Abstract
In Chapter 1 we learned that in MST an effort is being made to combine microtechniques with special properties of materials and their effects to fabricate functional microdevices. The techniques of MST can be divided into three classes: the microtechniques, the system techniques and the materials and their effects, Fig. 3.1. The borderlines of these techniques are not well defined. However, the classification is useful when discussing the principles of MST.
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© 1997 Springer-Verlag Berlin Heidelberg
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Fatikow, S., Rembold, U. (1997). Techniques of Microsystem Technology. In: Microsystem Technology and Microrobotics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-03450-7_3
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DOI: https://doi.org/10.1007/978-3-662-03450-7_3
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-08232-0
Online ISBN: 978-3-662-03450-7
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