Adsorbed Layers, Laser—MBE
Adsorbed precursor molecules, reaction products, or impurities play an important role in various types of laser surface processing. They may control reaction rates, the spatial resolution in surface patterning, nucleation times in material deposition or synthesis, concentration profiles in surface doping, etc. Adsorbates are of importance also in new techniques that use a combination of laser and molecular/atomic beams.
KeywordsAdsorb Layer Atomic Beam Adsorbed Species Sticking Coefficient Electric Field Enhancement
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