Comparison of Processing Techniques, Applications of Laser Chemical Processing

  • Dieter Bäuerle
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 1)


Throughout this book so far we have mentioned quite a number of applications of LCP. Local and extended-area deposition, oxidation, nitridation, reduction, metallization, doping, compound formation and etching are needed in many areas of technology such as mechanics, electronics, integrated optics and chemical technology. In virtually all of these fields LCP offers new and unique processing possibilities, which are impossible with currently available technologies. On the other hand, there are many applications where LCP has to compete with standard and well-established techniques such as conventional chemical vapor deposition (CVD) [9.1–4]; plasma processing, either deposition (PCVD) or etching (PE) [9.3,4]; electron beam (EB) processing [9.3–5]; ion beam processing, for example, reactive ion etching (RIE) [9.3,4]; photochemical processing with lamps [9.3,4], etc.


Excimer Laser Direct Writing Deep Groof Electron Beam Processing Laser Chemical Processing 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer-Verlag Berlin Heidelberg 1986

Authors and Affiliations

  • Dieter Bäuerle
    • 1
  1. 1.Angewandte PhysikJohannes-Kepler-Universität LinzLinzAustria

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