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Gas Phase Synthesis

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Nanocrystalline Ceramics

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 53))

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Abstract

Powders consisting of nanocrystalline particles can be produced by a large variety of methods based on solid state, liquid or gas phase processes. For an overview see Chow and Gonsalves (1996). Siegel (1991) described processes based on physical methods such as inert gas condensation or ball milling. Brinker and Scherer (1990) gave an overview of the synthesis of particulate sols and gels and compared them with vapor phase methods. Segal (1989) and Klabunde et al. (1994) gave an overview of different chemical methods.

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References

  • Ando, Y. and Ohkohchi, M., J. Cryst. Growth 60 (1982), 147

    Article  CAS  Google Scholar 

  • Baron, P. A., and Willeke, K., chapter 2, “Aerosol Fundamentals”, in Willeke, K. and Baron, P. A. (eds.) “Aerosol Measurement — Principles, Techniquies and Applications”, Van Nostrand Reinhold 1993, pp. 8

    Google Scholar 

  • Breiland, W.G. and Ho, P., chapter 3 “Analysis of Chemical Vapor Deposition Processes” in “Chemical Vapor Deposition”, Hitchman, M. L. and Jensen, K. F. (eds.), Academic Press London 1993,91

    Google Scholar 

  • Brinker, C. J. and Scherer, G. W., Sol-Gel Science, Academic Press San Diego 1990

    Google Scholar 

  • Bryant, W.A., “Review of the Fundamentals of CVD”, J. Mat. Science 12 (1977)

    Google Scholar 

  • Cannon, W. R., Danforth, S. C., Flint, J. H., Haggerty, J. S., and Marra, R.A., J. Am. Ceram. Soc. 65 (1982), 324

    Article  CAS  Google Scholar 

  • Capano, M. A. and Trew, R. J. (eds.), MRS Bulletin 3/1997

    Google Scholar 

  • Chang, W., Skandan, S. C., Danforth, C., Kear, B. H., and Hahn, H., Nanostruct. Mat. 4 (1994), 507

    Article  CAS  Google Scholar 

  • Changhong, D., Xianpeng, Z., Jinsong, Z., Yongjin, Y., Lihna, C., and Fei, X., J. Mater. Sci. 32 (1997), 2469

    Google Scholar 

  • Chow, G.-M. and Gonsalves, K. E. (eds.), “Nanotechnology — Molecularly Designed Materials”, ACS Symposium Series vol. 662, American Chemical Society, Washington 1996

    Google Scholar 

  • Flagan, R. C., and Lunden, M. M., Mat. Sci. and Eng. A204 (1995), 113

    Article  Google Scholar 

  • Flörke, O. W., Martin, B., Benda, L., Paschas, S., Bergna, H. E., Roberts, W.O., Welsh, W. A., Ettlinger, M., Kerner, D., Kleinschmit, P., Meyer, J., Gies, H., Schiffmann, D., chapter “Silica” in volume A23 of “Ullmann’s Encyclopedia of Industrial Chemistry”, VCH Weinheim 1993, pp. 575

    Google Scholar 

  • Friedlander, S. K., “Smoke, Dust and Haze — Fundamentals of Aerosol Behavior”, Wiley, New York 1977

    Google Scholar 

  • Greskovich, C. and Rosolowski, J. H., J. Am. Ceram. Soc. 59 (1976), 337

    Google Scholar 

  • Gurav, A., Kodas, T., Plyum, T., and Xiong, Y., Aerosol Sci. Techn. 19 (1993), 411

    Google Scholar 

  • Haigis, B. and A. Pickering, A., Laser and Optronics 3/1994

    Google Scholar 

  • Harris, G. L. (ed.), “Properties of Silicon Carbide”, Inspec, London 1995

    Google Scholar 

  • Hinds, W. C., Aerosol Technology, Wiley New York 1982

    Google Scholar 

  • Heine, H., Völz, H.G., Woditsch, P., Westerhaus, A., Grieber, W.-D., Liedkerke, M. de, Buxbaum, G., Printzen, H., Mausmann, M., Räde, D., Trenczek, G., Wilhelm, V., Berger, G., Endriß, H., Wienand, H., Adrian, G., Cork, W. B., Ferch, H., Leitner, L., Kathrein, H., Schwab, E., Jakkusch, H., Ohlinger, M., Veitch, R., Etzrodt, G., Frabz, K.-D., Härtner, H., Besod, R., Gaedcke, H., chapter “Pigments, Inorganic”, in volume A20 of “Ullmann’s Encyclopedia of Industrial Chemistry”, VCH Weinheim 1992, pp. 243

