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Microsensors: Principles and Examples

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Microsystem Technology and Microrobotics
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Abstract

Sensors are increasingly being used for many technical applications. A sensor is a vital organ of an artificial system, forming the interface between the controller and the environment. Sensors can smell, taste, see and feel by measuring mechanical, biochemical, thermal, magnetic and radiation parameters. They are usually classified according to the signals that are measured. An easy to understand sensor classification can be seen in Table 6.1.

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© 1997 Springer-Verlag Berlin Heidelberg

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Fatikow, S., Rembold, U. (1997). Microsensors: Principles and Examples. In: Microsystem Technology and Microrobotics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-03450-7_6

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  • DOI: https://doi.org/10.1007/978-3-662-03450-7_6

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-08232-0

  • Online ISBN: 978-3-662-03450-7

  • eBook Packages: Springer Book Archive

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