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Fundamental Excitation Mechanisms

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Chemical Processing with Lasers

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 1))

Abstract

Laser-induced chemical reactions can be based on several fundamentally different microscopic mechanisms. In the following we shall classify reactions into those which are governed by mainly pyrolytic (photothermal) or by mainly photolytic (photochemical) processes. We shall call a reaction pyrolytic if the thermalization of the laser excitation is fast compared to the reaction, and photolytic if this is not the case, i.e. when the constituents of the reaction are in nonequilibrium states. The laser excitation can take place within the ambient gaseous or liquid medium and/or directly within the surface of the solid material (substrate) to be processed. In many cases the different mechanisms and possibilities of excitation contribute simultaneously to the reaction, but often one of them dominates. There are also many examples where, for example, a reaction is initiated photolytically and proceeds pyrolytically, or vice versa.

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References

  1. D. Bauerle: in Laser Processing and Diagnostics, ed. by D. Bauerle, Springer Ser. Chem. Phys., Vol. 39 (Springer, Berlin, Heidelberg 1984 ) p. 166

    Google Scholar 

  2. K. Piglmayer, J. Doppelbauer, D. Bauerle: in Laser Controlled Chemical Processing of Surfaces, ed. by A.W. Johnson, D.J. Ehrlich, H.R. Schloss-berg ( North-Holland, New York 1984 ) p. 47

    Google Scholar 

  3. F. Petzoldt, K. Piglmayer, W. Kräuter, D. Bauerle: Appl. Phys. A 35, 155 (1984)

    ADS  Google Scholar 

  4. K. Piglmayer, D. Bauerle: in Laser Processing and Diagnostics II, ed. by D. Bauerle, K.L. Kompa, L.D. Laude ( Physique, Les Ulis 1986 )

