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Experimental Techniques

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Chemical Processing with Lasers

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 1))

Abstract

This chapter is intended to give an overview of the main experimental components and aspects of LCP. Section 4.1 describes different experimental setups for laser microchemical and large-area chemical processing. Section 4.2 comments on lasers that are typically used in LCP. Techniques of measuring deposition and etch rates are outlined in Sect.4.3. Section 4.4 briefly describes different possibilities of in situ temperature measurements.

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Authors and Affiliations

  1. Angewandte Physik, Johannes-Kepler-Universität Linz, A-4040, Linz, Austria

    Professor Dr. Dieter Bäuerle

Authors
  1. Professor Dr. Dieter Bäuerle
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© 1986 Springer-Verlag Berlin Heidelberg

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Bäuerle, D. (1986). Experimental Techniques. In: Chemical Processing with Lasers. Springer Series in Materials Science, vol 1. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-02505-5_4

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  • DOI: https://doi.org/10.1007/978-3-662-02505-5_4

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-02507-9

  • Online ISBN: 978-3-662-02505-5

  • eBook Packages: Springer Book Archive

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