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Fundamental Excitation Mechanisms

  • Dieter Bäuerle
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 1)

Abstract

Laser-induced chemical reactions can be based on several fundamentally different microscopic mechanisms. In the following we shall classify reactions into those which are governed by mainly pyrolytic (photothermal) or by mainly photolytic (photochemical) processes. We shall call a reaction pyrolytic if the thermalization of the laser excitation is fast compared to the reaction, and photolytic if this is not the case, i.e. when the constituents of the reaction are in nonequilibrium states. The laser excitation can take place within the ambient gaseous or liquid medium and/or directly within the surface of the solid material (substrate) to be processed. In many cases the different mechanisms and possibilities of excitation contribute simultaneously to the reaction, but often one of them dominates. There are also many examples where, for example, a reaction is initiated photolytically and proceeds pyrolytically, or vice versa.

Keywords

Vibrational Energy Laser Fluence Polyatomic Molecule Vibrational Excitation Full Curve 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 2.1
    D. Bauerle: in Laser Processing and Diagnostics, ed. by D. Bauerle, Springer Ser. Chem. Phys., Vol. 39 (Springer, Berlin, Heidelberg 1984 ) p. 166Google Scholar
  2. 2.2
    K. Piglmayer, J. Doppelbauer, D. Bauerle: in Laser Controlled Chemical Processing of Surfaces, ed. by A.W. Johnson, D.J. Ehrlich, H.R. Schloss-berg ( North-Holland, New York 1984 ) p. 47Google Scholar
  3. 2.3
    F. Petzoldt, K. Piglmayer, W. Kräuter, D. Bauerle: Appl. Phys. A 35, 155 (1984)ADSGoogle Scholar
  4. 2.4
    K. Piglmayer, D. Bauerle: in Laser Processing and Diagnostics II, ed. by D. Bauerle, K.L. Kompa, L.D. Laude ( Physique, Les Ulis 1986 )Google Scholar
  5. 2.5
    K. Piglmayer: Ph. D. Thesis, Linz (1986)Google Scholar
  6. 2.
    M. Eyett, D. Bäuerle: unpublishedGoogle Scholar
  7. 2.7
    M. Lax: J. Appl. Phys. 48, 3919 (1977)ADSGoogle Scholar
  8. 2.8
    M. Lax: Appl. Phys. Lett. 33, 786 (1978)ADSGoogle Scholar
  9. 2.9
    H.E. Cline, T.P. Anthony: J. Appl. Phys. 48, 3895 (1977)ADSGoogle Scholar
  10. 2.10
    Y.I. Nissim, A. Lietola, R.B. Gold, J.F. Gibbons: J. Appl. Phys. 51, 274 (1980)ADSGoogle Scholar
  11. 2.11
    J.E. Moody, R.H. Hendel: J. Appl. Phys. 53, 4364 (1982)ADSGoogle Scholar
  12. 2.12
    F. Stern: J. Appl. Phys. 44, 4204 (1973)ADSGoogle Scholar
  13. 2.13
    M. Sparks: J. Appl. Phys. 47, 837 (1976)ADSGoogle Scholar
  14. 2.14
    F. Ferrieu, G. Auvert: J. Appl. Phys. 54, 2646 (1983)ADSGoogle Scholar
  15. 2.15
    R.F. Wood, G.E. Giles: Phys. Rev. B 23, 2923 (1981)ADSGoogle Scholar
  16. 2.16
    J.H. Batteh: J. Appl. Phys. 53, 75377 1982 )Google Scholar
  17. 2.17
    D.J. Sanders: Appl. Optics 23, 30 (1984)ADSGoogle Scholar
  18. 2.