    Google Scholar 

  5. K. Piglmayer: Ph. D. Thesis, Linz (1986)

    Google Scholar 

  6. M. Eyett, D. Bäuerle: unpublished

    Google Scholar 

  7. M. Lax: J. Appl. Phys. 48, 3919 (1977)

    ADS  Google Scholar 

  8. M. Lax: Appl. Phys. Lett. 33, 786 (1978)

    ADS  Google Scholar 

  9. H.E. Cline, T.P. Anthony: J. Appl. Phys. 48, 3895 (1977)

    ADS  Google Scholar 

  10. Y.I. Nissim, A. Lietola, R.B. Gold, J.F. Gibbons: J. Appl. Phys. 51, 274 (1980)

    ADS  Google Scholar 

  11. J.E. Moody, R.H. Hendel: J. Appl. Phys. 53, 4364 (1982)

    ADS  Google Scholar 

  12. F. Stern: J. Appl. Phys. 44, 4204 (1973)

    ADS  Google Scholar 

  13. M. Sparks: J. Appl. Phys. 47, 837 (1976)

    ADS  Google Scholar 

  14. F. Ferrieu, G. Auvert: J. Appl. Phys. 54, 2646 (1983)

    ADS  Google Scholar 

  15. R.F. Wood, G.E. Giles: Phys. Rev. B 23, 2923 (1981)

    ADS  Google Scholar 

  16. J.H. Batteh: J. Appl. Phys. 53, 75377 1982 )

    Google Scholar 

  17. D.J. Sanders: Appl. Optics 23, 30 (1984)

    ADS  Google Scholar 

  18. S.A. Kokorowski, G.L. Olsen, L.D. Hess: in [2.35], p. 139

    Google Scholar 

  19. F.G. Allen: J. Appl. Phys. 28, 1510 (1957)

    ADS  Google Scholar 

  20. Y.J. Van der Meulen, N.C. Hein: J. Opt. Soc. Am. 64, 804 (1964)

    Google Scholar 

  21. M.O. Lambert, J.M. Koebel, P. Siffert: J. Appl. Phys. 52, 4975 (1981)

    ADS  Google Scholar 

  22. G.E. Jellison, F.A. Modine: Phys. Rev. B 27, 7466 ( 1983 ]

    ADS  Google Scholar 

  23. D.L. Kwong, D.M. Kim: J. Appl. Phys. 54, 366 (1983)

    ADS  Google Scholar 

  24. D.L. Kwong, D.M. Kim: IEEE J. QE-18, 224 (1982)

    Google Scholar 

  25. D.M. Kim, D.L. Kwong, R.R. Shah, D.L. Crosthwait: J. Appl. Phys. 52, 4995 (1981)

    ADS  Google Scholar 

  26. D.M. Kim, D.L. Kwong, R.R. Shah, D.L. Crosthwait: in [2.33], p. 83

    Google Scholar 

  27. I.D. Calder, R. Sue: J. Appl. Phys. 53, 7545 (1982)

    ADS  Google Scholar 

  28. J.P. Colinge, F. Van de Wiele: J. Appl. Phys. 52, 4769 (1981)

    ADS  Google Scholar 

  29. H.S. Carslaw, T.C. Jaeger: Conduction of Heat in Solids (Oxford University Press, New York 1959 )

    Google Scholar 

  30. See e.g., J.M. Ziman: Principles of the Theory of Solids ( Cambridge University Press, London 1972 )

    Google Scholar 

  31. C.Y. Ho, R.W. Powell, P.E. Liley: J. Phys. Chem. 3, Suppl. 1, 588 (1974)

    Google Scholar 

  32. J.F. Osmundsen, C.C. Abele, J.G. Eden: in L2.2], p. 259

    Google Scholar 

  33. S.D. Ferries, H.J. Leamy, J.M. Poate (eds.): Laser-Solid Interactions and Laser Processing ( AIP, New York 1979 )

    Google Scholar 

  34. C.W. White, P.S. Peercy (eds.): Laser and Electron Beam Processing of Materials ( Academic, New York 1980 )

    Google Scholar 

  35. J.F. Gibbons, L.D. Hess, T.W. Sigmon (eds.): Laser and Electron Beam Solid Interactions and Materials Processing ( North-Holland, New York 1981 )

    Google Scholar 

  36. J.M. Poate, J.W. Mayer (eds.): Laser Annealing of Semiconductors ( Academic, New York 1982 )

    Google Scholar 

  37. J. Narayan, W.L. Brown, R.A. Lemons (eds.): Laser-Solid Interactions and Transient Thermal Processing of Materials ( North-Holland, New York 1983 )

    Google Scholar 

  38. A.G. Cullis: Rep. Prog. Phys. 48, 1155 (1985)

    ADS  Google Scholar 

  39. B.R. Appleton, G.K. Celler: Laser and Electron-Beam Interactions with Solids ( North-Holland, New York 1982 )

    Google Scholar 

  40. D. Bauerle, L.D. Laude, M. Wautelet (eds.): Interfaces under Laser Irradiation, Nato ASI Series (M. Nijhoff, Dordrecht 1987 )

    Google Scholar 

  41. G.E. Jellison, F.A. Modine: Appl. Phys. Lett. 41, 180 (1982)

    ADS  Google Scholar 

  42. I.W. Boyd, T.D. Binnie, J.I.B. Wilson, M.J. CoTtes: J. Appl. Phys. 55, 3061 (1984)

    ADS  Google Scholar 

  43. S. Unamuno, M. Toulemonde, P. Siffert: in [2.1], p. 35

    Google Scholar 

  44. W.L. Brown: in L2.341, p. 20; H.M. van Driel: in [2.40j

    Google Scholar 

  45. D. Marsal: Die Numerische Lösung Partieller Differentialgleichungen ( Bibliographisches Institut, Mannheim 1976 )

    MATH  Google Scholar 

  46. A.J. Davies: The Finite Element Method ( Clarendon, Oxford 1980 )

    MATH  Google Scholar 

  47. R.T. Kivaisi, L. Stensland: Appl. Phys. A 27, 233 (1982)

    ADS  Google Scholar 

  48. A. Ben-Shaul, Y. Haas, K.L. Kompa, R.D. Levine: Lasers and Chemical Change, Springer Ser. Chem. Phys., Vol. 10 ( Springer, Berlin, Heidelberg 1981 )

    Google Scholar 

  49. K.L. Kompa, S.D. Smith (eds.): Laser-Induced Processes in Molecules, Springer Ser. Chem. Phys., Vol. 6 ( Springer, Berlin, Heidelberg 1979 )

    Google Scholar 

  50. A.H. Zewail (ed.): Advances in Laser Chemistry, Springer Ser. Chem. Phys., Vol. 3 ( Springer, Berlin, Heidelberg 1978 )

    Google Scholar 

  51. J.I. Steinfeld (ed.): Laser-Induced Chemical Processes ( Plenum, New York 1981 )

    Google Scholar 

  52. V.S. Letokhov: Nonlinear Laser Chemistry, Multiple Photon Excitation, Springer Ser. Chem. Phys., Vol. 22, ( Springer, Berlin, Heidelberg 1983 )

