Surface Analysis III. Probing Surfaces with Ions

  • K. Oura
  • M. Katayama
  • A. V. Zotov
  • V. G. Lifshits
  • A. A. Saranin
Part of the Advanced Texts in Physics book series (ADTP)


There is a set of various analytical techniques which employ an ion beam to probe a surface. The most widely used techniques are as follows.


Critical Angle Elastic Recoil Detection Analysis Recoil Angle Shadow Cone Scattered Projectile 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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  1. 6.1.
    C. Linsmeier, H. Knözinger, E. Taglauer: Ion Scattering and Auger Electron Spectroscopy Analysis of Alumina-Supported Rhodium Model Catalyst. Surf. Sci. 275, 101 (1992)CrossRefGoogle Scholar
  2. 6.2.
    H. Niehus: ‘Ion Scattering Spectroscopic Techniques’. In: Practical Surface Analysis. Vol. 2. Ion and Neutral Spectroscopy 2nd edn. ed. by D. Briggs, M.P. Seah (John Wiley, Chichester 1992) pp. 507–576.Google Scholar
  3. 6.3.
    R.S. Williams: ‘Quantitative Intensity Analysis of Low-Energy Scattering and Recoiling from Crystal Surfaces’. In: Low Energy Ion-Surface Interactions ed. by J.W. Rabalais (John Wiley, Chichester 1994) pp. 1–54Google Scholar
  4. 6.4.
    J.A. Cookson: ‘Analytical Techniques’. In: Principles and Applications of High-Energy Microbeams ed. by F. Watt, G.W. Grime (IOP Publishing, England 1987) pp. 21–78Google Scholar
  5. 6.5.
    C.S. Barrett, R.M. Müller, W. White: Proton Blocking in Cubic Crystals. J. Appl. Phys. 39, 4695 (1968)CrossRefGoogle Scholar
  6. 6.6.
    L.C. Feldman, J.W. Mayer, S.T. Picraux: Materials Analysis by Ion Channeling. Submicron Crystallography (Academic Press, New York 1982)Google Scholar
  7. 6.7.
    J.P. Ziegler, J.P. Biersack, U. Littmark: The Stopping Power and Range of Ions in Solids, Vol. 1 (Pergamon Press, New York 1985)Google Scholar
  8. 6.8.
    I.H. Wilson, S.S. Todorov, D.S. Karpuzov: Profile Evolution During Ion Beam Etching of Clean Germanium Targets. Nuclear Instr. Methods Phys. Res. 209–210, 549 (1983)CrossRefGoogle Scholar
  9. 6.9.
    H.D. Hagstrum: Theory of Auger Injection of Electrons from Metals by Ions. Phys. Rev. 96, 336 (1954)CrossRefGoogle Scholar
  10. 6.10.
    R.L. Erickson, D.P. Smith: Oscillatory Cross Section in Low-Energy Ion Scattering from Surfaces. Phys. Rev. Lett. 34, 297 (1975)CrossRefGoogle Scholar
  11. 6.11.
    D.P. Woodruff, T.A. Delchar: Modern Techniques of Surf. Sci., 2nd edn. (Cambridge University Press, Cambridge 1994)CrossRefGoogle Scholar
  12. 6.12.
    H. Niehus, E. Preuss: Low Energy Alkali Backscattering at Pt(111). Surf. Sci. 119, 349 (1982)Google Scholar
  13. 6.13.
    H. Niehus: Enhancement of the ICISS by Simultaneous Detection of Ions and Neutrals. Surf. Sci. 166, L107 (1986)CrossRefGoogle Scholar
  14. 6.14.
    M. Aono, C. Oshima, S. Zaima, S. Otani, Y. Ishizawa: Quantitative Surface Atomic Geometry and Two-Dimensional Surface Electron Distribution Analysis by a New Technique in Low-Energy Ion Scattering. Japan J. Appl. Phys. 20, L829 (1981)CrossRefGoogle Scholar
  15. 6.15.
    M. Katayama, E. Nomura, N. Kanekama, H. Soejima, M. Aono: Coaxial Impact-Collision Ion Scattering Spectroscopy a Novel Method for Surface Structure Analysis. Nuclear Instr. Methods Phys. Res. B 33, 857 (1988)CrossRefGoogle Scholar
  16. 6.16.
    M. Aono, M. Katayama, E. Nomura, T. Chassè, M. Kato: Recent Development in Low-Energy Ion Scattering Spectroscopy (ISS) for Surface Structural Analysis. Nuclear Instr. Methods Phys. Res. B 37, 264 (1989)CrossRefGoogle Scholar
  17. 6.17.
    M. Aono, Y. Hou, C. Oshima, Y. Ishizawa: Low-Energy Ion Scattering from the Si(100) surface. Phys. Rev. Lett. 49, 567 (1982)CrossRefGoogle Scholar
  18. 6.18.
    I. Stensgaard, L.C. Feldman, P.J. Silverman: Calculation of the Backscattering-Channeling Surface Peak. Surf. Sci. 77, 513 (1978)CrossRefGoogle Scholar
  19. 6.19.
    L.C. Feldman, R.L. Kauffman, P.J. Silverman, R.A. Zuhr, J.H. Barrett: Surface Scattering from W Single Crystal by MeV He + Ions. Phys. Rev. Lett. 39, 38 (1977)CrossRefGoogle Scholar
  20. 6.20.
    W.C. Turkenburg, W. Soszka, F.W. Saris, H.H. Kersten, B.G. Colenbrander: Surface Structure Analysis by Means of Rutherford Scattering: Methods to Study Surface Relaxation. Nuclear Instr. Methods Phys. Res. 132, 587 (1976)CrossRefGoogle Scholar
  21. 6.21.
    J.W.M. Frenken, F. Huussen, J.F. van der Veen: Evidence for Anomalous Thermal Expansion at a Crystal Surface. Phys. Rev. Lett. 58, 401 (1987)CrossRefGoogle Scholar
  22. 6.22.
    F. Shoji, K. Kusumura, K. Oura: A Si(100)-2×H Monohydride Surface Studied by Low-energy Recoil-Ion Spectroscopy. Surf. Sci. 280, L247 (1993)CrossRefGoogle Scholar
  23. 6.23.
    A. Benninghoven: Comparative Study of Si(111), Silicon Oxide, SiC and Si 3 N 4 Surfaces by Secondary Ion Mass Spectroscopy (SIMS). Thin Solid Films 28, 59 (1975)CrossRefGoogle Scholar
  24. 6.24.
    A. Benninghoven: Developments in Secondary Ion Mass Spectroscopy and Applications to Surface Studies. Surf. Sci. 53, 596 (1975)CrossRefGoogle Scholar
  25. 6.25.
    A. Casel, H. Jorke, M. Pawlik, R. Groves, E. Frenzel: A Comparison of Electrical and Chemical Profiling of Dopant Superlattices in Silicon. J. Appl. Phys. 67, 1740 (1990)CrossRefGoogle Scholar

