Particle Deposition in Plasma

  • Motoaki Adachi
  • Kikuo Okuyama
Chapter

Abstract

Particles floating in plasma, similar to those in a gas phase, are influenced by Brownian motion, inertial motion due to the flow, thermophoresis, diffusiophoresis, and settling motion due to external forces such as gravity and electrical force. However, in contrast to the gas phase, particles move in a space in which there are pressures of 1–10−4 Torr, a temperature gradient, and an electrical field, so the conditions in which the theories of particle motion are applied are different from those in the gas phase. Because the theoretical equations of particle motion are the same as described in the previous chapter, this chapter will give the basic equations without any explanation.

Keywords

Microwave Settling 

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Copyright information

© Springer-Verlag Berlin Heidelberg 1998

Authors and Affiliations

  • Motoaki Adachi
    • 1
  • Kikuo Okuyama
    • 2
  1. 1.Osaka Prefecture UniversityJapan
  2. 2.Hiroshima UniversityJapan

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