Auger Spectroscopy and Scanning Auger Microscopy

  • R. Browning
Part of the Springer Series in Surface Sciences book series (SSSUR, volume 23)

Abstract

Auger electron spectroscopy (AES) is a widely used technique for the analysis of surfaces, and it has application in many fields of materials science. AES is highly surface specific, and for most materials it is only sensitive to the top few monolayers. Minute amounts of material at the surface can be analyzed. Under the right conditions 10−3 of a monolayer [6.1], and in an Auger microscope as few as 104 atoms, with a spatial resolution of 20 nm can be detected [6.2]. The qualitative interpretation of AES spectra is straightforward for many materials, and all elements except for hydrogen and helium are detectable. Any radiation with sufficient energy to ionize an atomic core level will stimulate Auger electron emission, but, by convention, AES is normally understood to use an electron beam.

Keywords

Graphite Attenuation Boron Catalysis Helium 

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References

  1. 6.1
    L.A. Larson: MRS Symposia, Materials Characterization, Vol. 69 (1986) p. 129Google Scholar
  2. 6.2
    H. Todokoro, Y. Sakitani, S. Fukuhara, Y. Okajima: J. Electron Microsc. 30, 107 (1981)Google Scholar
  3. 6.3
    L. Meitner: Z. Phys. 17, 54 (1923)CrossRefGoogle Scholar
  4. 6.4
    P. Auger: Comptes Rendus 177, 169 (1923)Google Scholar
  5. 6.5
    D.A. Shirley: Phys. Rev. A 7, 1520 (1973)CrossRefGoogle Scholar
  6. 6.6
    R. Hoogewijs, L. Fiermans, J. Vennik: Surf. Sci. 69, 273 (1977)CrossRefGoogle Scholar
  7. 6.7
    R. Weissmann, K. Muller: Surf. Sci. Rep. 105, 251 (1981)CrossRefGoogle Scholar
  8. 6.
    L.E. Davis, N.C. MacDonald, P.W. Palmberg, G.E. Riach, R.E. Weber: Handbook of Auger Electron Spectroscopy (Physical Electronics, Eden Prairie, MN)Google Scholar
  9. 6.
    T. Sekine et al.: Handbook of Auger Electron Spectroscopy (JEOL Ltd. Tokyo, Japan)Google Scholar
  10. 6.10
    P. Morgen, B. Jorgensen: Surf. Sci. 208, 306 (1989)CrossRefGoogle Scholar
  11. 6.11
    P.J. Lurie, J.M. Wilson: Surf. Sci. 65, 476 (1977)CrossRefGoogle Scholar
  12. 6.12
    T.W. Hass, J.T. Grant, G.J. Dooley III: J. Appl. Phys. 43, 1853 (1972)CrossRefGoogle Scholar
  13. 6.13
    Y. Mizokawa, T. Miyasato, S. Nakamura, K.M. Geib, C.W. Wilmsen: Surf. Sci. 182, 431 (1987)CrossRefGoogle Scholar
  14. 6.14
    M.P. Seah, W.A. Dench: Surf. Int. Anal. 1, 2 (1979)CrossRefGoogle Scholar
  15. 6.15
    E.N. Sickafus: Phys. Rev. B 16, 1436 (1977)CrossRefGoogle Scholar
  16. 6.16
    J.A.D. Matthew, M. Prutton, M.M. El Gomati, D.C. Peacock: Surf. Int. Anal. 11, 173 (1988)CrossRefGoogle Scholar
  17. 6.17
    E.N. Sickafus: Surf. Sci. 100, 529 (1980)CrossRefGoogle Scholar
  18. 6.18
    C. Burrell, N.R. Armstrong: Appl. Surf. Sci. 17, 53 (1983)CrossRefGoogle Scholar
  19. 6.19
    S. Ichimura, D. Ze-Jun, R. Shimizu: Surf. Int. Anal. 13, 149 (1988)CrossRefGoogle Scholar
  20. 6.20