    Google Scholar 

  53. G. Herzberg: Molecular Spectra and Molecular Structure, I. Spectra of Diatomic Molecules ( Van Nostrand Reinhold, New York 1950 )

    Google Scholar 

  54. G. Herzberg: Molecular Spectra and Molecular Structure, II. Infrared and Raman Spectra of Polyatomic Molecules ( Van Nostrand Reinhold, New York 1945 )

    Google Scholar 

  55. G. Herzberg: Molecular Spectra and Molecular Structure, III. Electronic Spectra and Electronic Structure of Polyatomic Molecules ( Van Nostrand Reinhold, New York 1966 )

    Google Scholar 

  56. R. Bersohn: IEEE J. QE-16, 1208 (1980)

    Google Scholar 

  57. J.G. Calvert, J.N. Pitts: Photochemistry ( Wiley, New York 1966 )

    Google Scholar 

  58. H. Walther, K.W. Rothe (eds.): Laser Spectroscopy IV, Springer Ser. Opt. Sci., Vol. 21 ( Springer, Berlin, Heidelberg 1979 )

    Google Scholar 

  59. J.L. Hall, J.L. Carlsten (eds.): Laser Spectroscopy III, Springer Ser. Opt. Sci., Vol. 7 ( Springer, Berlin, Heidelberg 1977 )

    Google Scholar 

  60. J.H. Eberly, P. Lambropoulos (eds.): Multiphoton Processes ( Wiley, New York 1978 )

    Google Scholar 

  61. C.D. Cantrell (ed.): Multiple Photon Excitation and Dissociation of Polyatomic Molecules, Topics Curr. Phys., Vol. 35 ( Springer, Berlin, Heidelberg 1986 )

    Google Scholar 

  62. D.O. Cowan, R.L. Drisko: Elements of Organic Photochemistry ( Plenum, New York 1976 )

    Google Scholar 

  63. D.C. Hanna, M.A. Yuratich, D. Cotter: Nonlinear Optics of Free Atoms and Molecules, Springer Ser. Opt. Sci., Vol. 17 ( Springer, Berlin, Heidelberg 1979 )

    Google Scholar 

  64. S.J.W. Price: in Decomposition of Inorganic and Organometallic Compounds, ed. by C.H. Bamford, C.F.H. Tipper, Chemical Kinetics, Vol. 4 ( Elsevier, Amsterdam 1972 ) p. 197

    Google Scholar 

  65. T. Motooka, S. Gorbatkin, D. Lubben, J.E. Greene: J. Appl. Phys. 58, 4397 (1985)

    ADS  Google Scholar 

  66. J.H. Clark, R.G. Anderson: Appl. Phys. Lett. 32, 46 (1978)

    ADS  Google Scholar 

  67. J.T. Yardley, B. Gitlin, G. Nathanson, A. Rosan: J. Chem. Phys. 74, 370 (1981)

    ADS  Google Scholar 

  68. Y. Rytz-Froidevaux, R.P. Salathé, H.H. Gilgen: in Laser Diagnostics and Photochemical Processing for Semiconductor Devices, ed. by R.M. Osgood, S.R.J. Brueck, H.R. Schlossberg ( North-Holland, New York 1983 ) p. 29

    Google Scholar 

  69. D.B. Geohegan, A.W. McCown, J.G. Eden: in [2.2], p. 93

    Google Scholar 

  70. H.H. Gilgen, T. Cacouris, P.S. Shaw, R.R. Krchnavek, R.M. Osgood: Appl. Phys. A, in press

    Google Scholar 

  71. M. Hirose, S. Yokoyama, Y. Yamakage: J. Vac. Sci. Technol. B 3, 1445 (1985)

    Google Scholar 

  72. D.K. Flynn, J.I. Steinfeld, D.S. Sethi: J. Appl. Phys. 59, 3914 (1986)

    ADS  Google Scholar 

  73. H. Schröder: in Laser Assisted Modification and Synthesis of Materials,Proc. Int. Winter School, Gyuletchitza, Bulgaria 1985, ed. by S. Metev, p. 120

