Abstract
Very few methods are available for direct in-situ investigation of crystal growth mechanisms at the atomic level, but the forward scattering geometry of reflection high energy electron diffraction (RHEED) is particularly well suited to studies of molecular beam epitaxy (MBE) growth dynamics. After describing the basic concepts of the RHEED intensity oscillation technique, the influence of multiple scattering effects on the form of the oscillations is demonstrated. It is then shown how the relative contributions of the various diffraction processes involved can be used to derive models of growth dynamics, treating GaAs (001) films as an example.
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References
A.Y. Cho: J. Appl. Phys 47, 2841 (1976)
J.H. Neave and B.A. Joyce: J. Crystal Growth 44, 387 (1978)
B.A. Joyce, J.H. Neave, P.J. Dobson and P.K. Larsen: Phys. Rev. B29, 814 (1984)
J.H. Neave, B.A. Joyce, P.J. Dobson and N. Norton: Appl. Phys. A31, 1 (1983)
J.M. Van Hove, C.S. Lent, P.R. Pukite and P.I. Cohen: J. Vacuum Sci. Technol. B1, 741 (1983)
C.S. Lent and P.I. Cohen: Surface Scl. 139, 121 (1984)
S.V. Glaisas and A. Madhukar: J. Vac. Sci. Technol. B3, 540 (1985)
B.F. Lewis, T.C. Lee, F.J. Grunthaner, A. Madhukar, R. Fernandez and J. Maserjian: J. Vac. Sci. Technol. B2, 419 (1984)
T. Sakamoto, N.J. Kawai, T. Nakagawa, K. Ohta and T. Kojima: Appl. Phys. Lett. 47, 617 (1985)
Y. Namba, R.W. Vook and S.S. Chao: Surface Sci. 109, 320 (1981)
K.D. Grönwald and M. Hensler: Surfacc Sci. 117, 180 (1982)
V. Bostanov, R. Roussinova and E. Buderski: J. Electrochem. Soc. 119, 1346 (1972)
L.J. Gómez, S. Bourgeal, J. Ibafiez and M. Salmeron: Phys. Rev. B31, 2551 (1985)
P.A. Maksym and J.L. Beeby: Surface Sci. 110, 423 (1981)
P.K. Larsen, P.J. Dobson, J.H. Neave, B.A. Joyce, B. Bblger and J. Zhang: Surface Sci., in the press
B.A. Joyce, P.J. Dobson, J.H. Neave, K. Woodbridge, J. Zhang, P.K. Larsen and B. Bölger: Surface Sci., in the press
C.T. Foxon and B.A. Joyce: Surface Sci. 50, 435 (1975)
C.T. Foxon and B.A. Joyce: Surface Sci. 64, 298 (1977)
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© 1986 Springer-Verlag Berlin Heidelberg
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Joyce, B.A., Dobson, P.J., Neave, J.H., Zhang, J. (1986). In Situ Study of MBE Growth Mechanisms Using RHEED Techniques — Some Consequences of Multiple Scattering. In: Bauer, G., Kuchar, F., Heinrich, H. (eds) Two-Dimensional Systems: Physics and New Devices. Springer Series in Solid-State Sciences, vol 67. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-02470-6_5
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DOI: https://doi.org/10.1007/978-3-662-02470-6_5
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-02472-0
Online ISBN: 978-3-662-02470-6
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