Abstract
Auger electron spectroscopy (AES) is a widely used technique for the analysis of surfaces, and it has application in many fields of materials science. AES is highly surface specific, and for most materials it is only sensitive to the top few monolayers. Minute amounts of material at the surface can be analyzed. Under the right conditions 10−3 of a monolayer [6.1], and in an Auger microscope as few as 104 atoms, with a spatial resolution of 20 nm can be detected [6.2]. The qualitative interpretation of AES spectra is straightforward for many materials, and all elements except for hydrogen and helium are detectable. Any radiation with sufficient energy to ionize an atomic core level will stimulate Auger electron emission, but, by convention, AES is normally understood to use an electron beam.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
L.A. Larson: MRS Symposia, Materials Characterization, Vol. 69 (1986) p. 129
H. Todokoro, Y. Sakitani, S. Fukuhara, Y. Okajima: J. Electron Microsc. 30, 107 (1981)
L. Meitner: Z. Phys. 17, 54 (1923)
P. Auger: Comptes Rendus 177, 169 (1923)
D.A. Shirley: Phys. Rev. A 7, 1520 (1973)
R. Hoogewijs, L. Fiermans, J. Vennik: Surf. Sci. 69, 273 (1977)
R. Weissmann, K. Muller: Surf. Sci. Rep. 105, 251 (1981)
L.E. Davis, N.C. MacDonald, P.W. Palmberg, G.E. Riach, R.E. Weber: Handbook of Auger Electron Spectroscopy (Physical Electronics, Eden Prairie, MN)
T. Sekine et al.: Handbook of Auger Electron Spectroscopy (JEOL Ltd. Tokyo, Japan)
P. Morgen, B. Jorgensen: Surf. Sci. 208, 306 (1989)
P.J. Lurie, J.M. Wilson: Surf. Sci. 65, 476 (1977)
T.W. Hass, J.T. Grant, G.J. Dooley III: J. Appl. Phys. 43, 1853 (1972)
Y. Mizokawa, T. Miyasato, S. Nakamura, K.M. Geib, C.W. Wilmsen: Surf. Sci. 182, 431 (1987)
M.P. Seah, W.A. Dench: Surf. Int. Anal. 1, 2 (1979)
E.N. Sickafus: Phys. Rev. B 16, 1436 (1977)
J.A.D. Matthew, M. Prutton, M.M. El Gomati, D.C. Peacock: Surf. Int. Anal. 11, 173 (1988)
E.N. Sickafus: Surf. Sci. 100, 529 (1980)
C. Burrell, N.R. Armstrong: Appl. Surf. Sci. 17, 53 (1983)
S. Ichimura, D. Ze-Jun, R. Shimizu: Surf. Int. Anal. 13, 149 (1988)
C.C. Chang: Surf. Sci. 25, 53 (1971)
M. Prutton, M.M. El Gomati: Surf. Int. Anal. 9, 99 (1986)
C.G.H. Walker, D.C. Peacock, M. Prutton, M.M. El Gomati: Surf. Int. Anal. 11, 266 (1988)
M.P. Seah: Surf. Int. Anal. 9, 85 (1986)
P. Lejcek: Surf. Sci. 202, 493 (1988)
J.T. Grant: Surf. Int. Anal. 14, 271 (1989)
M.P. Seah: SEM 83, SEM Inc. AMF O’Hare, Chicago (1983) p. 521–536
T. Sekine, A. Mogami, M. Kudoh, K. Hirata: Vacuum 34, 631 (1984)
P.H. Holloway: J. Electron Spectrosc. Relat. Phenom. 7, 215 (1975)
S. Ichimura, R. Shimizu: Surf. Sci. 112, 386 (1981)
H.E. Bishop, B. Chomik, C. LeGressus, A. LeMoel: Surf. Int. Anal. 6, 116 (1984)
F.E. Doern, L. Kover, N.S. McIntyre: Surf. Int. Anal. 6, 282 (1984)
L.P. Erickson, B.F. Phillips: J. Vac. Sci. Technol. B 1, 158 (1983)
H.H. Busta, C.H. Tang: J. Electrochem. Soc. 133, 1195 (1986)
F. Marchetti, M. Dapor, S. Girardi, F. Giacomozzi, A. Cavalieri: Mater Sci. Eng. A 115, 217 (1989)
R. Pantel, F.A. D’Avitaya: Thin Solid Films 140, 177 (1986)
S.J. Pearton, A.B. Emerson, U.K. Chakrabarti, E. Lane, K.S. Jones, K.T. Short, A.E. White, T.R. Fullowan: J. Appl. Phys. 66, 3839 (1989)