Further Reading

  1. 1.
    J.W. Rabalais (Ed.): Low Energy Ion-Surface Interactions (John Wiley, Chichester 1994) (about LEIS)Google Scholar
  2. 2.
    J.F. Van der Veen: Ion Beam Crystallography of Surfaces and Interfaces. Surf. Sci. Rep. 5, 199–288 (1985) (about MEIS and RBS crystallography)CrossRefGoogle Scholar
  3. 3.
    L.C. Feldman, J.W. Mayer, S.T. Picraux: Materials Analysis by Ion Channeling (Academic Press, New York 1982) (on the physics underlying RBS)Google Scholar
  4. 4.
    D. Briggs, M.P. Seah (Ed.): Practical Surface Analysis. Vol. 2. Ion and Neutral Spectroscopy (John Wiley, Chichester 1992) (about LEIS, MEIS and SIMS)Google Scholar
  5. 5.
    P. Varga, H. Winter: ‘Slow Particle-Induced Electron Emission from Solid Surfaces’. In: Particle Induced Electron Emission II (Springer, Berlin 1991) (about charge exchange between ions and surfaces)Google Scholar
  6. 6.
    D.P. Woodruff, T.A. Delchar: Modern Techniques of Surface Science, 2nd edn. (Cambridge University Press, Cambridge 1994) (about charge exchange between ions and surfaces).CrossRefGoogle Scholar
  7. 7.
    A. Benninghoven, F.G. Rudenauer, H.W. Werner: Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Applications, and Trends (John Wiley, New York 1987) (the best SIMS reference)Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2003

Authors and Affiliations

  • K. Oura
    • 1
  • M. Katayama
    • 1
  • A. V. Zotov
    • 2
  • V. G. Lifshits
    • 3
  • A. A. Saranin
    • 3
  1. 1.Department of Electronic Engineering, Faculty of EngineeringOsaka UniversityOsakaJapan
  2. 2.Vladivostok State University of Economics and ServiceVladivostokRussia
  3. 3.Institute of Automation and Control ProcessesVladivostokRussia

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