    C.C. Chang: Surf. Sci. 25, 53 (1971)CrossRefGoogle Scholar
  21. 6.21
    M. Prutton, M.M. El Gomati: Surf. Int. Anal. 9, 99 (1986)CrossRefGoogle Scholar
  22. 6.22
    C.G.H. Walker, D.C. Peacock, M. Prutton, M.M. El Gomati: Surf. Int. Anal. 11, 266 (1988)CrossRefGoogle Scholar
  23. 6.23
    M.P. Seah: Surf. Int. Anal. 9, 85 (1986)CrossRefGoogle Scholar
  24. 6.24
    P. Lejcek: Surf. Sci. 202, 493 (1988)CrossRefGoogle Scholar
  25. 6.25
    J.T. Grant: Surf. Int. Anal. 14, 271 (1989)CrossRefGoogle Scholar
  26. 6.26
    M.P. Seah: SEM 83, SEM Inc. AMF O’Hare, Chicago (1983) p. 521–536Google Scholar
  27. 6.27
    T. Sekine, A. Mogami, M. Kudoh, K. Hirata: Vacuum 34, 631 (1984)CrossRefGoogle Scholar
  28. 6.28
    P.H. Holloway: J. Electron Spectrosc. Relat. Phenom. 7, 215 (1975)CrossRefGoogle Scholar
  29. 6.29
    S. Ichimura, R. Shimizu: Surf. Sci. 112, 386 (1981)CrossRefGoogle Scholar
  30. 6.30
    H.E. Bishop, B. Chomik, C. LeGressus, A. LeMoel: Surf. Int. Anal. 6, 116 (1984)CrossRefGoogle Scholar
  31. 6.31
    F.E. Doern, L. Kover, N.S. McIntyre: Surf. Int. Anal. 6, 282 (1984)CrossRefGoogle Scholar
  32. 6.32
    L.P. Erickson, B.F. Phillips: J. Vac. Sci. Technol. B 1, 158 (1983)CrossRefGoogle Scholar
  33. 6.33
    H.H. Busta, C.H. Tang: J. Electrochem. Soc. 133, 1195 (1986)CrossRefGoogle Scholar
  34. 6.34
    F. Marchetti, M. Dapor, S. Girardi, F. Giacomozzi, A. Cavalieri: Mater Sci. Eng. A 115, 217 (1989)CrossRefGoogle Scholar
  35. 6.35
    R. Pantel, F.A. D’Avitaya: Thin Solid Films 140, 177 (1986)CrossRefGoogle Scholar
  36. 6.36
    S.J. Pearton, A.B. Emerson, U.K. Chakrabarti, E. Lane, K.S. Jones, K.T. Short, A.E. White, T.R. Fullowan: J. Appl. Phys. 66, 3839 (1989)CrossRefGoogle Scholar
  37. 6.37
    C.S. Wei, M. Setton, J. Van der Spiegel, J. Santiago: J. Appl. Phys. 61, 1429 (1987)CrossRefGoogle Scholar
  38. 6.38
    W. Palmer: Appl. Phys. A 42, 219 (1987)CrossRefGoogle Scholar
  39. 6.39
    B.M. Clemens: J. Non Cryst. Solids 61–62, 817 (1984)CrossRefGoogle Scholar
  40. 6.40
    T.T. Huang, B. Peterson, D.A. Shores, E. Pender: Corrosion Science 24, 167 (1984)CrossRefGoogle Scholar
  41. 6.41
    S. Mathieu: La Revue de Metallurgie, January 1989, p. 73Google Scholar
  42. 6.42
    P.H. Holloway: Surf. Sci. 66, 479 (1977)CrossRefGoogle Scholar
  43. 6.43
    T. Sekine, A. Mogami, J.D. Geller, SEM, SEM Inc. AMF O’Hare (1981) p. 245Google Scholar
  44. 6.44
    R. Li, L. Tu, Y. Sun: Surf. Sci. 163, 67 (1985)CrossRefGoogle Scholar
  45. 6.45
    J.M. Walls, I.K. Brown, D.D. Hall: Appl. Surf. Sci. 15, 93 (1983)CrossRefGoogle Scholar
  46. 6.46
    I. Lhermitte-Sebire, M. LaHaye, R. Colmet, R. Naslain: Thin Solid Films 138, 209 (1986)Google Scholar
  47. 6.47
    J. F. Bresse: Surf. Sci. 168, 810 (1986)CrossRefGoogle Scholar
  48. 6.48
    R. Browning, J.L. Smialek, N.S. Jacobson: Advanced Ceramic Materials 2, 773 (1987)Google Scholar
  49. 6.49
    M.H. Hochella, M.F. Turner, D.W. Harris: SEM II (1986) p. 337Google Scholar
