Principles of Measuring Mechanical Quantities: Transduction of Deformation
This chapter deals with the problem of the transfer of a deformation in a mechanical construction by an external load to an electrical signal. This is called “transduction”. The most important mechanisms for transduction of mechanical microsensors use the following effects: piezoresistivity, the dependency of the capacity on the geometric arrangement of conductors, piezoelectricity, optical resonance and optical interferometry. We concentrate here on the first two, most important, transducers. For flowsensors the thermal domain is of great importance, but we shall defer the discussion of transducers using heat to the chapter on flowsensors.
KeywordsSilane Nitride Sine Phosphine Suffix
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