    Google Scholar 

  74. Q. Mingxin, R. Monot, H.v.d. Bergh: Scientia Sinica-A 1, 85 (1985)

    Google Scholar 

  75. H.H. Gilgen, C.J. Chen, R. Krchnavek, R.M. Osgood: in T2.IJ, p. 225

    Google Scholar 

  76. M. Tamir, U. Halavee, R.D. Levine: Chem. Phys. Lett. 25, 38 (1974)

    ADS  Google Scholar 

  77. C. Jonah, P. Chandra, R. Bersohn: J. Chem. Phys. 55, 1903 (1971)

    ADS  Google Scholar 

  78. M.A. Duncan, T.G. Dietz, R.E. Smalley: Chem. Phys. 44, 415 (1979)

    Google Scholar 

  79. T.A. Seder, S.P. Church, A.J. Ouderkirk, E. Weitz: J. Am. Chem. Soc. 107, 1432 (1985)

    Google Scholar 

  80. W.H. Breckenridge, N. Sinai: J. Chem. Phys. 85, 3557 (1981)

    Google Scholar 

  81. Z. Karny, R. Naaman, R.N. Zare: Chem. Phys. Lett. 59, 33 (1978)

    ADS  Google Scholar 

  82. D.P. Gerrity, L.J. Rothberg, V. Vaida: Chem. Phys. Lett. 74, 1 (1980)

    ADS  Google Scholar 

  83. G.J. Fisanick, A. Gedanken, T.S. Eichelberger, N.A. Kuebler, M.B. Robin: J. Chem. Phys. 75, 5215 (1981)

    ADS  Google Scholar 

  84. T.R. Fletcher, R.N. Rosenfeld: J. Am. Chem. Soc. 105, 6358 (1983)

    Google Scholar 

  85. E.E. Marinero, C.R. Jones: J. Chem. Phys. 82, 160T-11985)

    Google Scholar 

  86. H. Schroder, I. Gianinoni, D. Masci, K.L. Kompa in [2.1], p. 257

    Google Scholar 

  87. M.C. Heaven, M.A.A. Clyne: J. Chem. Soc., Faraday. Trans. 2, 78, 1339 (1982)

    Google Scholar 

  88. M.A.A. Clyne, I.S. McDermick: J. Chem. Soc., Faraday Trans. 2, 75, 1677 (1979)

    Google Scholar 

  89. S. Leone: J. Phys. Chem. 85, 3844 (1981)

    Google Scholar 

  90. G.L. Loper, M.D. Tabat: Appl. Phys. Lett. 46, 654 (1985)

    ADS  Google Scholar 

  91. G.L. Loper, M.D. Tabat: SPIE 459, 121 ( 1984 ]

    Google Scholar 

  92. G.L. Loper, M.D. Tabat: J. App. Phys. 58, 3649 (1985)

    ADS  Google Scholar 

  93. D.A. Armstrong, J.L. Holmes: in [2.64], p. 143

    Google Scholar 

  94. T.F. Deutsch, D.D. Rathman: Appl. Phys. Lett. 45, 623 (1984) 2.95 T.F. Deutsch: in [2.1], p. 239

    Google Scholar 

  95. G.G.A. Perkins, E.R. Austin, F.W. Lampe: J. Am. Chem. Soc. 101, 1109 (1979)

    Google Scholar 

  96. M.P. Irion, K.L. Kompa: Appl. Phys. B 27, 183 (1982)

    ADS  Google Scholar 

  97. N.R. Greiner: J. Chem. Phys. 47, 4373 X967 )

    Google Scholar 

  98. K.F. Preston, R.J. Cvetanovic: in [2.64], p. 47

    Google Scholar 

  99. M. Zelikoff, L.M. Aschenbrand: J. Chem. Phys. 52, 1680 (1974)

    Google Scholar 

  100. H.S. Johnston, R. Craham: Can. J. Chem. 52, 1680 (1974)

    Google Scholar 

  101. K.F. Preston, R.F. Barr: J. Chem. Phys. 54, 3347 (1971)

    ADS  Google Scholar 

  102. J. Zavelovich, M. Rothschild, W. Gornik, C.K. Rhodes: J. Chem. Phys. 74, 6787 (1981)

    ADS  Google Scholar 

  103. V.M. Donnelly, A.P. Boronanski, J.R. McDonald: Chem. Phys. 43, 271 (1979)

    Google Scholar 

  104. H. Niki, G.J. Mains: J. Phys. Chem. 68, 304 (1964)

    Google Scholar 

  105. Y. Rousseau, G.J. Mains: J. Phys. Chem. 70, 3158 (1966)

    Google Scholar 

  106. S.J.C. Irvine, J.B. Mullin, J. Tunnicliffe: in [2.1], p. 234

    Google Scholar 

  107. S.J.C. Irvine, J.B. Mullin, J. Tunnicliffe: J. Cryst. Growth 68, 188 (1984)

    ADS  Google Scholar 

  108. N. Bloembergen, E. Yablanovitch: Phys. Today, May, 23 (1978)

    Google Scholar 

  109. V.S. Letokhov, A.A. Makarov: Sov. Phys.-Usp. 24, 366 (1981)

    ADS  Google Scholar 

  110. P.J. Robinson, K.A. Holbrook: Unimolecular Reactions ( Wiley, New York 1972 )

    Google Scholar 

  111. R.V. Ambartsumyan, V.S. Letokhov: in Chemical and Biochemical Applications of Lasers, Vol. 3, ed. by C.B. Moore ( Academic, New York 1977 ) p. 167

