Direct Writing

  • Dieter Bäuerle

Abstract

Laser direct writing by pyrolytic or photolytic decomposition of gas-phase precursors permits single-step surface patterning of planar and non-planar substrates. The process can most easily be studied by translating the substrate in one dimension perpendicular to the focused laser beam. By this means one obtains stripes (lines). The literature on such investigations is included in Appendix B.4.

Keywords

Porosity Quartz Boron Tungsten Pyrolysis 

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Copyright information

© Springer-Verlag Berlin Heidelberg 1996

Authors and Affiliations

  • Dieter Bäuerle
    • 1
  1. 1.Institut für Angewandte PhysikJohannes-Kepler-Universität LinzLinzAustria

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