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Surface Modifications

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Book cover Chemical Processing with Lasers

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 1))

Abstract

This chapter deals with laser-induced surface oxidation, nitridation, reduction, metallization and doping. In this processing mode, atoms or molecules (including photofragments) of the adjacent medium either directly combine with atoms or molecules within the solid surface, or they simply diffuse into this surface. Another type of surface modification is the laser-induced depletion of a particular component of the surface, without appreciable etching or evaporation of the solid. In each of these treatments the physical and/or chemical properties of materials’ surfaces will be modified. Surface modification, in general, requires (thermal and/or nonthermal) photoexcitation of the substrate, and is therefore performed mainly at normal incidence. Large-area surface modifications are performed with high power CO2 lasers, excimer lasers, Nd:YAG or Nd:glass lasers, while for local modifications low power cw lasers such as Ar+ or Kr+ lasers may be employed.

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  1. Angewandte Physik, Johannes-Kepler-Universität Linz, A-4040, Linz, Austria

    Professor Dr. Dieter Bäuerle

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Bäuerle, D. (1986). Surface Modifications. In: Chemical Processing with Lasers. Springer Series in Materials Science, vol 1. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-02505-5_6

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