    Google Scholar 

  • Hitchman, M. L. and Jensen, K. F., 1993, chapter 1 “Chemical Vapor Deposition — An Overview” in “Chemical Vapor Deposition”, Hitchman, M. L. and Jensen, K. F. (eds.), Academic Press London 1993, 1

    Google Scholar 

  • Klabunde, K. J., Stark, J. V., Koper, O., Mohs, C., Khaleel, A., Glavee, G., Zhang, D., Sorensen, C. M., and Hadjipanayis, G. C., in “Nanophase Materials”, Hadjipanayis, G. C., and Siegel, R. W. (eds.), Kluwer Amsterdam 1994, 1

    Google Scholar 

  • Klein, S., dissertation, “Chemische Gasphasensynthese und Charakterisierung von nanokristallinem Siliziumkarbid-Pulver”, VDI Düsseldorf 1999

    Google Scholar 

  • Kodas, T. T., Adv. Mat. 1 (1989), 330

    Article  Google Scholar 

  • Kodas, T. T. and Hampden-Smith, M. J., chapter 9 “Overview of Metal CVD”, in “The Chemistry of Metal CVD”, Kodas, T. T. and Hampden-Smith, M. J.VCH Weinheim, 1994, 429

    Google Scholar 

  • Kodas, T. T. and Hampden-Smith, M. J., “Aerosol Processing of Materials”, Wiley-VCH, New York 1999

    Google Scholar 

  • Kriechbaum, G. W. and Kleinschmit, P., Adv. Mat. 1 (1989), 330

    Article  Google Scholar 

  • Krstic, V. D., MRS Bulletin 2/1995,46

    Google Scholar 

  • Kruis, F. E., Fissan, H., and Peled, A., J. Aerosol Sci. 29 (1998), 511

    Article  CAS  Google Scholar 

  • Kruis, F. E., Kusters, K. A., Pratsinis, S. E., and Scarlett, B., Aerosol Sci. Techn. 19 (1993), 514

    Article  CAS  Google Scholar 

  • Liethschmidt, K., “Silicon Carbide”, in “Ullmann’s Encyclopedia of Industrial Chemistry”, Volume A23 (1993), 749

    Google Scholar 

  • Linackers, D., Strecker, M. G. D., Roth, P., Janzen, C., and Pratsinis, S. E., Comb. Sci. Techn. 123 (1997), 287

    Article  Google Scholar 

  • Mazdiyasni, K. S., Lynch, C. T., and Smith, J. S., J. Am. Ceram. Soc. 48 (1965), 372

    Article  CAS  Google Scholar 

  • Nariki, Y., Inoue, Y., and Tanaka, K., J. Mater. Sci. 5 (1990), 3101

    Article  Google Scholar 

  • Pensel, G., and Helbig, R., Festkörperprobleme, 1990, 30, 133

    Article  Google Scholar 

  • Pratsinis, S. E. and Kodas, T. T., “Manufacturing of Materials by Aerosol Processes”, chapter 33 in “Aerosol Measurement — Principles, Techniquies and Applications”, K. Willeke, and Baron, P. A. (eds.), van Nostrand Reinhold 1993, pp. 721

    Google Scholar 

  • Reist, P. C., “Aerosol Science and Technology”, McGraw-Hill New York 1993

    Google Scholar 

  • Schafer, D. W. and Hurd, A. J., Aerosol Sci. Techn. 12 (1990), 876

    Article  Google Scholar 

  • Segal, D., “Chemical Synthesis of Advanced Ceramic Materials”, Cambridge University Press Cambridge 1989

    Google Scholar 

  • Seinfeld, J. H. and Pandis, S. N., “Atmospheric Chemistry and Physics”, Wiley 1998