C.S. Wei, M. Setton, J. Van der Spiegel, J. Santiago: J. Appl. Phys. 61, 1429 (1987)
W. Palmer: Appl. Phys. A 42, 219 (1987)
B.M. Clemens: J. Non Cryst. Solids 61–62, 817 (1984)
T.T. Huang, B. Peterson, D.A. Shores, E. Pender: Corrosion Science 24, 167 (1984)
S. Mathieu: La Revue de Metallurgie, January 1989, p. 73
P.H. Holloway: Surf. Sci. 66, 479 (1977)
T. Sekine, A. Mogami, J.D. Geller, SEM, SEM Inc. AMF O’Hare (1981) p. 245
R. Li, L. Tu, Y. Sun: Surf. Sci. 163, 67 (1985)
J.M. Walls, I.K. Brown, D.D. Hall: Appl. Surf. Sci. 15, 93 (1983)
I. Lhermitte-Sebire, M. LaHaye, R. Colmet, R. Naslain: Thin Solid Films 138, 209 (1986)
J. F. Bresse: Surf. Sci. 168, 810 (1986)
R. Browning, J.L. Smialek, N.S. Jacobson: Advanced Ceramic Materials 2, 773 (1987)
M.H. Hochella, M.F. Turner, D.W. Harris: SEM II (1986) p. 337
T. Gold, E. Bilson, R.L. Baron: Proc. 5th Lunar Sci. Conf. (1975) p. 2413
T. Gold, E. Bilson, R.L. Baron: Proc. 6th Lunar Sci. Conf. (1975) p. 3285
J.W. Morse, A. Mucci, L.M. Walter, M.S. Kaminsky: Science 205, 904 (1979)
A. Mucci, J.W. Morse, M.S. Kaminsky: Am. J. Sci. 285, 289 (1985)
A. Mucci, J.W. Morse, M.S. Kaminsky: Am. J. Sci. 285, 306 (1985)
J.F. Jongste, F.E. Prins, G.C.A.M. Janssen: Matt. Lett. 8, 273 (1989)
M.G. Ransey, F.P. Netzer: Mat. Sci. Eng. B 2, 269 (1989)
A. Roshko, Y.M. Chiang: J. Appl. Phys. 66, 3710 (1989)
H.H. Madden, W.O. Wallace: Surf. Sci. 172, 641 (1986)
R. Sherman: J. Am. Ceram. Soc. 68, C7 (1985)
H.J. Grabke: ISIJ 29, 529 (1989)
M. Militzer, J. Wieting: Acta Metall. 37, 2585 (1989)
M. Takeyama, C.T. Liu: Acta Metall. 37, 2681 (1989)
W.E. Wallace, S.G. Sankar, J.M. Elbiki, S.F. Cheng: Mat. Sci. Eng. B 3, 351 (1989)
R. Hamminger, G. Grathwohl, F. Thummler: J. Mater. Sci. 18, 3154 (1983)
D.C. Peacock: Appl. Surf. Sci. 26, 306 (1986)
D.C. Peacock: Appl. Surf. Sci. 27, 58 (1986)
P. Humbert, A. Mosser: Surf. Sci. 126, 708 (1983)
J. Du Plessis, P.E. Vijoen, F. Bezuidenhout: Surf. Sci. 138, 26 (1984)
J.G. Smeggil, A.W. Funkenbush, N.S. Bomstein: Metall. Trans. 17A, 923 (1986)
J.L. Smialek, R. Browning: Proc. Symp. High Temp. Material Chemistry-III, Electrochem. Soc. (1986) p. 258
K.L. Luthra, C.L. Briant: Mater. Sci. Forum 43, 299 (1989)
K. Sato, Y. Inoue: ISU 29, 246 (1989)
M. Tornita, T. Tanabe, S. Imoto: Surf. Sci. 209, 173 (1989)
G.C. Smith, M.P. Seah: Surf. Int. Anal. 12, 105 (1988)
R. Browning: MRS Bull. 12, 75 (1987)
M. Prutton, C.G.H. Walker, J.C. Greenwood, P.G. Kenny, J.C. Dee, I.R. Barkshire, R.H. Roberts: A third-generation Auger microscope using Parallel Multispectral Data Acquisition and Analysis, Sur. Int. Analy. 17, 71–84 (1991)
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1992 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Browning, R. (1992). Auger Spectroscopy and Scanning Auger Microscopy. In: O’Connor, D.J., Sexton, B.A., Smart, R.S.C. (eds) Surface Analysis Methods in Materials Science. Springer Series in Surface Sciences, vol 23. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-02767-7_6
Download citation
DOI: https://doi.org/10.1007/978-3-662-02767-7_6
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-02769-1
Online ISBN: 978-3-662-02767-7
eBook Packages: Springer Book Archive