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Principles of Measuring Mechanical Quantities: Transduction of Deformation

  • Miko Elwenspoek
  • Remco Wiegerink
Part of the Microtechnology and MEMS book series (MEMS)

Abstract

This chapter deals with the problem of the transfer of a deformation in a mechanical construction by an external load to an electrical signal. This is called “transduction”. The most important mechanisms for transduction of mechanical microsensors use the following effects: piezoresistivity, the dependency of the capacity on the geometric arrangement of conductors, piezoelectricity, optical resonance and optical interferometry. We concentrate here on the first two, most important, transducers. For flowsensors the thermal domain is of great importance, but we shall defer the discussion of transducers using heat to the chapter on flowsensors.

Keywords

Spring Constant Gauge Factor Neutral Plane Electrical Isolation Plate Separation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2001

Authors and Affiliations

  • Miko Elwenspoek
    • 1
  • Remco Wiegerink
    • 1
  1. 1.MESA Research InstituteTwente University of TechnologyEnschedeThe Netherlands

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