Basic principles of integrated circuit technology

  • Dietrich Widmann
  • Hermann Mader
  • Hans Friedrich
  • Walter Heywang
  • Rudolf Müller
Part of the Springer Series in ADVANCED MICROELECTRONICS book series (MICROELECTR., volume 2)

Abstract

Integrated circuits are manufactured using planar technology. This refers to the successive technological processing steps which are performed on monocrystalline semiconductor wafers. The processing steps can be classified into the four categories below.

Keywords

Phosphorus Dust Arsenic Boron Encapsulation 

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Copyright information

© Springer-Verlag Berlin Heidelberg 2000

Authors and Affiliations

  • Dietrich Widmann
    • 1
  • Hermann Mader
    • 2
  • Hans Friedrich
    • 3
  • Walter Heywang
    • 4
  • Rudolf Müller
    • 4
  1. 1.semiconductor technology developmentInfineon TechnologiesMunichGermany
  2. 2.Department of Electrical Engineering and Information TechnologiesMunich University of Applied SciencesMunichGermany
  3. 3.TELA Versicherungs AGMunichGermany
  4. 4.Technical University MunichMunichGermany

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