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Surface Analysis III. Probing Surfaces with Ions

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Surface Science

Part of the book series: Advanced Texts in Physics ((ADTP))

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Abstract

There is a set of various analytical techniques which employ an ion beam to probe a surface. The most widely used techniques are as follows.

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References

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Further Reading

  1. J.W. Rabalais (Ed.): Low Energy Ion-Surface Interactions (John Wiley, Chichester 1994) (about LEIS)

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  2. J.F. Van der Veen: Ion Beam Crystallography of Surfaces and Interfaces. Surf. Sci. Rep. 5, 199–288 (1985) (about MEIS and RBS crystallography)

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  3. L.C. Feldman, J.W. Mayer, S.T. Picraux: Materials Analysis by Ion Channeling (Academic Press, New York 1982) (on the physics underlying RBS)

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  4. D. Briggs, M.P. Seah (Ed.): Practical Surface Analysis. Vol. 2. Ion and Neutral Spectroscopy (John Wiley, Chichester 1992) (about LEIS, MEIS and SIMS)

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  5. P. Varga, H. Winter: ‘Slow Particle-Induced Electron Emission from Solid Surfaces’. In: Particle Induced Electron Emission II (Springer, Berlin 1991) (about charge exchange between ions and surfaces)

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  6. D.P. Woodruff, T.A. Delchar: Modern Techniques of Surface Science, 2nd edn. (Cambridge University Press, Cambridge 1994) (about charge exchange between ions and surfaces).

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  7. A. Benninghoven, F.G. Rudenauer, H.W. Werner: Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Applications, and Trends (John Wiley, New York 1987) (the best SIMS reference)

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Authors and Affiliations

  1. Department of Electronic Engineering, Faculty of Engineering, Osaka University, Suita, Yamada-oka 2-1, Osaka, 565-0871, Japan

    Professor K. Oura & Professor M. Katayama

  2. Vladivostok State University of Economics and Service, 690600, Vladivostok, Russia

    Professor A. V. Zotov

  3. Institute of Automation and Control Processes, 5 Radio Street, 690041, Vladivostok, Russia

    Professor V. G. Lifshits & Professor A. A. Saranin

Authors
  1. Professor K. Oura
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  2. Professor M. Katayama
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  3. Professor A. V. Zotov
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  4. Professor V. G. Lifshits
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  5. Professor A. A. Saranin
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© 2003 Springer-Verlag Berlin Heidelberg

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Oura, K., Katayama, M., Zotov, A.V., Lifshits, V.G., Saranin, A.A. (2003). Surface Analysis III. Probing Surfaces with Ions. In: Surface Science. Advanced Texts in Physics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-05179-5_6

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  • DOI: https://doi.org/10.1007/978-3-662-05179-5_6

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-05606-2

  • Online ISBN: 978-3-662-05179-5

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