    Google Scholar 

  • Sharafat, S. Wong, C. P. C., and Reis, E. E., Fusion Technology 19 (1991), 901

    CAS  Google Scholar 

  • Siegel, R. W., “Cluster Assembly of Nanophase Materials”, chapter 13 in “Materials Science and Technology”, vol. 15: “Processing of Metals and Alloys”, Cahn, R. W. (ed.), VCH Wein-heim 1991,583

    Google Scholar 

  • Skandan, G., Chen, Y.-J., Glumac, N., and Kear, B. H., Nanostruct. Mat. 11 (1999), 149

    Article  CAS  Google Scholar 

  • Somiya, S., and Inomata, Y. (eds.), “Silicon Carbide Ceramics 1”, Elsevier 1991

    Google Scholar 

  • Starck, H. C./Bayer AG, Laufenburg, Germany

    Google Scholar 

  • Ulrich, G. D., and Riehl, J. W., J. Coll. Int. Sci. 87 (1982), 257

    Article  CAS  Google Scholar 

  • Ulrich, G. D., Chem. Eng. News August 1984, 22

    Google Scholar 

  • Ulrich, G. D., Comb. Sci. Techn. 4 (1971), 47

    Article  CAS  Google Scholar 

  • Vallen, R., Kaiser, A., Förster, J., Buchkremer, H. P., and Stöver, D., J. Mater.Sci. 31 (1996), 3623

    Article  Google Scholar 

  • Vohler, O. Sturm, F. v., Wege, E., Kienle, H. v., Voll, M., Kleinschmit, P., chapter “Carbon” in volume A5 of “Ullmann’s Encyclopedia of Industrial Chemistry”, VCH Weinheim 1986, p. 140

    Google Scholar 

  • White, D. A., Oleff, S. M., and Fox, J. R., Adv. Ceram. Mater. 2 (1987), 53

    CAS  Google Scholar 

  • Benker, A., diploma thesis, Darmstadt 1999

    Google Scholar 

  • Besling, W. F. A., Goossens, A., Meester, B., Schoonman, J., J. Appl. Phys. 83 (1998), 544

    Article  CAS  Google Scholar 

  • Bradley, D. C., Mehrotra, R. C., Gaur, D. P., “Metal Alkoxides”, Acadamic Press London 1978

    Google Scholar 

  • Bradley, D. C., Chem. Rev. 89 (1989), 1317

    Google Scholar 

  • Cannon, W. R., Danforth, S. C., Flint, J. H., Haggerty, J. S., and Marra, R. A., J. Am. Ceram. Soc., 65 (1982), 324 and 330

    Google Scholar 

  • Cauchetier, M., Croix, O., Luce, M., Baraton, M. I., Merle, T., Quintard, P., J. Eur. Ceram. Soc. 8 (1991), 215

    Article  CAS  Google Scholar 

  • Chang, W., Skandan, S. C., Danforth, C., Kear, B. H., and Hahn, H., Nanostruct. Mat. 4 (1994), 507

    Google Scholar 

  • Deppert, K., Hansson, H.-C., Jeppesen, S., Miller, M. S., Samuelson, L., Seifert, W., and Wiedensohler, A., J. Crystal growth 145 (1994), 636 )

    Article  CAS  Google Scholar 

  • Elihn, K., Otten, F., Boman, M., Kruis, F.E., Fissan, H., Carlsson, J.-0., Nanostruct. Mat. 12 (1999), 79

    Google Scholar 

  • Fotou, G. P. and Kodas, T. T. Advanced Materials 9 (1997), 420

    Article  CAS  Google Scholar 

  • Gonsalves, K. E., Strutt, P. R., Xiao, T. D., and Klemens, P. G., J. Mat. Sci. 27 (1992), 3238

    Article  Google Scholar 

  • Hersee, S. D., and Ballingall, J. M., J. Vac. Sci. Technol. A8 (1990), 800

    Article  CAS  Google Scholar 

  • Hinkle, L. D., and Mariano, C. F., J. Vac. Sci. Technol. A9 (1991), 2043

    Google Scholar 

  • Klein, S., Winterer, M. and Hahn, H., Chem. Vap. Dep. 4 (1998), 143

    Article  CAS  Google Scholar 

  • Kodas, T. T., and Hampden-Smith, M., “Overview of Metal CVD”, chapter 9 in “The Chemistry of Metal CVD”, Kodas,T.T. and Hampden-Smith, M.VCH Weinheim 1994, pp. 429

