Abstract
After the discussion of micrometer and sub-micrometer silicon technology with respect to its applicability in the field of optoelectronics, optoelectronic power devices, which can have a diameter of more than 100 mm and which fill complete silicon wafers, are described in this chapter in order to cover the entire field of silicon optoelectronics.
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© 2000 Springer-Verlag Berlin Heidelberg
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Zimmermann, H. (2000). Silicon Power Devices. In: Integrated Silicon Optoelectronics. Springer Series in Photonics, vol 3. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-04018-8_5
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DOI: https://doi.org/10.1007/978-3-662-04018-8_5
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-04020-1
Online ISBN: 978-3-662-04018-8
eBook Packages: Springer Book Archive