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Abstract

Laser direct writing by pyrolytic or photolytic decomposition of gas-phase precursors permits single-step surface patterning of planar and non-planar substrates. The process can most easily be studied by translating the substrate in one dimension perpendicular to the focused laser beam. By this means one obtains stripes (lines). The literature on such investigations is included in Appendix B.4.

Keywords

Laser Power Laser Focus Direct Writing Scanning Velocity Integrate Circuit 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1996

Authors and Affiliations

  • Dieter Bäuerle
    • 1
  1. 1.Institut für Angewandte PhysikJohannes-Kepler-Universität LinzLinzAustria

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