Activated Low-Pressure Diamond Growth from the Vapor Phase

  • Ji-Tao Wang
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 68)

Abstract

In the early stage of low-pressure diamond synthesis there are two periodic circular steps:
  1. 1.

    The methane pyrolysis and diamond growth step.

     
  2. 2.

    The hydrogen etching graphite step.

     

Keywords

Diamond Film Diamond Surface Diamond Growth Diamond Synthesis Diamond Thin Film 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2002

Authors and Affiliations

  • Ji-Tao Wang
    • 1
  1. 1.Department of MicroelectronicsFudan UniversityShanghaiChina

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