    S.A. Kokorowski, G.L. Olsen, L.D. Hess: in [2.35], p. 139Google Scholar
  19. 2.19
    F.G. Allen: J. Appl. Phys. 28, 1510 (1957)ADSGoogle Scholar
  20. 2.20
    Y.J. Van der Meulen, N.C. Hein: J. Opt. Soc. Am. 64, 804 (1964)Google Scholar
  21. 2.21
    M.O. Lambert, J.M. Koebel, P. Siffert: J. Appl. Phys. 52, 4975 (1981)ADSGoogle Scholar
  22. 2.22
    G.E. Jellison, F.A. Modine: Phys. Rev. B 27, 7466 ( 1983 ]ADSGoogle Scholar
  23. 2.23
    D.L. Kwong, D.M. Kim: J. Appl. Phys. 54, 366 (1983)ADSGoogle Scholar
  24. 2.24
    D.L. Kwong, D.M. Kim: IEEE J. QE-18, 224 (1982)Google Scholar
  25. 2.25
    D.M. Kim, D.L. Kwong, R.R. Shah, D.L. Crosthwait: J. Appl. Phys. 52, 4995 (1981)ADSGoogle Scholar
  26. 2.
    D.M. Kim, D.L. Kwong, R.R. Shah, D.L. Crosthwait: in [2.33], p. 83Google Scholar
  27. 2.27
    I.D. Calder, R. Sue: J. Appl. Phys. 53, 7545 (1982)ADSGoogle Scholar
  28. 2.28
    J.P. Colinge, F. Van de Wiele: J. Appl. Phys. 52, 4769 (1981)ADSGoogle Scholar
  29. 2.29
    H.S. Carslaw, T.C. Jaeger: Conduction of Heat in Solids (Oxford University Press, New York 1959 )Google Scholar
  30. 2.30
    See e.g., J.M. Ziman: Principles of the Theory of Solids ( Cambridge University Press, London 1972 )Google Scholar
  31. 2.31
    C.Y. Ho, R.W. Powell, P.E. Liley: J. Phys. Chem. 3, Suppl. 1, 588 (1974)Google Scholar
  32. 2.
    J.F. Osmundsen, C.C. Abele, J.G. Eden: in L2.2], p. 259Google Scholar
  33. 2.33
    S.D. Ferries, H.J. Leamy, J.M. Poate (eds.): Laser-Solid Interactions and Laser Processing ( AIP, New York 1979 )Google Scholar
  34. 2.34
    C.W. White, P.S. Peercy (eds.): Laser and Electron Beam Processing of Materials ( Academic, New York 1980 )Google Scholar
  35. 2.35
    J.F. Gibbons, L.D. Hess, T.W. Sigmon (eds.): Laser and Electron Beam Solid Interactions and Materials Processing ( North-Holland, New York 1981 )Google Scholar
  36. 2.36
    J.M. Poate, J.W. Mayer (eds.): Laser Annealing of Semiconductors ( Academic, New York 1982 )Google Scholar
  37. 2.37
    J. Narayan, W.L. Brown, R.A. Lemons (eds.): Laser-Solid Interactions and Transient Thermal Processing of Materials ( North-Holland, New York 1983 )Google Scholar
  38. 2.38
    A.G. Cullis: Rep. Prog. Phys. 48, 1155 (1985)ADSGoogle Scholar
  39. 2.39
    B.R. Appleton, G.K. Celler: Laser and Electron-Beam Interactions with Solids ( North-Holland, New York 1982 )Google Scholar
  40. 2.40
    D. Bauerle, L.D. Laude, M. Wautelet (eds.): Interfaces under Laser Irradiation, Nato ASI Series (M. Nijhoff, Dordrecht 1987 )Google Scholar
  41. 2.41
    G.E. Jellison, F.A. Modine: Appl. Phys. Lett. 41, 180 (1982)ADSGoogle Scholar
  42. 2.42
    I.W. Boyd, T.D. Binnie, J.I.B. Wilson, M.J. CoTtes: J. Appl. Phys. 55, 3061 (1984)ADSGoogle Scholar
  43. 2.
    S. Unamuno, M. Toulemonde, P. Siffert: in [2.1], p. 35Google Scholar
  44. 2.
