Abstract
In this book cantilever-based systems for applications such as gas sensors and force sensors for Atomic Force Microscopy (AFM) have been investigated. They are fabricated utilizing IC technology and compatible micromachining, thus exploiting unique features such as cost effective batch fabrication and manufacturing with well established reliability. The cantilevers consist of single crystalline silicon and the dielectric layers from the CMOS process.
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© 2002 Springer-Verlag Berlin Heidelberg
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Lange, D., Brand, O., Baltes, H. (2002). Conclusions and Outlook. In: CMOS Cantilever Sensor Systems. Microtechnology and Mems. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-05060-6_6
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DOI: https://doi.org/10.1007/978-3-662-05060-6_6
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-07728-9
Online ISBN: 978-3-662-05060-6
eBook Packages: Springer Book Archive