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Techniques of Microsystem Technology

  • Sergej Fatikow
  • Ulrich Rembold
Chapter

Abstract

In Chapter 1 we learned that in MST an effort is being made to combine microtechniques with special properties of materials and their effects to fabricate functional microdevices. The techniques of MST can be divided into three classes: the microtechniques, the system techniques and the materials and their effects, Fig. 3.1. The borderlines of these techniques are not well defined. However, the classification is useful when discussing the principles of MST.

Keywords

System Technique Optical Component Microsystem Technology Thin Film Layer Anodic Bonding 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1997

Authors and Affiliations

  • Sergej Fatikow
    • 1
  • Ulrich Rembold
    • 1
  1. 1.TU KarlsruheKarlsruheGermany

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