    W.L. Brown: in L2.341, p. 20; H.M. van Driel: in [2.40jGoogle Scholar
  45. 2.45
    D. Marsal: Die Numerische Lösung Partieller Differentialgleichungen ( Bibliographisches Institut, Mannheim 1976 )MATHGoogle Scholar
  46. 2.46
    A.J. Davies: The Finite Element Method ( Clarendon, Oxford 1980 )MATHGoogle Scholar
  47. 2.47
    R.T. Kivaisi, L. Stensland: Appl. Phys. A 27, 233 (1982)ADSGoogle Scholar
  48. 2.48
    A. Ben-Shaul, Y. Haas, K.L. Kompa, R.D. Levine: Lasers and Chemical Change, Springer Ser. Chem. Phys., Vol. 10 ( Springer, Berlin, Heidelberg 1981 )Google Scholar
  49. 2.49
    K.L. Kompa, S.D. Smith (eds.): Laser-Induced Processes in Molecules, Springer Ser. Chem. Phys., Vol. 6 ( Springer, Berlin, Heidelberg 1979 )Google Scholar
  50. 2.50
    A.H. Zewail (ed.): Advances in Laser Chemistry, Springer Ser. Chem. Phys., Vol. 3 ( Springer, Berlin, Heidelberg 1978 )Google Scholar
  51. 2.51
    J.I. Steinfeld (ed.): Laser-Induced Chemical Processes ( Plenum, New York 1981 )Google Scholar
  52. 2.52
    V.S. Letokhov: Nonlinear Laser Chemistry, Multiple Photon Excitation, Springer Ser. Chem. Phys., Vol. 22, ( Springer, Berlin, Heidelberg 1983 )Google Scholar
  53. 2.53
    G. Herzberg: Molecular Spectra and Molecular Structure, I. Spectra of Diatomic Molecules ( Van Nostrand Reinhold, New York 1950 )Google Scholar
  54. 2.54
    G. Herzberg: Molecular Spectra and Molecular Structure, II. Infrared and Raman Spectra of Polyatomic Molecules ( Van Nostrand Reinhold, New York 1945 )Google Scholar
  55. 2.55
    G. Herzberg: Molecular Spectra and Molecular Structure, III. Electronic Spectra and Electronic Structure of Polyatomic Molecules ( Van Nostrand Reinhold, New York 1966 )Google Scholar
  56. 2.56
    R. Bersohn: IEEE J. QE-16, 1208 (1980)Google Scholar
  57. 2.57
    J.G. Calvert, J.N. Pitts: Photochemistry ( Wiley, New York 1966 )Google Scholar
  58. 2.58
    H. Walther, K.W. Rothe (eds.): Laser Spectroscopy IV, Springer Ser. Opt. Sci., Vol. 21 ( Springer, Berlin, Heidelberg 1979 )Google Scholar
  59. 2.59
    J.L. Hall, J.L. Carlsten (eds.): Laser Spectroscopy III, Springer Ser. Opt. Sci., Vol. 7 ( Springer, Berlin, Heidelberg 1977 )Google Scholar
  60. 2.60
    J.H. Eberly, P. Lambropoulos (eds.): Multiphoton Processes ( Wiley, New York 1978 )Google Scholar
  61. 2.61
    C.D. Cantrell (ed.): Multiple Photon Excitation and Dissociation of Polyatomic Molecules, Topics Curr. Phys., Vol. 35 ( Springer, Berlin, Heidelberg 1986 )Google Scholar
  62. 2.62
    D.O. Cowan, R.L. Drisko: Elements of Organic Photochemistry ( Plenum, New York 1976 )Google Scholar
  63. 2.63
    D.C. Hanna, M.A. Yuratich, D. Cotter: Nonlinear Optics of Free Atoms and Molecules, Springer Ser. Opt. Sci., Vol. 17 ( Springer, Berlin, Heidelberg 1979 )Google Scholar
  64. 2.64
    S.J.W. Price: in Decomposition of Inorganic and Organometallic Compounds, ed. by C.H. Bamford, C.F.H. Tipper, Chemical Kinetics, Vol. 4 ( Elsevier, Amsterdam 1972 ) p. 197Google Scholar
  65. 2.65
    T. Motooka, S. Gorbatkin, D. Lubben, J.E. Greene: J. Appl. Phys. 58, 4397 (1985)ADSGoogle Scholar
  66. 2.66
    J.H. Clark, R.G. Anderson: Appl. Phys. Lett. 32, 46 (1978)ADSGoogle Scholar
  67. 2.67
    J.T. Yardley, B. Gitlin, G. Nathanson, A. Rosan: J. Chem. Phys. 74, 370 (1981)ADSGoogle Scholar
  68. 2.68
    Y. Rytz-Froidevaux, R.P. Salathé, H.H. Gilgen: in Laser Diagnostics and Photochemical Processing for Semiconductor Devices, ed. by R.M. Osgood, S.R.J. Brueck, H.R. Schlossberg ( North-Holland, New York 1983 ) p. 29Google Scholar
  69. 2.
