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New Epitaxial Growth Methods and Their Application to Quantum Wells and 2DEG Structures

  • Y. Horikoshi
  • N. Kobayashi
  • H. Sugiura
Conference paper
Part of the Springer Series in Solid-State Sciences book series (SSSOL, volume 67)

Abstract

New thin film epitaxial growth methods have been developed which provide the possibility of accurately controlling thicknesses and doping profiles. These methods can be applied to 2DEG structures having a modulation doped single heterojunction, and those having an asymmetric quantum well doped with an atomic layer profile.

Keywords

Molecular Beam Epitaxy GaAs Layer Flow Rate Region MOCVD Method Single Heterojunction 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. /1/.
    T. Suntola: Extended Abstract of 16th Conf. Solid, State Devices & Materials (Kobe, Japan) p.647.Google Scholar
  2. /2/.
    J. Nishizawa, H. Abe and T. Kurabayashi: J. Electrochem. Soc. 132 (1985) 1197.CrossRefGoogle Scholar
  3. /3/.
    N. Kobayashi, T. Makimoto and Y. Horikoshi: Jpn. J. Appl. Phys. 24 (1985) L962.CrossRefGoogle Scholar
  4. /4/.
    M. B. Panish: J. Electrochem. Soc. 127 (1980) 2729.CrossRefGoogle Scholar
  5. /5/.
    B. J. Skromme, G. L. Stillman, A. R. Calawa and G. M. Metze: Appl. Phys, Lett. 44 (1984) 240.CrossRefGoogle Scholar
  6. /6/.
    A. R. Calawa: Appl. Phys. Lett. 33 (1978) 1020.CrossRefGoogle Scholar
  7. /7/.
    K. Kondo, S. Muto, K. Nanbu, T. Ishikawa, S. Hiyamizu, and H. Hashimoto: Jpn. J. Appl. Phys. 22 (1983) L121.CrossRefGoogle Scholar
  8. /8/.
    T. Makimoto, N. Kobayashi and Y. Horikoshi: to be published in Jpn. J. Appl Phys.Google Scholar
  9. /9/.
    Y. Horikoshi, A. Fischer and K. Ploog: to be published in Jpn. J. Appl. Phys.Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1986

Authors and Affiliations

  • Y. Horikoshi
    • 1
  • N. Kobayashi
    • 1
  • H. Sugiura
    • 1
  1. 1.NTT Research LaboratoriesMusashino-shi, Tokyo 180Japan

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