    Google Scholar 

  • Konrad, A., Fries, T., Gahn, A., Kummer, F., Herr, U., Tidecks, R., Samwer, K., J. Appl. Phys. 86 (1999), 3129

    Article  CAS  Google Scholar 

  • Linackers, D., Strecker, M. G. D., Roth, P., Janzen, C., and Pratsinis, S. E., Comb. Sci. Techn. 123 (1997), 287

    Article  Google Scholar 

  • Littau, K. A., Szajowski, P. J., Muller, A. J., Kortan, A. R., and Bruis, L. E., J. Phys. Chem. 97 (1993), 1224

    Google Scholar 

  • Löffler, F., “Dust Separation”, chapter 13 in Volume B2 of “Ullmanns Encyclopedia of Indus-trial Chemistry”, VCH Weinheim 1988

    Google Scholar 

  • Mazdiyasni, K. S., Lynch, C. T., and Smith, J. S., J. Am. Ceram. Soc. 48 (1965), 372

    Article  CAS  Google Scholar 

  • McMillin, B K, Biswas, P., and Zachariah, M. R., J. Mater. Res. 11 (1996), 1552

    Google Scholar 

  • Powell, Q. H., Kodas, T. T., and Bruce M. Anderson, Chem. Vap. Deposition 2 (1996), 179

    Article  CAS  Google Scholar 

  • Rao, N., Girshick, S., Heberlein, J., McMurry, P., Jones, S., Hansen, D., Michel, B., Plasma Chem. Plasma Proc. 15 (1995), 581

    Article  CAS  Google Scholar 

  • Rees, W. S., “Introduction”, chapter 1 in “CVD of Nonmetals” W. S. Rees (ed.), VCH Weinheim 1996, pp. 1

    Google Scholar 

  • Reist, P.C., Aerosol Science and Technology, McGraw-Hill New York 1993

    Google Scholar 

  • Rulison, A. J., Miguel, P. F., Katz, J. L., J. Mater. Res. 11 (1996), 3083

    Article  CAS  Google Scholar 

  • Sacilotti, M., Horiuchi, L., Decobert, J., Brasil, M. J., Cardoso, L. P., Osstart, P., and Ganiere, J. D., J. Appl. Phys. 71 (1992), 179

    Google Scholar 

  • Schultz, D. L., and Marks, T. J., “Superconducting Materials”, chapter 2 in “CVD of Nonmetals” Rees, W. S., (ed.), VCH Weinheim 1996, pp. 37

    Google Scholar 

  • Seifried, S. thesis 2000

    Google Scholar 

  • Seifried, S., Winterer, M. and Hahn, H., Chem. Vap. Dep. 6 (2000), 630

    Article  Google Scholar 

  • Skandan, G., Chen, Y.-J., Glumac, N., and Kear, B. H., Nanostruct. Mat. 11 (1999), 149

    Article  CAS  Google Scholar 

  • Srdic, V. V., Winterer, M., and Hahn, H., J. Am. Ceram. Soc. 83 (2000), 729

    Article  CAS  Google Scholar 

  • Srdic, V. V., Winterer, M., and Hahn, H., J. Am. Ceram. Soc. 83 (2000), 1853

    Google Scholar 

  • Srdic, V. V., Winterer, M., A. MöIler, G. Miehe and Hahn, H., J. Am. Ceram. Soc. 84 (2001), 2771

    Google Scholar 

  • Srdic, V. V., Winterer, M., Miehe, G., and Hahn, H., Nanostruct. Mat. 12 (1999), 95

    Article  Google Scholar 

  • Sullivan, J. J., “Materials Delivery Challenges for MLM” MKS Technical Report 1994

    Google Scholar 

  • Sullivan, J. J., Schaffer, S., and Jacobs, R. P., J. Vac. Sci. Technol. A7 (1989), 2387

    Google Scholar 

  • Sullivan. J. J. and Jacobs, R. P., Solid State Technol. 29 (1986), 113

    Google Scholar 

  • Tompa, G.S., “Semiconduction Materials” chapter 4 in “CVD of Nonmetals” Rees, W. S., (ed.), VCH Weinheim 1996, pp. 193