    D.B. Geohegan, A.W. McCown, J.G. Eden: in [2.2], p. 93Google Scholar
  70. 2.
    H.H. Gilgen, T. Cacouris, P.S. Shaw, R.R. Krchnavek, R.M. Osgood: Appl. Phys. A, in pressGoogle Scholar
  71. 2.71
    M. Hirose, S. Yokoyama, Y. Yamakage: J. Vac. Sci. Technol. B 3, 1445 (1985)Google Scholar
  72. 2.72
    D.K. Flynn, J.I. Steinfeld, D.S. Sethi: J. Appl. Phys. 59, 3914 (1986)ADSGoogle Scholar
  73. 2.73
    H. Schröder: in Laser Assisted Modification and Synthesis of Materials,Proc. Int. Winter School, Gyuletchitza, Bulgaria 1985, ed. by S. Metev, p. 120Google Scholar
  74. 2.74
    Q. Mingxin, R. Monot, H.v.d. Bergh: Scientia Sinica-A 1, 85 (1985)Google Scholar
  75. 2.75
    H.H. Gilgen, C.J. Chen, R. Krchnavek, R.M. Osgood: in T2.IJ, p. 225Google Scholar
  76. 2.76
    M. Tamir, U. Halavee, R.D. Levine: Chem. Phys. Lett. 25, 38 (1974)ADSGoogle Scholar
  77. 2.77
    C. Jonah, P. Chandra, R. Bersohn: J. Chem. Phys. 55, 1903 (1971)ADSGoogle Scholar
  78. 2.78
    M.A. Duncan, T.G. Dietz, R.E. Smalley: Chem. Phys. 44, 415 (1979)Google Scholar
  79. 2.79
    T.A. Seder, S.P. Church, A.J. Ouderkirk, E. Weitz: J. Am. Chem. Soc. 107, 1432 (1985)Google Scholar
  80. 2.80
    W.H. Breckenridge, N. Sinai: J. Chem. Phys. 85, 3557 (1981)Google Scholar
  81. 2.81
    Z. Karny, R. Naaman, R.N. Zare: Chem. Phys. Lett. 59, 33 (1978)ADSGoogle Scholar
  82. 2.82
    D.P. Gerrity, L.J. Rothberg, V. Vaida: Chem. Phys. Lett. 74, 1 (1980)ADSGoogle Scholar
  83. 2.83
    G.J. Fisanick, A. Gedanken, T.S. Eichelberger, N.A. Kuebler, M.B. Robin: J. Chem. Phys. 75, 5215 (1981)ADSGoogle Scholar
  84. 2.84
    T.R. Fletcher, R.N. Rosenfeld: J. Am. Chem. Soc. 105, 6358 (1983)Google Scholar
  85. 2.
    E.E. Marinero, C.R. Jones: J. Chem. Phys. 82, 160T-11985)Google Scholar
  86. 2.
