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Conclusions and Outlook

  • D. Lange
  • O. Brand
  • H. Baltes
Part of the Microtechnology and Mems book series (MEMS)

Abstract

In this book cantilever-based systems for applications such as gas sensors and force sensors for Atomic Force Microscopy (AFM) have been investigated. They are fabricated utilizing IC technology and compatible micromachining, thus exploiting unique features such as cost effective batch fabrication and manufacturing with well established reliability. The cantilevers consist of single crystalline silicon and the dielectric layers from the CMOS process.

Keywords

Atomic Force Microscopy Force Sensor Thermal Actuator Single Crystalline Silicon Electromagnetic Excitation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2002

Authors and Affiliations

  • D. Lange
    • 1
  • O. Brand
    • 2
  • H. Baltes
    • 3
  1. 1.Dept. of Electrical Engineering, Center for Integrated SystemsStanford UniversityStanfordUSA
  2. 2.Physical Electronics LaboratoryETH ZürichZürichSwitzerland
  3. 3.Physical Electronics LaboratoryETH ZürichZürichSwitzerland

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