    Google Scholar 

  112. D.M. Cox: Optics Commun. 24, 336 (1978)

    ADS  Google Scholar 

  113. S.D. Smith, W.E. Schmid, F.M.G. Tablas, K.L. Kompa: in [2. 49j, p. 121

    Google Scholar 

  114. M. Meunier, J.H. Flint, D. Adler, J.S. Haggerty: in [2.2], p. 397

    Google Scholar 

  115. T.F. Deutsch: J. Chem. Phys. 70, 1187 (1979)

    ADS  Google Scholar 

  116. P.A. Longeway, F.W. Lampe: J. Am. Chem. Soc. 103 6813 (1981)

    Google Scholar 

  117. M. Hanabusa, A. Namiki, K. Yoshihara: Appl. Phys. Lett. 35, 626 (1979)

    ADS  Google Scholar 

  118. M. Hanabusa, H. Kikuchi, T. Iwanaga, K. Sugai: in 2. 1j, p. 197

    Google Scholar 

  119. M. Hanabusa, H. Kikuchi, T. Iwanaga, K. Sugai: in [2.2], p. 21

    Google Scholar 

  120. R.V. Ambartsumyan, Y.A. Gorokhov, V.S. Letokhov, G.N. Markarov, A.A. Puretskii: Sov. Phys.-JETP 44, 231 (1976)

    ADS  Google Scholar 

  121. I. Burk, P. Houston, D.G. Sutton,-J.I. Steinfeld: J. Chem. Phys. 53, 3632 (1970)

    ADS  Google Scholar 

  122. H.S. Kwok, E. Yablonovitch: Phys. Rev. Lett. 41, 745 (1978)

    ADS  Google Scholar 

  123. W. Fuss, T.P. Cotter: Appl. Phys. 12, 265 (1977)

    ADS  Google Scholar 

  124. V.N. Bagratashvili, I.N. Kuyazev, V.S. Letokhov, V.V. Lobko: Opt. Commun. 18, 525 (1976)

    ADS  Google Scholar 

  125. P.A. Schulz, Â.S. Sudbo, E.R. Grant, Y.R. Shen, Y.T. Lee: J. Chem. Phys. 72, 4985 (1980)

    ADS  Google Scholar 

  126. E.R. Grant, M.J. Coggiola, Y.T. Lee, P.A. Schulz, A. Sudbo, Y.R. Shen: Chem. Phys. Lett. 52, 595 (1977)

    ADS  Google Scholar 

  127. P.A. Schulz, A.S. Sudbo, D.J. Krajnovich, H.S. Kwok, Y.R. Shen, Y.T. Lee: Annu. Rev. Phys. Chem. 30, 379 (1979)

    ADS  Google Scholar 

  128. T.J. Chuang: IBM J. Res. Dev. 26, 145 (1982)

    Google Scholar 

  129. F.A. Houle, T.J. Chuang: J. Vac. Sci. Technol. 20, 790 (1982)

    ADS  Google Scholar 

  130. T.J. Chuang: in [2.2], p. 185

    Google Scholar 

  131. T.J. Chuang: in [2.68], p. 45

    Google Scholar 

  132. T.J. Chuang: J. Chem. Phys. 74, 1453 (1981)

    ADS  Google Scholar 

  133. V.N. Bagratashvili, V.S. Doljikov, V.S. Letokhov, E.A. Ryabov: Zh. Tekh. Fiz., Pis’ma Red. 4, 1181 (1978)

    Google Scholar 

  134. I.P. Herman, J.B. Marling: Chem. Phys. Lett. 64, 75 (1979)

    ADS  Google Scholar 

  135. H. Schröder, S. Metev, W. Robers, B. Rager: in [2.4]

    Google Scholar 

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Bäuerle, D. (1986). Fundamental Excitation Mechanisms. In: Chemical Processing with Lasers. Springer Series in Materials Science, vol 1. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-02505-5_2

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