    Google Scholar 

  • Ulrich, G. D., Comb. Sci. Techn. 4 (1971), 47

    Google Scholar 

  • Vollath, D. and Szabo, D.V., and Haußelt, J., J. Eur. Ceram. Soc. 17 (1997), 1317

    Google Scholar 

  • Vollath, D. and Szabo, D.V., Nanostruct. Mat. 4 (1994), 927

    Article  CAS  Google Scholar 

  • Vollath, D., Sickafus, K. E., Nanostruct. Mat. 1 (1992), 427

    Article  CAS  Google Scholar 

  • Vollath, D., Sickafus, K. E., Nanostruct. Mat. 2 (1993), 451

    Article  CAS  Google Scholar 

  • Wahl, G., chapter 10 “Abscheidung aus der Gasphase”, in volume 2 of “Vakuumbeschichtung”, Kienel, G., and Rö11, K. (eds.) VDI Verlag Dusseldorf 1993, pp. 376

    Google Scholar 

  • Walzel, P., “Spraying and Atomizing of Liquids”, chapter 6 in volume B2 of “Ullmann’s Ency-clopedia of Industrial Chemistry”, VCH Weinheim 1988

    Google Scholar 

  • Wu, H.-D. and Readey, D. W., “Ceramic Transactions 2: Silicon Carbide” (1987), 35, in “Silicon Carbide’87, Cawley”, J. D. (ed.), Am. Ceram. Soc. Westerville 1989

    Google Scholar 

  • Wutz, M., Adam, H., and Walcher, W., “Vacuum Science and Technology”, Vieweg Braunschweig 1989

    Google Scholar 

  • Agival, Y. and Schieber, M., J. Cryst. Growth 9 (1971), 127

    Article  Google Scholar 

  • Anantharaman, T. R., and Christian, J. W., Acta Cryst. 9 (1956), 479

    Article  CAS  Google Scholar 

  • Barret, E. P., Joyner, L. G., and Halenda, P. P., J. Am. Chem. Soc. 73 (1951), 373

    Article  Google Scholar 

  • Brinker, C. J., and Scherer, G. W., “Sol-Gel Science”, Academic Press San Diego 1990

    Google Scholar 

  • Brunauer, S., “The Adsorption of Gases and Vapors Vol. 1”, Princeton University Press, Prince-ton 1945

    Google Scholar 

  • Brunauer, S., Emmett., P. H., and Teller, E., J. Am. Chem. Soc. 60 (1938), 309

    Article  CAS  Google Scholar 

  • Buschmann, V., Klein, S., FueB, H., and Hahn, H., J. Cryst. Growth 193 (1998), 335

    Article  CAS  Google Scholar 

  • Chatterjee, A., Kalia, R., Nakano, A., Omeltchenko, A., Tsuruta, K., Vashishta, P., Loong, C.-K., Winterer, M., Klein, S., Appl. Phys. Lett. 77 (2000), 1132

    Google Scholar 

  • Clegg, W. J., J. Am. Ceram. Soc. 83 (2000), 1039

    Google Scholar 

  • Clifford, R. P., Gownlock, B. G., Johnson, C. A. F., and Stevenson, J., J. Organometal. Chem. 43 (1972), 53

    Article  Google Scholar 

  • Dobbins, R.A., and Megaridis, C. M., Langmuir 3 (1987), 254

    Google Scholar 

  • Ehrburger-Dolle, F., “Fractal Characteristics of Silica Surfaces and Aggregates”, chapter 2B in “The Surface Properties of Silicas”, Legrand, A. P. (ed.) Wiley New York 1998

    Google Scholar 

  • Friedlander, S. K. and Wang, C. S. J. Coll. Int. Sci. 22 (1966), 126

    CAS  Google Scholar 

  • Fritz, G., and Marquardt, G., Z. Anorg. Allg. Chem. 1 (1974), 404

    Google Scholar 

  • Gedde, U. W., “Polymer Physics”, Chapman and Hall 1995

    Google Scholar 

  • Greg, S. J. and Sing, K. S. W., “Adsorption, Surface Area and Porosity”, Academic Press San Diego 1982

