Abstract
A basic understanding of the mechanical behavior of cantilever beams is critical in order to successfully develop cantilever-based microsensors. The knowledge of spring constant, resonance frequency and corresponding quality factor of a cantilever sensor have to be taken into account to optimize sensitivity and resolution. The goal of this chapter is to develop a basic understanding of the dependency of the resonator characteristics on geometry and materials as well as potential excitation schemes and detection principles.
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© 2002 Springer-Verlag Berlin Heidelberg
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Lange, D., Brand, O., Baltes, H. (2002). Design Considerations. In: CMOS Cantilever Sensor Systems. Microtechnology and Mems. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-05060-6_2
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DOI: https://doi.org/10.1007/978-3-662-05060-6_2
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-07728-9
Online ISBN: 978-3-662-05060-6
eBook Packages: Springer Book Archive