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Adsorbed Layers, Laser—MBE

  • Dieter Bäuerle
Part of the Advanced Texts in Physics book series (ADTP)

Abstract

Adsorbed precursor molecules, reaction products, or impurities play an important role in various types of laser surface processing. They may control reaction rates, the spatial resolution in surface patterning, nucleation times in material deposition or synthesis, concentration profiles in surface doping, etc. Adsorbates are of importance also in new techniques that use a combination of laser and molecular/atomic beams.

Keywords

Adsorb Layer Atomic Beam Adsorbed Species Sticking Coefficient Electric Field Enhancement 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2000

Authors and Affiliations

  • Dieter Bäuerle
    • 1
  1. 1.Institut für Angewandte PhysikJohannes-Kepler-Universität LinzLinzAustria

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