    Google Scholar 

  • Hinds, W. C., “Physical and Chemical Changes in the Particulate Phase”, chapter 4: in Willeke K. and P.A. Baron (eds.), “Aerosol Measurement — Principles, Techniquies and Applications”, Van Nostrand Reinhold, New York 1993

    Google Scholar 

  • Hurd, A. J., Schaefer, D. W., and Martin, J. E., Phys. Rev. A35 (1987), 2361

    Google Scholar 

  • John, W., “The Characteristics of Environmental and Laboratory-Generated Aerosols”, chapter 5 in “Aerosol Measurement — Principles, Techniquies and Applications”, K. Willeke, and Baron, P. A. (eds.), van Nostrand Reinhold 1993, pp. 54

    Google Scholar 

  • Keijser, Th. H. de, Mittenmeijer, E. J., and Rozendaal, H. C. F., J. Appl. Cryst. 16 (1983), 309

    Article  Google Scholar 

  • Klein, S., Winterer, M., and Hahn, H., Chem. Vap. Dep. 4 (1998), 143

    Article  CAS  Google Scholar 

  • Klein, S., Winterer, M., and Hahn, H., Mat. Res. Soc. Symp. Proc. 501 (1998), 27

    Article  CAS  Google Scholar 

  • Klein, S., dissertation, “Chemische Gasphasensynthese und Characterisierung von nanokristallinem Siliziumkarbid-Pulver”, VDI Düsseldorf 1999

    Google Scholar 

  • Klotz, H.-D., Drost, H., Spangenberg, H.-J., Z. Phys. Chemie Leipzig 266 (1985), 101

    CAS  Google Scholar 

  • Krill, C. E. and Birringer, R. Phil. Mag. A77 (1998), 621

    CAS  Google Scholar 

  • Lai, F. S., Friedlander, S. K., Pich, J., and Hidy, G. M., J. Coll. Int. Sci. 39 (1971), 395

    Article  Google Scholar 

  • Landgrebe, J. D. and Pratsinis, S. E., Ind. Chem. Res. 28 (1989), 1474

    Google Scholar 

  • Lindackers, D, D., “Erzeugung und Charakterisierung von oxidischen Nanopartikeln”, dissertation U. Duisburg, published in Shaker Verlag 1999

    Google Scholar 

  • Martin, J. E., J. Appl. Cryst. 19 (1986), 25

    Article  CAS  Google Scholar 

  • Lee, K. W., Chen, H., and Gieseke, J. A., Aerosol Sci. and Technol. 3 (1984), 53

    Article  CAS  Google Scholar 

  • Okabe, Y., Hojo, J., and Kato, A., J. Less-Comm. Metals 68 (1979), 29

    Article  CAS  Google Scholar 

  • Pfeifer, P. and Avnir, D. J. Chem. Phys. 79 (1983), 3558

    CAS  Google Scholar 

  • Reist, P. C., “Aerosol Science and Technology”, McGraw-Hill 1993

    Google Scholar 

  • Schafer, D. W. and Hurd, A. J., Aerosol Sci. Techn. 12 (1990), 876

    Article  Google Scholar 

  • Schafer, D. W., Martin, J. E., Wiltzius, P., and Cannell, D. S., Phys. Rev. Lett. 52 (1984), 2371

    Google Scholar 

  • Seinfeld, J. H. and Pandis, S. N., “Atmospheric Chemistry and Physics”, Wiley 1998

    Google Scholar 

  • Tsantilis, S. and Pratsinis, S. E., AIChE Journal, in press 2000

    Google Scholar 

  • Wong, P.-Z. and Cao, Q.-Z., Phys. Rev. B45 (1992), 7627

    Article  Google Scholar 

  • Wu, H., Ready, D. W., Silicon Carbide Symposium, Ceramic Transactions 1987, Cawley, J. D. (ed.), J. D.Westerville, Ohio, American Ceramic Society 1989, 235

    Google Scholar 

  • Xiao, T. D., Gonsalves, K. E., Strutt, P. R., Klemens, P. G., J. Mater. Sci. 28 (1883), 1334

    Google Scholar 

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Winterer, M. (2002). Gas Phase Synthesis. In: Nanocrystalline Ceramics. Springer Series in Materials Science, vol 53. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-04976-1_2

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