Silicon Technologies and Integrated Photodetectors

  • Horst Zimmermann
Part of the Springer Series in Photonics book series (PHOTONICS, volume 3)

Abstract

In this chapter the bipolar, CMOS, and BiCMOS process technologies are described. Photodetectors which are produced in these technologies without process modifications and their properties are introduced. Furthermore, the possible improvements of photodetectors resulting from small substrate and process modifications are discussed.

Keywords

Phosphorus Silane Recombination Arsenic Boron 

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Copyright information

© Springer-Verlag Berlin Heidelberg 2000

Authors and Affiliations

  • Horst Zimmermann
    • 1
  1. 1.Technische Fakultät, HalbleitertechnikChristian-Albrechts-UniversitätKielGermany

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