Abstract
Optical and mass spectroscopy have been applied to analyze product species in laser annealing, ablation, etching, and LCVD.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 2000 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Bäuerle, D. (2000). Analysis of Species, Plasmas, and Surfaces. In: Laser Processing and Chemistry. Advanced Texts in Physics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-04074-4_30
Download citation
DOI: https://doi.org/10.1007/978-3-662-04074-4_30
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-08614-4
Online ISBN: 978-3-662-04074-4
eBook Packages: Springer Book Archive