    H. Schroder, I. Gianinoni, D. Masci, K.L. Kompa in [2.1], p. 257Google Scholar
  87. 2.87
    M.C. Heaven, M.A.A. Clyne: J. Chem. Soc., Faraday. Trans. 2, 78, 1339 (1982)Google Scholar
  88. 2.88
    M.A.A. Clyne, I.S. McDermick: J. Chem. Soc., Faraday Trans. 2, 75, 1677 (1979)Google Scholar
  89. 2.89
    S. Leone: J. Phys. Chem. 85, 3844 (1981)Google Scholar
  90. 2.90
    G.L. Loper, M.D. Tabat: Appl. Phys. Lett. 46, 654 (1985)ADSGoogle Scholar
  91. 2.91
    G.L. Loper, M.D. Tabat: SPIE 459, 121 ( 1984 ]Google Scholar
  92. 2.92
    G.L. Loper, M.D. Tabat: J. App. Phys. 58, 3649 (1985)ADSGoogle Scholar
  93. 2.
    D.A. Armstrong, J.L. Holmes: in [2.64], p. 143Google Scholar
  94. 2.94
    T.F. Deutsch, D.D. Rathman: Appl. Phys. Lett. 45, 623 (1984) 2.95 T.F. Deutsch: in [2.1], p. 239Google Scholar
  95. 2.96
    G.G.A. Perkins, E.R. Austin, F.W. Lampe: J. Am. Chem. Soc. 101, 1109 (1979)Google Scholar
  96. 2.97
    M.P. Irion, K.L. Kompa: Appl. Phys. B 27, 183 (1982)ADSGoogle Scholar
  97. 2.98
    N.R. Greiner: J. Chem. Phys. 47, 4373 X967 )Google Scholar
  98. 2.
    K.F. Preston, R.J. Cvetanovic: in [2.64], p. 47Google Scholar
  99. 2.100
    M. Zelikoff, L.M. Aschenbrand: J. Chem. Phys. 52, 1680 (1974)Google Scholar
  100. 2.101
    H.S. Johnston, R. Craham: Can. J. Chem. 52, 1680 (1974)Google Scholar
  101. 2.102
    K.F. Preston, R.F. Barr: J. Chem. Phys. 54, 3347 (1971)ADSGoogle Scholar
  102. 2.103
    J. Zavelovich, M. Rothschild, W. Gornik, C.K. Rhodes: J. Chem. Phys. 74, 6787 (1981)ADSGoogle Scholar
  103. 2.104
    V.M. Donnelly, A.P. Boronanski, J.R. McDonald: Chem. Phys. 43, 271 (1979)Google Scholar
  104. 2.105
    H. Niki, G.J. Mains: J. Phys. Chem. 68, 304 (1964)Google Scholar
  105. 2.106
    Y. Rousseau, G.J. Mains: J. Phys. Chem. 70, 3158 (1966)Google Scholar
  106. 2.
    S.J.C. Irvine, J.B. Mullin, J. Tunnicliffe: in [2.1], p. 234Google Scholar
  107. 2.108
    S.J.C. Irvine, J.B. Mullin, J. Tunnicliffe: J. Cryst. Growth 68, 188 (1984)ADSGoogle Scholar
  108. 2.109
    N. Bloembergen, E. Yablanovitch: Phys. Today, May, 23 (1978)Google Scholar
  109. 2.110
    V.S. Letokhov, A.A. Makarov: Sov. Phys.-Usp. 24, 366 (1981)ADSGoogle Scholar
  110. 2.111
    P.J. Robinson, K.A. Holbrook: Unimolecular Reactions ( Wiley, New York 1972 )Google Scholar
  111. 2.112
    R.V. Ambartsumyan, V.S. Letokhov: in Chemical and Biochemical Applications of Lasers, Vol. 3, ed. by C.B. Moore ( Academic, New York 1977 ) p. 167Google Scholar
  112. 2.113
    D.M. Cox: Optics Commun. 24, 336 (1978)ADSGoogle Scholar
  113. 2.114
    S.D. Smith, W.E. Schmid, F.M.G. Tablas, K.L. Kompa: in [2. 49j, p. 121Google Scholar
  114. 2.
