Conclusions and Outlook
In this book cantilever-based systems for applications such as gas sensors and force sensors for Atomic Force Microscopy (AFM) have been investigated. They are fabricated utilizing IC technology and compatible micromachining, thus exploiting unique features such as cost effective batch fabrication and manufacturing with well established reliability. The cantilevers consist of single crystalline silicon and the dielectric layers from the CMOS process.
KeywordsAtomic Force Microscopy Force Sensor Thermal Actuator Single Crystalline Silicon Electromagnetic Excitation
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