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Silicon Technologies and Integrated Photodetectors

  • Horst Zimmermann
Part of the Springer Series in Photonics book series (PHOTONICS, volume 3)

Abstract

In this chapter the bipolar, CMOS, and BiCMOS process technologies are described. Photodetectors which are produced in these technologies without process modifications and their properties are introduced. Furthermore, the possible improvements of photodetectors resulting from small substrate and process modifications are discussed.

Keywords

Epitaxial Layer CMOS Process Fall Time Photogenerated Carrier Application Specific Integrate Circuit 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2000

Authors and Affiliations

  • Horst Zimmermann
    • 1
  1. 1.Technische Fakultät, HalbleitertechnikChristian-Albrechts-UniversitätKielGermany

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