Techniques of Microsystem Technology
In Chapter 1 we learned that in MST an effort is being made to combine microtechniques with special properties of materials and their effects to fabricate functional microdevices. The techniques of MST can be divided into three classes: the microtechniques, the system techniques and the materials and their effects, Fig. 3.1. The borderlines of these techniques are not well defined. However, the classification is useful when discussing the principles of MST.
KeywordsSystem Technique Optical Component Microsystem Technology Thin Film Layer Anodic Bonding
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