Abstract
Ion beams offer a broad spectrum of properties which can be varied in order to induce different effects during interaction of these beams with solid matter. By choosing mass, kinetic energy and angle of incidence of ions impinging on a solid one can for instance vary the penetration depth, the fraction of scattered and sputtered particles or the amount of damage in a crystal.
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© 1992 Springer-Verlag Berlin Heidelberg
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Morgenstern, R., Folkerts, L., Das, J. (1992). Electrons Captured and Emitted by Highly Charged Ions near Surfaces. In: Schmidt-Böcking, H., Stiebing, K.E., Schempp, A. (eds) Materials Research with Ion Beams. Research Reports in Physics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-02794-3_10
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DOI: https://doi.org/10.1007/978-3-662-02794-3_10
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