    M. Meunier, J.H. Flint, D. Adler, J.S. Haggerty: in [2.2], p. 397Google Scholar
  115. 2.116
    T.F. Deutsch: J. Chem. Phys. 70, 1187 (1979)ADSGoogle Scholar
  116. 2.117
    P.A. Longeway, F.W. Lampe: J. Am. Chem. Soc. 103 6813 (1981)Google Scholar
  117. 2.118
    M. Hanabusa, A. Namiki, K. Yoshihara: Appl. Phys. Lett. 35, 626 (1979)ADSGoogle Scholar
  118. 2.119
    M. Hanabusa, H. Kikuchi, T. Iwanaga, K. Sugai: in 2. 1j, p. 197Google Scholar
  119. 2.
    M. Hanabusa, H. Kikuchi, T. Iwanaga, K. Sugai: in [2.2], p. 21Google Scholar
  120. 2.121
    R.V. Ambartsumyan, Y.A. Gorokhov, V.S. Letokhov, G.N. Markarov, A.A. Puretskii: Sov. Phys.-JETP 44, 231 (1976)ADSGoogle Scholar
  121. 2.122
    I. Burk, P. Houston, D.G. Sutton,-J.I. Steinfeld: J. Chem. Phys. 53, 3632 (1970)ADSGoogle Scholar
  122. 2.123
    H.S. Kwok, E. Yablonovitch: Phys. Rev. Lett. 41, 745 (1978)ADSGoogle Scholar
  123. 2.124
    W. Fuss, T.P. Cotter: Appl. Phys. 12, 265 (1977)ADSGoogle Scholar
  124. 2.125
    V.N. Bagratashvili, I.N. Kuyazev, V.S. Letokhov, V.V. Lobko: Opt. Commun. 18, 525 (1976)ADSGoogle Scholar
  125. 2.126
    P.A. Schulz, Â.S. Sudbo, E.R. Grant, Y.R. Shen, Y.T. Lee: J. Chem. Phys. 72, 4985 (1980)ADSGoogle Scholar
  126. 2.127
    E.R. Grant, M.J. Coggiola, Y.T. Lee, P.A. Schulz, A. Sudbo, Y.R. Shen: Chem. Phys. Lett. 52, 595 (1977)ADSGoogle Scholar
  127. 2.128
    P.A. Schulz, A.S. Sudbo, D.J. Krajnovich, H.S. Kwok, Y.R. Shen, Y.T. Lee: Annu. Rev. Phys. Chem. 30, 379 (1979)ADSGoogle Scholar
  128. 2.129
    T.J. Chuang: IBM J. Res. Dev. 26, 145 (1982)Google Scholar
  129. 2.130
    F.A. Houle, T.J. Chuang: J. Vac. Sci. Technol. 20, 790 (1982)ADSGoogle Scholar
  130. 2.
    T.J. Chuang: in [2.2], p. 185Google Scholar
  131. 2.
    T.J. Chuang: in [2.68], p. 45Google Scholar
  132. 2.133
    T.J. Chuang: J. Chem. Phys. 74, 1453 (1981)ADSGoogle Scholar
  133. 2.134
    V.N. Bagratashvili, V.S. Doljikov, V.S. Letokhov, E.A. Ryabov: Zh. Tekh. Fiz., Pis’ma Red. 4, 1181 (1978)Google Scholar
  134. 2.135
    I.P. Herman, J.B. Marling: Chem. Phys. Lett. 64, 75 (1979)ADSGoogle Scholar
  135. 2.136
    H. Schröder, S. Metev, W. Robers, B. Rager: in [2.4]Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1986

Authors and Affiliations

  • Dieter Bäuerle
    • 1
  1. 1.Angewandte PhysikJohannes-Kepler-Universität LinzLinzAustria

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