.
    J.P. Ziegler, J.P. Biersack, U. Littmark: The Stopping Power and Range of Ions in Solids, Vol. 1 (Pergamon Press, New York 1985)Google Scholar
  8. 6.8.
    I.H. Wilson, S.S. Todorov, D.S. Karpuzov: Profile Evolution During Ion Beam Etching of Clean Germanium Targets. Nuclear Instr. Methods Phys. Res. 209–210, 549 (1983)CrossRefGoogle Scholar
  9. 6.9.
    H.D. Hagstrum: Theory of Auger Injection of Electrons from Metals by Ions. Phys. Rev. 96, 336 (1954)CrossRefGoogle Scholar
  10. 6.10.
    R.L. Erickson, D.P. Smith: Oscillatory Cross Section in Low-Energy Ion Scattering from Surfaces. Phys. Rev. Lett. 34, 297 (1975)CrossRefGoogle Scholar
  11. 6.11.
    D.P. Woodruff, T.A. Delchar: Modern Techniques of Surf. Sci., 2nd edn. (Cambridge University Press, Cambridge 1994)CrossRefGoogle Scholar
  12. 6.12.
    H. Niehus, E. Preuss: Low Energy Alkali Backscattering at Pt(111). Surf. Sci. 119, 349 (1982)Google Scholar
  13. 6.13.
    H. Niehus: Enhancement of the ICISS by Simultaneous Detection of Ions and Neutrals. Surf. Sci. 166, L107 (1986)CrossRefGoogle Scholar
  14. 6.14.
    M. Aono, C. Oshima, S. Zaima, S. Otani, Y. Ishizawa: Quantitative Surface Atomic Geometry and Two-Dimensional Surface Electron Distribution Analysis by a New Technique in Low-Energy Ion Scattering. Japan J. Appl. Phys. 20, L829 (1981)CrossRefGoogle Scholar
  15. 6.15.
    M. Katayama, E. Nomura, N. Kanekama, H. Soejima, M. Aono: Coaxial Impact-Collision Ion Scattering Spectroscopy a Novel Method for Surface Structure Analysis. Nuclear Instr. Methods Phys. Res. B 33, 857 (1988)CrossRefGoogle Scholar
  16. 6.16.
    M. Aono, M. Katayama, E. Nomura, T. Chassè, M. Kato: Recent Development in Low-Energy Ion Scattering Spectroscopy (ISS) for Surface Structural Analysis. Nuclear Instr. Methods Phys. Res. B 37, 264 (1989)CrossRefGoogle Scholar
  17. 6.17.
    M. Aono, Y. Hou, C. Oshima, Y. Ishizawa: Low-Energy Ion Scattering from the Si(100) surface. Phys. Rev. Lett. 49, 567 (1982)CrossRefGoogle Scholar
  18. 6.18.
    I. Stensgaard, L.C. Feldman, P.J. Silverman: Calculation of the Backscattering-Channeling Surface Peak. Surf. Sci. 77, 513 (1978)CrossRefGoogle Scholar
  19. 6.19.
    L.C. Feldman, R.L. Kauffman, P.J. Silverman, R.A. Zuhr, J.H. Barrett: Surface Scattering from W Single Crystal by MeV He + Ions. Phys. Rev. Lett. 39, 38 (1977)CrossRefGoogle Scholar
  20. 6.20.
    W.C. Turkenburg, W. Soszka, F.W. Saris, H.H. Kersten, B.G. Colenbrander: Surface Structure Analysis by Means of Rutherford Scattering: Methods to Study Surface Relaxation. Nuclear Instr. Methods Phys. Res. 132, 587 (1976)CrossRefGoogle Scholar
  21. 6.21.
    J.W.M. Frenken, F. Huussen, J.F. van der Veen: Evidence for Anomalous Thermal Expansion at a Crystal Surface. Phys. Rev. Lett. 58, 401 (1987)CrossRefGoogle Scholar
  22. 6.22.
    F. Shoji, K. Kusumura, K. Oura: A Si(100)-2×H Monohydride Surface Studied by Low-energy Recoil-Ion Spectroscopy. Surf. Sci. 280, L247 (1993)CrossRefGoogle Scholar
  23. 6.23.
    A. Benninghoven: Comparative Study of Si(111), Silicon Oxide, SiC and Si 3 N 4 Surfaces by Secondary Ion Mass Spectroscopy (SIMS). Thin Solid Films 28, 59 (1975)CrossRefGoogle Scholar
  24. 6.24.
    A. Benninghoven: Developments in Secondary Ion Mass Spectroscopy and Applications to Surface Studies. Surf. Sci. 53, 596 (1975)CrossRefGoogle Scholar
  25. 6.25.
    A. Casel, H. Jorke, M. Pawlik, R. Groves, E. Frenzel: A Comparison of Electrical and Chemical Profiling of Dopant Superlattices in Silicon. J. Appl. Phys. 67, 1740 (1990)CrossRefGoogle Scholar

Further Reading

  1. 1.
    J.W. Rabalais (Ed.): Low Energy Ion-Surface Interactions (John Wiley, Chichester 1994) (about LEIS)Google Scholar
  2. 2.
    J.F. Van der Veen: Ion Beam Crystallography of Surfaces and Interfaces. Surf. Sci. Rep. 5, 199–288 (1985) (about MEIS and RBS crystallography)CrossRefGoogle Scholar
  3. 3.
    L.C. Feldman, J.W. Mayer, S.T. Picraux: Materials Analysis by Ion Channeling (Academic Press, New York 1982) (on the physics underlying RBS)Google Scholar
  4. 4.
    D. Briggs, M.P. Seah (Ed.): Practical Surface Analysis. Vol. 2. Ion and Neutral Spectroscopy (John Wiley, Chichester 1992) (about LEIS, MEIS and SIMS)Google Scholar
  5. 5.
    P. Varga, H. Winter: ‘Slow Particle-Induced Electron Emission from Solid Surfaces’. In: Particle Induced Electron Emission II (Springer, Berlin 1991) (about charge exchange between ions and surfaces)Google Scholar
  6. 6.
    D.P. Woodruff, T.A. Delchar: Modern Techniques of Surface Science, 2nd edn. (Cambridge University Press, Cambridge 1994) (about charge exchange between ions and surfaces).CrossRefGoogle Scholar
  7. 7.
    A. Benninghoven, F.G. Rudenauer, H.W. Werner: Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Applications, and Trends (John Wiley, New York 1987) (the best SIMS reference)Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2003

Authors and Affiliations

  • K. Oura
    • 1
  • M. Katayama
    • 1
  • A. V. Zotov
    • 2
  • V. G. Lifshits
    • 3
  • A. A. Saranin
    • 3
  1. 1.Department of Electronic Engineering, Faculty of EngineeringOsaka UniversityOsakaJapan
  2. 2.Vladivostok State University of Economics and ServiceVladivostokRussia
  3. 3.Institute of Automation and Control ProcessesVladivostokRussia

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