  50. 6.50
    T. Gold, E. Bilson, R.L. Baron: Proc. 5th Lunar Sci. Conf. (1975) p. 2413Google Scholar
  51. 6.51
    T. Gold, E. Bilson, R.L. Baron: Proc. 6th Lunar Sci. Conf. (1975) p. 3285Google Scholar
  52. 6.52
    J.W. Morse, A. Mucci, L.M. Walter, M.S. Kaminsky: Science 205, 904 (1979)CrossRefGoogle Scholar
  53. 6.53
    A. Mucci, J.W. Morse, M.S. Kaminsky: Am. J. Sci. 285, 289 (1985)CrossRefGoogle Scholar
  54. 6.54
    A. Mucci, J.W. Morse, M.S. Kaminsky: Am. J. Sci. 285, 306 (1985)CrossRefGoogle Scholar
  55. 6.55
    J.F. Jongste, F.E. Prins, G.C.A.M. Janssen: Matt. Lett. 8, 273 (1989)CrossRefGoogle Scholar
  56. 6.56
    M.G. Ransey, F.P. Netzer: Mat. Sci. Eng. B 2, 269 (1989)CrossRefGoogle Scholar
  57. 6.57
    A. Roshko, Y.M. Chiang: J. Appl. Phys. 66, 3710 (1989)CrossRefGoogle Scholar
  58. 6.58
    H.H. Madden, W.O. Wallace: Surf. Sci. 172, 641 (1986)CrossRefGoogle Scholar
  59. 6.59
    R. Sherman: J. Am. Ceram. Soc. 68, C7 (1985)CrossRefGoogle Scholar
  60. 6.60
    H.J. Grabke: ISIJ 29, 529 (1989)CrossRefGoogle Scholar
  61. 6.61
    M. Militzer, J. Wieting: Acta Metall. 37, 2585 (1989)CrossRefGoogle Scholar
  62. 6.62
    M. Takeyama, C.T. Liu: Acta Metall. 37, 2681 (1989)CrossRefGoogle Scholar
  63. 6.63
    W.E. Wallace, S.G. Sankar, J.M. Elbiki, S.F. Cheng: Mat. Sci. Eng. B 3, 351 (1989)CrossRefGoogle Scholar
  64. 6.64
    R. Hamminger, G. Grathwohl, F. Thummler: J. Mater. Sci. 18, 3154 (1983)Google Scholar
  65. 6.65
    D.C. Peacock: Appl. Surf. Sci. 26, 306 (1986)CrossRefGoogle Scholar
  66. 6.66
    D.C. Peacock: Appl. Surf. Sci. 27, 58 (1986)CrossRefGoogle Scholar
  67. 6.67
    P. Humbert, A. Mosser: Surf. Sci. 126, 708 (1983)CrossRefGoogle Scholar
  68. 6.68
    J. Du Plessis, P.E. Vijoen, F. Bezuidenhout: Surf. Sci. 138, 26 (1984)CrossRefGoogle Scholar
  69. 6.69
    J.G. Smeggil, A.W. Funkenbush, N.S. Bomstein: Metall. Trans. 17A, 923 (1986)CrossRefGoogle Scholar
  70. 6.70
    J.L. Smialek, R. Browning: Proc. Symp. High Temp. Material Chemistry-III, Electrochem. Soc. (1986) p. 258Google Scholar
  71. 6.71
    K.L. Luthra, C.L. Briant: Mater. Sci. Forum 43, 299 (1989)CrossRefGoogle Scholar
  72. 6.72
    K. Sato, Y. Inoue: ISU 29, 246 (1989)CrossRefGoogle Scholar
  73. 6.73
    M. Tornita, T. Tanabe, S. Imoto: Surf. Sci. 209, 173 (1989)CrossRefGoogle Scholar
  74. 6.74
    G.C. Smith, M.P. Seah: Surf. Int. Anal. 12, 105 (1988)CrossRefGoogle Scholar
  75. 6.75
    R. Browning: MRS Bull. 12, 75 (1987)Google Scholar
  76. 6.76
    M. Prutton, C.G.H. Walker, J.C. Greenwood, P.G. Kenny, J.C. Dee, I.R. Barkshire, R.H. Roberts: A third-generation Auger microscope using Parallel Multispectral Data Acquisition and Analysis, Sur. Int. Analy. 17, 71–84 (1991)CrossRefGoogle Scholar

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© Springer-Verlag Berlin Heidelberg 1992

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  • R. Browning

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