Silicon Technologies and Integrated Photodetectors
In this chapter the bipolar, CMOS, and BiCMOS process technologies are described. Photodetectors which are produced in these technologies without process modifications and their properties are introduced. Furthermore, the possible improvements of photodetectors resulting from small substrate and process modifications are discussed.
KeywordsEpitaxial Layer CMOS Process Fall Time Photogenerated Carrier Application Specific Integrate Circuit
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